Patents by Inventor Michael Lübbehusen

Michael Lübbehusen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for the prevention of arcing in vacuum sputtering installations
    Patent number: 6440281
    Abstract: The invention relates to a device for the prevention of arcing in vacuum sputtering installations. This device comprises a pulse generator which brings the cathode of the sputtering installation at predetermined intervals to a positive potential, whereby a deposing of layers on a target takes place. This deposing prevents the building-up of high voltages which can lead to arcing.
    Type: Grant
    Filed: February 3, 1995
    Date of Patent: August 27, 2002
    Assignee: Unaxis Deutschland Holding GmbH
    Inventors: Johann Stürmer, Michael Lübbehusen, Gernot Thorn