Patents by Inventor Michael Loren Walker

Michael Loren Walker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for blending process materials
    Patent number: 7905653
    Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.
    Type: Grant
    Filed: July 31, 2001
    Date of Patent: March 15, 2011
    Assignee: Mega Fluid Systems, Inc.
    Inventors: Jeffrey Alexander Wilmer, Daniel Kase Mackenzie, John Michael Lull, Eric A. Zadai, Michael Loren Walker
  • Method and apparatus for blending process materials
    Patent number: 6923568
    Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.
    Type: Grant
    Filed: July 31, 2001
    Date of Patent: August 2, 2005
    Assignee: Celerity, Inc.
    Inventors: Jeffrey Alexander Wilmer, Daniel Kase Mackenzie, John Michael Lull, Eric A. Zadai, Michael Loren Walker
  • Method and apparatus for blending process materials
    Publication number: 20020048213
    Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.
    Type: Application
    Filed: July 31, 2001
    Publication date: April 25, 2002
    Inventors: Jeffrey Alexander Wilmer, Daniel Kase Mackenzie, John Michael Lull, Eric A. Zadai, Michael Loren Walker