Patents by Inventor Michael McGeary

Michael McGeary has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for growing thin silicon oxides on a silicon substrate using chlorine precursors
    Patent number: 6387827
    Abstract: A method of growing a silicon oxide layer on a silicon substrate by means of a thermal oxidation in a furnace in the presence of a gaseous mixture, said mixture comprising oxygen and Cl2, said Cl2 being generated by an organic chlorine-carbon source, particularly oxalyl chloride. This method is directed to the growth of (ultra) thin silicon oxides and/or the cleaning of a substrate using a low oxidation power. Consequently the method disclosed is especially suited for temperature below 700° C. and for oxidation ambients containing only small amounts of oxygen.
    Type: Grant
    Filed: November 26, 1997
    Date of Patent: May 14, 2002
    Assignees: Imec (vzw), ASM International, Olin
    Inventors: Paul Mertens, Michael McGeary, Hessel Sprey, Karine Kenis, Marc Schaekers, Marc Heyns