Abstract: An apparatus for storing contamination-sensitive flat articles, in particular for storing semiconductor wafers, comprises a plurality of box-like compartments stationary arranged on a fixed mounting rack. The compartments are open on a front side and are arranged in rows and columns side by side and one above the other on the fixed mounting rack. The compartments each have a plurality of slotted holders for receiving the flat articles, and they surround a first handling unit configured for automatically inserting and removing the flat articles into and out of the slotted holders. A closed housing forms a clean room where both the plurality of compartments and the first handling unit are arranged.

Abstract: An apparatus for storing contamination-sensitive flat articles, in particular for storing semiconductor wafers, comprises a plurality of box-like compartments stationary arranged on a fixed mounting rack. The compartments are open on a front side and are arranged in rows and columns side by side and one above the other on the fixed mounting rack. The compartments each have a plurality of slotted holders for receiving the flat articles, and they surround a first handling unit configured for automatically inserting and removing the flat articles into and out of the slotted holders. A closed housing forms a clean room where both the plurality of compartments and the first handling unit are arranged.

Abstract: A motor-pump unit consists of a screw shaft pump and a slot-barrel motor located on the pressure side of the pump. The motor-pump unit is provided with a rigid, preferably one-piece, shaft by which the motor drives the pump. The motor is located on the pressure chamber of the pump with a bearing between the motor and pump. The shaft is supported within the pump, in part by the bearing, and the rotor of the motor is cantilevered on the free end of the shaft outside the pressure chamber. The pot-shaped stator part of the motor is telescoped over the rotor and fastened directly to the pressure side of the pump.