Patents by Inventor Michael O. Thompson

Michael O. Thompson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20040173585
    Abstract: Apparatus and methods for thermally processing a substrate with scanned laser radiation are disclosed. The apparatus includes a continuous radiation source and an optical system that forms an image on a substrate. The image is scanned relative to the substrate surface so that each point in the process region receives a pulse of radiation sufficient to thermally process the region.
    Type: Application
    Filed: March 22, 2004
    Publication date: September 9, 2004
    Applicant: ULTRATECH STEPPER, INC.
    Inventors: Somit Talwar, Michael O. Thompson, David A. Markle
  • Patent number: 6787825
    Abstract: A data storage/processing apparatus includes ROM and/or WORM and/or REWRITEABLE memory modules and/or processing modules provided as a single main layer or multiple main layers on top of a substrate. Transistors and/or diodes operate the apparatus. In one set of embodiments, at least some of the transistors and/or diodes are provided on or in the substrate. In another set of embodiments, at least some of the layers on the top of the substrate include low-temperature compatible organic materials and/or low temperature compatible processes inorganic films, and the transistors and/or diodes need not be disposed on or in the substrate. In a related fabricating method, the memory and/or processing modules are provided on the substrate by depositing the layers in successive steps under thermal conditions that avoid subjecting an already-deposited, processed underlying layers to static or dynamic temperatures exceeding given stability limits, particularly with regard to organic materials.
    Type: Grant
    Filed: January 2, 2001
    Date of Patent: September 7, 2004
    Assignee: Thin Film Electronics ASA
    Inventors: Hans Gude Gudesen, Per-Erik Nordal, Geirr I. Leistad, Johan Carlsson, Göran Gustafsson, Michael O Thompson
  • Patent number: 6747245
    Abstract: Apparatus and methods for thermally processing a substrate with scanned laser radiation are disclosed. The apparatus includes a continuous radiation source and an optical system that forms an image on a substrate. The image is scanned relative to the substrate surface so that each point in the process region receives a pulse of radiation sufficient to thermally process the region.
    Type: Grant
    Filed: November 6, 2002
    Date of Patent: June 8, 2004
    Assignee: Ultratech Stepper, Inc.
    Inventors: Somit Talwar, Michael O. Thompson, David A. Markle
  • Publication number: 20040084427
    Abstract: Apparatus and methods for thermally processing a substrate with scanned laser radiation are disclosed. The apparatus includes a continuous radiation source and an optical system that forms an image on a substrate. The image is scanned relative to the substrate surface so that each point in the process region receives a pulse of radiation sufficient to thermally process the region.
    Type: Application
    Filed: November 6, 2002
    Publication date: May 6, 2004
    Inventors: Somit Talwar, Michael O. Thompson, David A. Markle
  • Publication number: 20040082247
    Abstract: Fibrous micro-composite materials are formed from micro fibers. The fibrous micro-composite materials are utilized as the basis for a new class of MEMS. In addition to simple fiber composites and microlaminates, fibrous hollow and/or solid braids, can be used in structures where motion and restoring forces result from deflections involving torsion, plate bending and tensioned string or membrane motion. In one embodiment, fibrous elements are formed using high strength, micron and smaller scale fibers, such as carbon/graphite fibers, carbon nanotubes, fibrous single or multi-ply graphene sheets, or other materials having similar structural configurations. Cantilever beams and torsional elements are formed from the micro-composite materials in some embodiments.
    Type: Application
    Filed: March 21, 2003
    Publication date: April 29, 2004
    Inventors: Shahyaan Desai, Michael O. Thompson, Anil N. Netrvali, S. Leigh Phoenix
  • Patent number: 6645838
    Abstract: A process for activating a doped region (80) or amorphized doped region (34) in a semiconductor substrate (10). The process includes the steps of doping a region of the semiconductor substrate, wherein the region is crystalline or previously amorphized. The next step is forming a conformal layer (40) atop the upper surface (11) of the substrate. The next step is performing at least one of front-side and backside irradiation of the substrate to activate the doped region. The activation may be achieved by heating the doped region to just below the melting point of the doped region, or by melting the doped region but not the crystalline substrate. An alternative process includes the additional step of forming the doped region (amorphized or unamorphized) within or adjacent a deep dopant region (60) and providing sufficient heat to the deep dopant region through at least one of front-side and backside irradiation so that the doped region is activated through explosive recrystallization.
    Type: Grant
    Filed: April 11, 2002
    Date of Patent: November 11, 2003
    Assignee: Ultratech Stepper, Inc.
    Inventors: Somit Talwar, Yun Wang, Michael O. Thompson
  • Patent number: 6635588
    Abstract: Method for controlling heat transferred to a workpiece (W) process region (30) from laser radiation (10) using a thermally induced reflectivity switch layer (60). A film stack (6) is formed having an absorber layer (50) atop the workpiece with a portion covering the process region. The absorber layer absorbs and converts laser radiation into heat. Reflective switch layer (60) is deposited atop the absorber layer. The reflective switch layer comprises one or more layers, e.g. thermal insulator and reflectivity transition layers. The reflective switch layer covering the process region has a temperature related to the temperature of the process region. Reflectivity of the switch layer changes from a low to a high reflectivity state at a critical temperature of the process region, limiting radiation absorbed by the absorber layer by reflecting incident radiation when switched. This limits the amount of heat transferred to the process region from the absorber layer.
    Type: Grant
    Filed: February 19, 2002
    Date of Patent: October 21, 2003
    Assignee: Ultratech Stepper, Inc.
    Inventors: Andrew M. Hawryluk, Somit Talwar, Yun Wang, Michael O. Thompson
  • Publication number: 20030137865
    Abstract: In a non-volatile passive matrix memory device (10) comprising an electrically polarizable dielectric memory material (12) exhibiting hysteresis, first and second sets (14; 15) of addressing electrodes constitute word lines (WL) and bit lines (BL) of the memory device. A memory cell (13) is defined in the memory material (12) at the overlap between a word line (WL) and a bit line (BL). The word lines (WL) are divided into segments (S) with each segments sharing and being defined by adjoining bit lines (BL). Means (25) are provided for connecting each bit line (BL) of a segment (S) with a sensing means (26), thus enabling simultaneous connections of all memory cells (13) of a word line segment (15) for readout via the bit lines (BL) of the segment (S). Each sensing means (26) senses the charge flow in a bit line (BL) in order to determine a stored logical value.
    Type: Application
    Filed: May 7, 2002
    Publication date: July 24, 2003
    Inventors: Michael O. Thompson, Richard Womack, Johan Carlsson, Goran Gustafsson
  • Patent number: 6495390
    Abstract: A method, apparatus and system for controlling the amount of heat transferred to a process region (30) of a workpiece (W) from exposure with laser radiation (10) using a thermally induced reflectivity switch layer (60). The apparatus of the invention is a film stack (6) having an absorber layer (50) deposited atop the workpiece, such as a silicon wafer. A portion of the absorber layer covers the process region. The absorber layer absorbs laser radiation and converts the absorbed radiation into heat. A reflective switch layer (60) is deposited atop the absorber layer. The reflective switch layer may comprise one or more thin film layers, and preferably includes a thermal insulator layer and a transition layer. The portion of the reflective switch layer covering the process region has a temperature that corresponds to the temperature of the process region.
    Type: Grant
    Filed: August 27, 2001
    Date of Patent: December 17, 2002
    Assignee: Ultratech Stepper, Inc.
    Inventors: Andrew M. Hawryluk, Somit Talwar, Yun Wang, Michael O. Thompson
  • Patent number: 6479821
    Abstract: A method, apparatus and system for controlling the amount of heat transferred to a process region (30) of a workpiece (W) from exposure with a pulse of radiation (10), which may be in the form of a scanning beam (B), using a thermally induced phase switch layer (60). The apparatus of the invention is a film stack (6) having an absorber layer (50) deposited atop the workpiece, such as a silicon wafer. A portion of the absorber layer covers the process region. The absorber layer absorbs radiation and converts the absorbed radiation into heat. The phase switch layer is deposited above or below the absorber layer. The phase switch layer may comprise one or more thin film layers, and may include a thermal insulator layer and a phase transition layer. Because they are in close proximity, the portion of the phase switch layer covering the process region has a temperature that is close to the temperature of the process region. The phase of the phase switch layer changes from a first phase (e.g.
    Type: Grant
    Filed: September 11, 2000
    Date of Patent: November 12, 2002
    Assignee: Ultratech Stepper, Inc.
    Inventors: Andrew M. Hawryluk, Somit Talwar, Yun Wang, David A. Markle, Michael O. Thompson
  • Publication number: 20020060923
    Abstract: In a method of driving a passive matrix display or memory array of cells comprising an electrically polarizable material exhibiting hysteresis, in particular a ferroelectric material, wherein the polarization state of individual cells can be switched by application of electric potentials or voltages to word and bit lines in the matrix or array, a potential on selected word and bit lines is controlled to approach or coincide with one of n predefined potential levels and the potentials on all word and bit lines are controlled in time according to a protocol such that word lines are sequentially latched to potentials selected among nWORD potentials, while the bit lines are either latched sequentially to potentials selected among nBIT potentials, or during a certain period of a timing sequence given by the protocol connected to circuitry for detecting charges flowing between a bit line or bit lines and cells connecting thereto.
    Type: Application
    Filed: July 6, 2001
    Publication date: May 23, 2002
    Inventors: Michael O. Thompson, Per-Erik Nordal, Hans Gude Gudesen, Johan Carlsson, Goran Gustafsson
  • Patent number: 6383956
    Abstract: A method, apparatus and system for controlling the amount of heat transferred to a process region (30) of a workpiece (W) from exposure with laser radiation (10) using a thermally induced reflectivity switch layer (60). The apparatus of the invention is a film stack (6) having an absorber layer (50) deposited atop the workpiece, such as a silicon wafer. A portion of the absorber layer covers the process region. The absorber layer absorbs laser radiation and converts the absorbed radiation into heat. A reflective switch layer (60) is deposited atop the absorber layer. The reflective switch layer may comprise one or more thin film layers, and preferably includes a thermal insulator layer and a transition layer. The portion of the reflective switch layer covering the process region has a temperature that corresponds to the temperature of the process region.
    Type: Grant
    Filed: August 20, 2001
    Date of Patent: May 7, 2002
    Assignee: Ultratech Stepper, Inc.
    Inventors: Andrew M. Hawryluk, Somit Talwar, Yun Wang, Michael O. Thompson
  • Patent number: 6380044
    Abstract: A high-speed semiconductor transistor and process for forming same. The process includes forming, in a Si substrate (10), spaced apart shallow trench isolations (STIs) (20), and a gate (36) atop the substrate between the STIs. Then, regions (40,44) of the substrate on either side of the gate are either amorphized and doped, or just doped. In certain embodiments of the invention, extension regions (60,62 or 60′,62′) and deep drain and deep source regions (80, 84 or 80′,84′) are formed. In other embodiments, just deep drain and deep source regions (80, 84 or 80′, 84′) are formed. A conformal layer (106) is then formed atop the substrate, covering the substrate surface (11) and the gate. The conformal layer can serve to absorb light and/or to distribute heat to the underlying structures. Then, at least one of front-side irradiation (110) and back-side irradiation (116) is performed to activate the drain and source regions and, if present, the extensions.
    Type: Grant
    Filed: April 12, 2000
    Date of Patent: April 30, 2002
    Assignee: Ultratech Stepper, Inc.
    Inventors: Somit Talwar, Yun Wang, Michael O. Thompson
  • Publication number: 20020024835
    Abstract: In a non-volatile passive matrix memory device comprising an electrically polarizable dielectric memory material exhibiting hysteresis between first and second sets of addressing electrodes, the electrodes of the first set are word lines and the electrodes of the second set are bit lines of the memory device. A memory cell with a capacitor-like structure is defined in the memory material at the overlap between a word line and a bit line. The word lines are divided into segments with each segments sharing and being defined by adjoining bit lines and means are provided for connecting each bit line of a segment with a sensing means, thus enabling simultaneous connections of all memory cells of a word line segment for readout via the bit lines of the segment. Each sensing means senses the charge flow in a bit line in order to determine a logical value stored in a memory cell defined by the bit line.
    Type: Application
    Filed: July 6, 2001
    Publication date: February 28, 2002
    Inventors: Michael O. Thompson, Richard Womack, Johan Carlsson, Goran Gustafsson
  • Publication number: 20020022294
    Abstract: A method, apparatus and system for controlling the amount of heat transferred to a process region (30) of a workpiece (W) from exposure with laser radiation (10) using a thermally induced reflectivity switch layer (60). The apparatus of the invention is a film stack (6) having an absorber layer (50) deposited atop the workpiece, such as a silicon wafer. A portion of the absorber layer covers the process region. The absorber layer absorbs laser radiation and converts the absorbed radiation into heat. A reflective switch layer (60) is deposited atop the absorber layer. The reflective switch layer may comprise one or more thin film layers, and preferably includes a thermal insulator layer and a transition layer. The portion of the reflective switch layer covering the process region has a temperature that corresponds to the temperature of the process region.
    Type: Application
    Filed: August 27, 2001
    Publication date: February 21, 2002
    Applicant: ULTRATECH STEPPER, INC.
    Inventors: Andrew M. Hawryluk, Somit Talwar, Yun Wang, Michael O. Thompson
  • Publication number: 20020019148
    Abstract: A method, apparatus and system for controlling the amount of heat transferred to a process region (30) of a workpiece (W) from exposure with laser radiation (10) using a thermally induced reflectivity switch layer (60). The apparatus of the invention is a film stack (6) having an absorber layer (50) deposited atop the workpiece, such as a silicon wafer. A portion of the absorber layer covers the process region. The absorber layer absorbs laser radiation and converts the absorbed radiation into heat. A reflective switch layer (60) is deposited atop the absorber layer. Tne reflective switch layer may comprise one or more thin film layers, and preferably includes a thermal insulator layer and a transition layer. The portion of the reflective switch layer covering the process region has a temperature that corresponds to the temperature of the process region.
    Type: Application
    Filed: August 20, 2001
    Publication date: February 14, 2002
    Applicant: ULTRATECH STEPPER, INC.
    Inventors: Andrew M. Hawryluk, Somit Talwar, Yun Wang, Michael O. Thompson
  • Patent number: 6303476
    Abstract: A method, apparatus and system for controlling the amount of heat transferred to a process region (30) of a workpiece (W) from exposure with laser radiation (10) using a thermally induced reflectivity switch layer (60). The apparatus of the invention is a film stack (6) having an absorber layer (50) deposited atop the workpiece, such as a silicon wafer. A portion of the absorber layer covers the process region. The absorber layer absorbs laser radiation and converts the absorbed radiation into heat. A reflective switch layer (60) is deposited atop the absorber layer. The reflective switch layer may comprise one or more thin film layers, and preferably includes a thermal insulator layer and a transition layer. The portion of the reflective switch layer covering the process region has a temperature that corresponds to the temperature of the process region.
    Type: Grant
    Filed: June 12, 2000
    Date of Patent: October 16, 2001
    Assignee: Ultratech Stepper, Inc.
    Inventors: Andrew M. Hawryluk, Somit Talwar, Yun Wang, Michael O. Thompson
  • Patent number: 6086726
    Abstract: The present invention provides a surface modification method that provides beneficial changes in surface properties, can modify a surface to a greater depth than previous methods, and that is suitable for industrial application. The present method comprises applying a thin-film coating to a surface of a substrate, then subjecting the coated surface to an ion beam. The ion beam power pulse heats the coated surface, leading to alloying between the material in the coating and the material of the substrate. Rapid cooling of the alloyed layer after an ion beam pulse can lead to formation of metastable alloys and microstructures not accessible by conventional alloying methods or intense ion beam treatment of the substrate alone.
    Type: Grant
    Filed: May 19, 1998
    Date of Patent: July 11, 2000
    Assignee: Sandia Corporation
    Inventors: Timothy J. Renk, Neil R. Sorensen, Donna Cowell Senft, Rudolph G. Buchheit, Jr., Michael O. Thompson, Kenneth S. Grabowski
  • Patent number: 4429385
    Abstract: Digitally encoded data such as classified advertising and other data bases of similarly related messages are broadcast on a serial-type digital data transmission system. Each message is preceded by a headnote, structured so that upon reception, the receiver can select messages based upon a combination of hierarchical and relational views of the message data, without any interaction whatsoever with the broadcast system."Hierarchical access" means that messages are considered in categories and sub-categories. "Relational access" means that within sub-categories access is possible by a combination of attributes or keywords (i.e. using "and", "or", and "not" to combine multiple key phrases).We call the invention ReQueSt-DB. The name is derived from "Relational Queries on Sequential Data Bases". ReQueSt-DB allows rapid and facile access to one-way, cyclically broadcast, bit serial, sequential data bases consisting of (possibly) many thousands of messages with high selectivity.
    Type: Grant
    Filed: December 31, 1981
    Date of Patent: January 31, 1984
    Assignee: American Newspaper Publishers Association
    Inventors: Richard J. Cichelli, Michael O. Thompson