Patents by Inventor Michael P. Karazim

Michael P. Karazim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6648588
    Abstract: The present invention generally provides a processing system having a robot assembly which includes a multiple sided robot blade that can support a substrate on at least two sides thereof and associated methods to transfer one or more substrates in a processing system. An unprocessed substrate can be supported on the blade while a processed substrate is retrieved from a location to which the unprocessed substrate is to be delivered. The processing throughput rate is increased by reducing the movements required by the robot to exchange processed substrates and unprocessed substrates, thus decreasing the swap time.
    Type: Grant
    Filed: October 17, 2002
    Date of Patent: November 18, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Arul Shanmugasundram, Michael P. Karazim
  • Publication number: 20030205329
    Abstract: A modular lift-pin assembly includes a lift-pin having a distal end, a connector, and an actuator pin. The connector includes an actuator end having a plurality of catch fingers disposed around the actuator end. Each of the plurality of catch fingers includes a lip extending radially inwards. A lift-pin end is coupled to the distal end of the lift-pin, and the actuator pin is coupled to the actuator end of the connector.
    Type: Application
    Filed: April 22, 2003
    Publication date: November 6, 2003
    Inventors: Rudolf Gujer, Thomas K. Cho, Lily L. Pang, Michael P. Karazim, Tetsuya Ishikawa
  • Patent number: 6572708
    Abstract: A modular lift-pin assembly comprises a lift-pin having a distal end and a connector having a lift-pin end and an actuator end. The lift-pin end of the connector is coupled to the distal end of the lift-pin and an actuator pin is then coupled to the actuator end of the connector to actuate the lift-pin through the connector.
    Type: Grant
    Filed: February 28, 2001
    Date of Patent: June 3, 2003
    Assignee: Applied Materials Inc.
    Inventors: Rudolf Gujer, Thomas K. Cho, Lily L. Pang, Michael P. Karazim, Tetsuya Ishikawa
  • Publication number: 20030053903
    Abstract: The present invention generally provides a processing system having a robot assembly which includes a multiple sided robot blade that can support a substrate on at least two sides thereof and associated methods to transfer one or more substrates in a processing system. An unprocessed substrate can be supported on the blade while a processed substrate is retrieved from a location to which the unprocessed substrate is to be delivered. The processing throughput rate is increased by reducing the movements required by the robot to exchange processed substrates and unprocessed substrates, thus decreasing the swap time.
    Type: Application
    Filed: October 17, 2002
    Publication date: March 20, 2003
    Applicant: Applied Materials, Inc.
    Inventors: Arul Shanmugasundram, Michael P. Karazim
  • Patent number: 6481951
    Abstract: The present invention generally provides a processing system having a robot assembly which includes a multiple sided robot blade that can support a substrate on at least two sides thereof and associated methods to transfer one or more substrates in a processing system. An unprocessed substrate can be supported on the blade while a processed substrate is retrieved from a location to which the unprocessed substrate is to be delivered. The processing throughput rate is increased by reducing the movements required by the robot to exchange processed substrates and unprocessed substrates, thus decreasing the swap time.
    Type: Grant
    Filed: September 16, 1999
    Date of Patent: November 19, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Arul Shanmugasundram, Michael P. Karazim
  • Publication number: 20020011204
    Abstract: A modular lift-pin assembly comprises a lift-pin having a distal end and a connector having a lift-pin end and an actuator end. The lift-pin end of the connector is coupled to the distal end of the lift-pin and an actuator pin is then coupled to the actuator end of the connector to actuate the lift-pin through the connector.
    Type: Application
    Filed: February 28, 2001
    Publication date: January 31, 2002
    Applicant: Applied Materials, Inc.
    Inventors: Rudolf Gujer, Thomas K. Cho, Lily L. Pang, Michael P. Karazim, Tetsuya Ishikawa
  • Patent number: 6192829
    Abstract: The present invention provides exemplary antenna coil assemblies and substrate processing chambers using such assemblies. In one embodiment, an antenna coil assembly (100) for a substrate processing chamber includes an antenna coil (102) disposed in a frame (104). The frame includes a plurality of spaced apart tabs (120) around a periphery of the frame, with the coil coupled to the frame at the tabbed locations. At least one notch (122) is provided between each pair of adjacent tabs. The notches are adapted to facilitate thermal expansion and contraction of the frame at the notched locations to reduce stresses on the frame and coil connections.
    Type: Grant
    Filed: September 17, 1999
    Date of Patent: February 27, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Michael P. Karazim, Tetsuya Ishikawa, Rudolf Gujer, Thomas Kring, Pavel Staryuk, Abhi Desai, Tom Cho, Michael Douglas
  • Patent number: 4499691
    Abstract: An apparatus for underwater separation of a jet pump beam from the inlet mixer of a jet pump in a nuclear reactor system. The apparatus underwater cuts a retaining piece coupling the beam with the inlet mixer.
    Type: Grant
    Filed: August 25, 1982
    Date of Patent: February 19, 1985
    Assignee: General Electric Company
    Inventors: Michael P. Karazim, Bob Y. Okashima, John J. Ashburn