Patents by Inventor Michael Phenis

Michael Phenis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240045302
    Abstract: Disclosed is a method and system for cost effective, convenient remote high fidelity color reproduction and matching that can be used to convey color to observers remote to the physical source of color. Such remote observers can include product consumers wishing to view a product color, for example. In a preferred embodiment, the method comprises capture of article or product reflectance spectra and the use of this spectrum to filter ambient light or directed light in the environment of a remote user. Other embodiments of methods include various techniques to capture product spectral information and color matching functions useful for color reproduction using colored light sources. Additional systems embodiments include devices exploiting multiprimary displays to render the product color in avoidance of metamerism.
    Type: Application
    Filed: October 15, 2023
    Publication date: February 8, 2024
    Inventors: Dennis Willard Davis, Alice McKinstry Davis, Adam Michael Phenis
  • Publication number: 20220333044
    Abstract: Cleaning compositions and the method of using the same are disclosed, where the compositions include one or more alkanolamines, one or more ether alcohol solvents or aromatic containing alcohol, one or more corrosion inhibitors, and optionally one or more secondary solvents.
    Type: Application
    Filed: September 28, 2020
    Publication date: October 20, 2022
    Applicant: Versum Materials US, LLC
    Inventors: YUANMEI CAO, MICHAEL PHENIS, LILI WANG, LAISHENG SUN, AIPING WU
  • Patent number: 11054749
    Abstract: An organic photoresist stripping composition and method of using the composition with silicon wafers having an insulating layer and metallization on the wafers, having an aryl sulfonic acid or alkylaryl sulfonic acid or mixtures thereof; 1,3-dihydroxybenzene (resorcinol) or sorbitol or mixtures thereof; one or more hydrocarbon solvents having a flash point of greater than about 65° C., and optionally less than about 0.5% by weight water based on the total weight of the composition. The composition may also be used for the removal of other materials from other substrates.
    Type: Grant
    Filed: May 15, 2019
    Date of Patent: July 6, 2021
    Assignee: Versum Materials US, LLC
    Inventors: Richard D. Peters, Michael Phenis, Travis Acra
  • Patent number: 10948826
    Abstract: Improved stripper solutions for removing photoresists from substrates are provided that typically have flash points above about 95° C. and high loading capacities. The stripper solutions comprise diethylene glycol butyl ether, quaternary ammonium hydroxide, and an alkanolamine having at least two carbon atoms, at least one amino substituent and at least one hydroxyl substituent, the amino and hydroxyl substituents attached to two different carbon atoms. Some formulations can additionally contain a secondary solvent. The formulations do not contain DMSO. Methods for use of the stripping solutions are additionally provided.
    Type: Grant
    Filed: February 27, 2019
    Date of Patent: March 16, 2021
    Assignee: Versum Materials US, LLC
    Inventors: Yuanmei Cao, Michael Phenis, Richard Peters
  • Publication number: 20190361352
    Abstract: An organic photoresist stripping composition and method of using the composition with silicon wafers having an insulating layer and metallization on the wafers, having an aryl sulfonic acid or alkylaryl sulfonic acid or mixtures thereof; 1,3-dihydroxybenzene (resorcinol) or sorbitol or mixtures thereof; one or more hydrocarbon solvents having a flash point of greater than about 65° C., and optionally less than about 0.5% by weight water based on the total weight of the composition. The composition may also be used for the removal of other materials from other substrates.
    Type: Application
    Filed: May 15, 2019
    Publication date: November 28, 2019
    Applicant: Versum Materials US, LLC
    Inventors: Richard D. Peters, Michael Phenis, Travis Acra
  • Publication number: 20190278184
    Abstract: Improved stripper solutions for removing photoresists from substrates are provided that typically have flash points above about 95° C. and high loading capacities. The stripper solutions comprise diethylene glycol butyl ether, quaternary ammonium hydroxide, and an alkanolamine having at least two carbon atoms, at least one amino substituent and at least one hydroxyl substituent, the amino and hydroxyl substituents attached to two different carbon atoms. Some formulations can additionally contain a secondary solvent. The formulations do not contain DMSO. Methods for use of the stripping solutions are additionally provided.
    Type: Application
    Filed: February 27, 2019
    Publication date: September 12, 2019
    Applicant: Versum Materials US, LLC
    Inventors: Yuanmei Cao, Michael Phenis, Richard Peters
  • Patent number: 9069259
    Abstract: Improved dry stripper solutions for removing one, two or more photoresist layers from substrates are provided. The stripper solutions comprise dimethyl sulfoxide, a quaternary ammonium hydroxide, and an alkanolamine, a secondary solvent, and less than about 3 wt. % water. Methods for the preparation and use of the improved dry stripping solutions are additionally provided.
    Type: Grant
    Filed: February 5, 2013
    Date of Patent: June 30, 2015
    Assignee: Dynaloy, LLC
    Inventors: Michael Phenis, Laurl Johnson, Raymond Chan, Diane Scheele, Kimberly Pollard
  • Publication number: 20130172225
    Abstract: Improved dry stripper solutions for removing one, two or more photoresist layers from substrates are provided. The stripper solutions comprise dimethyl sulfoxide, a quaternary ammonium hydroxide, and an alkanolamine, a secondary solvent, and less than about 3 wt. % water. Methods for the preparation and use of the improved dry stripping solutions are additionally provided.
    Type: Application
    Filed: February 5, 2013
    Publication date: July 4, 2013
    Applicant: DYNALOY, LLC
    Inventors: Michael Phenis, Lauri Johnson, Raymond Chan, Diane Scheele, Kimberly Pollard
  • Publication number: 20070243773
    Abstract: Improved dry stripper solutions for removing one, two or more photoresist layers from substrates are provided. The stripper solutions comprise dimethyl sulfoxide, a quaternary ammonium hydroxide, and an alkanolamine, an optional secondary solvent and less than about 3 wt. % water and/or a dryness coefficient of at least about 1. Methods for the preparation and use of the improved dry stripping solutions are additionally provided. Advantageous solution methods are provided for the use of the novel stripper solutions to prepare an electronic interconnect structure by removing a plurality of resist layers to expose an underlying dielectric and related substrate without imparting damage to any of the underlying structure.
    Type: Application
    Filed: April 5, 2007
    Publication date: October 18, 2007
    Inventors: Michael Phenis, Raymond Chan, Kimberly Pollard
  • Publication number: 20070111912
    Abstract: Improved dry stripper solutions for removing one, two or more photoresist layers from substrates are provided. The stripper solutions comprise dimethyl sulfoxide, a quaternary ammonium hydroxide, and an alkanolamine, an optional secondary solvent and less than about 3 wt. % water and/or a dryness coefficient of at least about 1. Methods for the preparation and use of the improved dry stripping solutions are additionally provided.
    Type: Application
    Filed: October 23, 2006
    Publication date: May 17, 2007
    Inventors: Michael Phenis, Diane Scheele, Kimberly Pollard
  • Publication number: 20070099805
    Abstract: Improved stripper solutions for removing photoresists from substrates are provided that typically have freezing points below about +15° C. and high loading capacities. The stripper solutions comprise dimethyl sulfoxide, a quaternary ammonium hydroxide, and an alkanolamine having at least two carbon atoms, at least one amino substituent and at least one hydroxyl substituent, the amino and hydroxyl substituents attached to two different carbon atoms. Some formulation can additionally contain a secondary solvent. Methods for use of the stripping solutions are additionally provided.
    Type: Application
    Filed: October 28, 2005
    Publication date: May 3, 2007
    Inventors: Michael Phenis, Lauri Kirkpatrick, Raymond Chan, Diane Scheele, Kimberly Pollard