Patents by Inventor Michael Shevelev

Michael Shevelev has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for forming ultra-shallow junction for semiconductor device
    Patent number: 6423605
    Abstract: A practical, low-cost method for forming an ultra-shallow junction in a semiconductor material is provided. The method is directed to an initial RTA process using a heat source at a selected temperature and time sufficient to eliminate lattice defects without significant diffusion of the dopants, along with subsequent exposure to electromagnetic radiation having a frequency in the range of the resonance frequency of interstitial impurity ions. The intensity of the electric field is selected to be proportional to the value of the activation barrier potential of the impurity ions. The method may be used for any dopant material.
    Type: Grant
    Filed: November 9, 2000
    Date of Patent: July 23, 2002
    Assignee: Gyrotron Technology, Inc.
    Inventors: Vladislav Sklyarevich, Michael Shevelev