Patents by Inventor Michael Sogard
Michael Sogard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7162881Abstract: Methods and apparatus for enabling a clean, fragile object to be transported while protecting both front and back surfaces of the object are disclosed. According to one aspect of the present invention, a thermophoretic wand that is arranged to carry an object having a first temperature includes a first element, a contact surface, and an air supply. The first element has a first opening defined therein, and is maintained at a second temperature that is lower than the first temperature such that when the first element is in proximity to the object, a thermophoretic forces may be such that particles present between the object and the first element are driven away from the object. The air supply applies a vacuum of a first level through the first opening to suction the object against the contact surface.Type: GrantFiled: April 7, 2004Date of Patent: January 16, 2007Assignee: Nikon CorporationInventor: Michael Sogard
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Publication number: 20060187434Abstract: Improved autofocusing (“AF”) methods and devices for lithography are provided. Some embodiments of the invention provide an AF system that includes one or more interferometers for measuring a distance to a wafer surface or a reticle surface. The invention includes methods and devices for calibrating the interferometer(s) according to known distances to a target. According to some embodiments of the invention, a spatial filter reduces the amount of undesired signal coming from the wafer or reticle surface. In some such embodiments, higher orders of diffracted light from the wafer or reticle multilayer surfaces are eliminated with a pinhole filter oriented to reject light that is not vertically directed. Other embodiments include a spatial filtering system that passes a selected diffraction order, e.g., the first order of diffracted light, from the target. These spatial filters reduce variations in the signal and make further signal processing easier.Type: ApplicationFiled: February 22, 2005Publication date: August 24, 2006Applicant: Nikon CorporationInventor: Michael Sogard
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Publication number: 20060169928Abstract: A heating assembly (36) for heating a cathode (38) of an electron gun (30) of an exposure apparatus (10) includes a radiation source (42) and a beam shaper (44). The radiation source (42) generates a source beam (46). The beam shaper (44) receives the source beam (46) and selectively shapes the source beam (46) into a shaped beam (48) that is directed to the cathode (38). In certain embodiments, the beam shaper (44) can readily change the shape and intensity profile of the shaped beam (48) to achieve a desired electron beam (32) from the electron gun (30). In one embodiment, the radiation source (42) generates a pulsed source beam (46).Type: ApplicationFiled: February 2, 2005Publication date: August 3, 2006Inventors: Michael Sogard, Mark Takita
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Publication number: 20060162739Abstract: Embodiments of the invention provide a method and an apparatus for in situ chuck cleaning, which advantageously reduces downtime to restore flatness. In one embodiment, a method of cleaning a chuck in situ comprises providing a cleaning layer on a substrate, the cleaning layer comprising a deformable material; positioning the substrate to place the cleaning layer in contact with a chuck surface of the chuck in situ, the chuck surface having thereon a material to be removed from the chuck surface; pressing the cleaning layer against the chuck surface with a sufficient pressure to allow the material on the chuck surface to be attached to the cleaning layer; and removing the substrate with the cleaning layer and the material attached thereto from the chuck.Type: ApplicationFiled: January 10, 2006Publication date: July 27, 2006Applicant: Nikon CorporationInventor: Michael Sogard
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Publication number: 20060134683Abstract: Device and methods for performing hybridization and binding assays are described.Type: ApplicationFiled: January 25, 2006Publication date: June 22, 2006Inventor: Michael Sogard
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Publication number: 20060124864Abstract: Methods and apparatus for enabling the stroke length of a linear guide that is suitable for use in an environment with high vacuum levels to be substantially independent of a length associated with the linear guide are disclosed. According to one aspect of the present invention, a guide bearing system includes a linear guide and a first guide beam. The linear guide has an inner surface which includes an air pad. The linear guide is wrapped around the first guide beam such that it may slide with respect to the guide beam. The guide beam includes a first chamber that is in fluid communication with the linear guide through at least one of a first plurality of ports in the guide beam which enable access to the first chamber.Type: ApplicationFiled: December 14, 2004Publication date: June 15, 2006Applicant: Nikon CorporationInventor: Michael Sogard
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Publication number: 20060114435Abstract: An environmental system controls an environment in a gap between an optical assembly and a device and includes a fluid barrier and an immersion fluid system. The fluid barrier is positioned near the device. The immersion fluid system delivers an immersion fluid that fills the gap and collects the immersion fluid that is directly between the fluid barrier and the device. The fluid barrier can include a scavenge inlet that is positioned near the device, and the immersion fluid system can include a low pressure source that is in fluid communication with the scavenge inlet. The fluid barrier confines any vapor of the immersion fluid and prevents it from perturbing a measurement system. Additionally, the environmental system can include a bearing fluid source that directs a bearing fluid between the fluid barrier and the device to support the fluid barrier relative to the device.Type: ApplicationFiled: January 11, 2006Publication date: June 1, 2006Applicant: NIKON CORPORATIONInventors: Andrew Hazelton, Michael Sogard
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Publication number: 20060092533Abstract: Fluidic optical elements and systems use isotopically specified fluids for processing light passing therethrough. The isotopic composition of the fluid may be adjusted to vary the optical properties. The properties of the isotopically specified fluid may be monitored and adjusted to obtain the desired optical characteristics of the fluidic optical element. In one embodiment, a method of optically processing light includes directing light through an optical element that includes an isotopically specified fluid disposed in a confined space. The isotopically specified fluid is selected to provide a preset desired effect on the light directed therethrough for optically processing the light.Type: ApplicationFiled: December 20, 2005Publication date: May 4, 2006Applicant: NIKON CORPORATIONInventor: Michael Sogard
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Publication number: 20060082742Abstract: A subsystem for an exposure apparatus has a thermophoretic plate and at least one shielding layer covering a first surface of the thermophoretic plate. The at least one shielding layer controls thermally induced distortions of the exposure apparatus by reducing heat transfer between the exposure apparatus and the thermophoretic plate. The shielding layer includes an insulation layer and a reflective layer, where the reflective layer has a surface with a low emissivity. In one implementation, the reflective surface may be a surface of the thermophoretic plate. The reflective surface should be facing the exposure apparatus, but is not a requirement. More than one shielding layer may be used, in which each outermost shielding layer will have a higher temperature.Type: ApplicationFiled: October 19, 2004Publication date: April 20, 2006Inventor: Michael Sogard
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Patent number: 7030959Abstract: Methods and apparatus for using a flow of a relatively cool gas to establish a temperature gradient between a reticle and a reticle shield to reduce particle contamination on the reticle are disclosed. According to one aspect of the present invention, an apparatus that reduces particle contamination on a surface of an object includes a plate and a gas supply. The plate is positioned in proximity to the object such that the plate, which has a second temperature, and the object, which has a first temperature, are substantially separated by a space. The gas supply supplies a gas flow into the space. The gas has a third temperature that is lower than both the first temperature and the second temperature. The gas cooperates with the plate and the object to create a temperature gradient and, hence, a thermophoretic force that conveys particles in the space away from the object.Type: GrantFiled: July 23, 2004Date of Patent: April 18, 2006Assignee: Nikon CorporationInventor: Michael Sogard
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Publication number: 20060077361Abstract: A method of removing particles from a membrane reticle by a laser beam or beams. The particles on the bottom of the reticle are knocked off and fall away and particles on the top are removed a short distance from the surface and deposited on or near the strut wall and then released. Alternatively, the particles are dragged or rolled to the vicinity of the strut wall.Type: ApplicationFiled: October 12, 2004Publication date: April 13, 2006Inventor: Michael Sogard
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Publication number: 20060066834Abstract: An enclosure for protecting at least a pattern side and an opposing side of a reticle is disclosed. The enclosure includes a first and second part that form an enclosure around a reticle to be protected during handling, inspection, storage, and transport. The enclosure in conjunction with a heater and heat sink provides thermophoretic protection of an enclosed reticle.Type: ApplicationFiled: September 28, 2005Publication date: March 30, 2006Inventors: Alton Phillips, Michael Sogard, Douglas Watson
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Publication number: 20060048363Abstract: A stage assembly (218) for positioning a work piece (30) includes a stage (238), a heat transfer region (246), a stage mover assembly (240), and an environmental system (226). The stage (238) retains the work piece (30). The heat transfer region (246) is positioned near the stage (238). The stage mover assembly (240) moves the stage (238) relative to the heat transfer region (246). The environmental system (226) directly controls the temperature of the heat transfer region (246). For example, the environmental system (226) can circulate a circulation fluid near the heat transfer region (246). A bearing (254B) can maintain the stage (238) spaced apart from the heat transfer region (246).Type: ApplicationFiled: September 4, 2004Publication date: March 9, 2006Inventor: Michael Sogard
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Publication number: 20060033899Abstract: An environmental system controls an environment in a gap between an optical assembly and a device and includes a fluid barrier and an immersion fluid system. The fluid barrier is positioned near the device. The immersion fluid system delivers an immersion fluid that fills the gap and collects the immersion fluid that is directly between the fluid barrier and the device. The fluid barrier can include a scavenge inlet that is positioned near the device, and the immersion fluid system can include a low pressure source that is in fluid communication with the scavenge inlet. The fluid barrier confines any vapor of the immersion fluid and prevents it from perturbing a measurement system. Additionally, the environmental system can include a bearing fluid source that directs a bearing fluid between the fluid barrier and the device to support the fluid barrier relative to the device.Type: ApplicationFiled: October 20, 2005Publication date: February 16, 2006Applicant: NIKON CORPORATIONInventors: Andrew Hazelton, Michael Sogard
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Publication number: 20060028632Abstract: An environmental system controls an environment in a gap between an optical assembly and a device and includes a fluid barrier and an immersion fluid system. The fluid barrier is positioned near the device. The immersion fluid system delivers an immersion fluid that fills the gap and collects the immersion fluid that is directly between the fluid barrier and the device. The fluid barrier can include a scavenge inlet that is positioned near the device, and the immersion fluid system can include a low pressure source that is in fluid communication with the scavenge inlet. The fluid barrier confines any vapor of the immersion fluid and prevents it from perturbing a measurement system. Additionally, the environmental system can include a bearing fluid source that directs a bearing fluid between the fluid barrier and the device to support the fluid barrier relative to the device.Type: ApplicationFiled: September 29, 2005Publication date: February 9, 2006Applicant: Nikon CorporationInventors: Andrew Hazelton, Michael Sogard
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Publication number: 20060017895Abstract: Methods and apparatus for using a flow of a relatively cool gas to establish a temperature gradient between a reticle and a reticle shield to reduce particle contamination on the reticle are disclosed. According to one aspect of the present invention, an apparatus that reduces particle contamination on a surface of an object includes a plate and a gas supply. The plate is positioned in proximity to the object such that the plate, which has a second temperature, and the object, which has a first temperature, are substantially separated by a space. The gas supply supplies a gas flow into the space. The gas has a third temperature that is lower than both the first temperature and the second temperature. The gas cooperates with the plate and the object to create a temperature gradient and, hence, a thermophoretic force that conveys particles in the space away from the object.Type: ApplicationFiled: July 23, 2004Publication date: January 26, 2006Applicant: Nikon CorporationInventor: Michael Sogard
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Patent number: 6989922Abstract: Mechanical control and actuation of an adaptive optical element provides highly stable and repeatable correction of the shape of an optical element to an accuracy of a small fraction of a very short wavelength of light, responsive to a metrology source and sensor arrangement. Actuators in the form of individual set-screws or other actuators capable of axially positioning a shaft are driven by a robotic screw driver with four degrees of freedom or one or more linear actuators to exert force on the mirror. Positive or negative force may be used for outward and/or inward deflection of the mirror. When a desired force is developed on the mirror through a mechanical linkage, the linkage may be clamped by a passive clamp which may be released by an actuator such that the adjustment is maintained while the linear actuator and the clamp actuator are turned off; yielding a highly stable adjustment while effectively removing sources of actuator drift, noise, vibration and heating which may adversely affect stability.Type: GrantFiled: February 27, 2003Date of Patent: January 24, 2006Assignee: Nikon CorporationInventors: Alton Phillips, Michael Sogard
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Publication number: 20050275835Abstract: Methods and apparatus for reducing particle contamination on a reticle used in an extreme ultraviolet (EUV) lithography process. According to one aspect of the present invention, an apparatus that protects a surface of an object includes a plate that is positioned in proximity to the surface and protects at least a first portion of the surface. An opening is defined within the plate, and is such that a second portion of the surface is exposed through the opening. The apparatus also includes at least one magnetic component which creates a static magnetic field that is arranged to deflect charged particles away from the opening and the surface of the object.Type: ApplicationFiled: June 15, 2004Publication date: December 15, 2005Applicant: Nikon CorporationInventor: Michael Sogard
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Publication number: 20050223718Abstract: Methods and apparatus for enabling a clean, fragile object to be transported while protecting both front and back surfaces of the object are disclosed. According to one aspect of the present invention, a thermophoretic wand that is arranged to carry an object having a first temperature includes a first element, a contact surface, and an air supply. The first element has a first opening defined therein, and is maintained at a second temperature that is lower than the first temperature such that when the first element is in proximity to the object, a thermophoretic forces may be such that particles present between the object and the first element are driven away from the object. The air supply applies a vacuum of a first level through the first opening to suction the object against the contact surface.Type: ApplicationFiled: April 7, 2004Publication date: October 13, 2005Applicant: NIKON CORPORATIONInventor: Michael Sogard
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Patent number: 6925478Abstract: A system and methods for generating a variable rate filtered output using synchronous filters having the same filter sampling time, that avoids complexities of asynchronous filters. A system employs multiple filters that are staggered in time and set so that the output of one of the multiple filters is available whenever a secondary process requires state information. In another embodiment, the synchronous filters are programmable so as to change the filter sampling time. This configuration is possible when it is known that the prescribed time interval of the secondary process is longer than the filter sampling time and the prescribed time interval is an integer multiple of the filter sampling time. By using programmable filters, the number of filters required to accommodate a certain prescribed time interval can be minimized.Type: GrantFiled: December 19, 2000Date of Patent: August 2, 2005Assignee: Nikon CorporationInventors: Alireza Jabbari, David P Stumbo, Michael Sogard