Patents by Inventor Michaell Muecke

Michaell Muecke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Magnetron sputtering cathode with magnet disposed between two yoke plates
    Patent number: 6338781
    Abstract: The present invention relates to a device for cathode sputtering for producing coatings on a substrate by means of a sputtering cathode, which can be arranged in a vacuum chamber and comprises pole shoes, a target and at least one magnet or ring magnet 9 arranged concentrically with respect to the center axis of the sputtering cathode, wherein a divided yoke is arranged axially symmetrically with respect to the center axis of the sputtering cathode.
    Type: Grant
    Filed: August 30, 1999
    Date of Patent: January 15, 2002
    Assignee: Singulus Technologies AG
    Inventors: Eggo Sichmann, Michaell Muecke