Abstract: Systems and methods for translating time-stamped events to performance indicators are provided. A data component can receive sequences of time-stamped events associated with a device with a set of subsystem components. A conversion component can convert the sequences to time series based upon log transformations of event-intervals associated with the events. An estimation component can estimate local event-descriptor distribution characteristics at an event count associated with the time series. A translation component can translate the local event-descriptor distributions characteristics into performance indicators.

Abstract: A method and apparatus for controlling a multiple chamber semiconductor wafer processing system. The processing system includes a plurality of process chambers about the periphery of the transfer chamber. A centrally located wafer transfer mechanism effects moving wafers between the process chambers. The process sequencer control is a real time, multi-tasking control program having a presequencer or look ahead feature for preventing delays in the processing. In one implementation, the look ahead feature identifies mid-sequence or oriented wafers which cannot be further processed because their destination chamber is busy. Rather than expend system resources waiting for the destination chamber to become available, the wafers are transferred to a holding position, preferably the load lock, and rescheduled at the earliest time to finish their processing.