Patents by Inventor Michele M. L. Meyer-Fredholm

Michele M. L. Meyer-Fredholm has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Preparation of 157nm transmitting barium fluoride crystals with permeable graphite
    Patent number: 7276219
    Abstract: The present invention is directed to a method of making large diameter metal fluoride sungle crystals that can be used in optical lithograpby systems, for example, excimer laser that operate below 200 nm. In addition, the invention is directed to metal fluoride single crystals suitable for use in such lithographic ststems, such fluoride crystals having a internal transmission of ?99.9% at 193 nm and ?99.0% at 157 nm.
    Type: Grant
    Filed: November 5, 2004
    Date of Patent: October 2, 2007
    Assignee: Corning Incorporated
    Inventors: Michele M. L. Meyer-Fredholm, Michael A. Pell
  • Preparation of 157nm transmitting barium fluoride crystals with permeable graphite
    Patent number: 6855203
    Abstract: The object of the present invention is a process of preparing an optical fluoride crystal containing barium fluoride, which comprises: loading a crucible with a barium fluoride starting material crystal feedstock which contains at least one oxide as impurity, and an effective and non-excess amount of at least one fluorinating agent which is solid at ambient temperature, melting said mixture within said crucible, growing the crystal, by controlled cooling of the molten mixture, controlled cooling of said crystal to ambient temperature, recovering said crystal; and which is characterized in that the oxide(s) resulting from the reaction between said fluorinating agent(s) and said oxide(s), the impurity or impurities, can be discharged from said crucible, in view of the intrinsic permeability of the material constituting it. Said process is particularly adapted for preparing 157 nm transmitting lithography excimer laser optical fluoride crystals in graphite crucibles.
    Type: Grant
    Filed: March 28, 2002
    Date of Patent: February 15, 2005
    Assignee: Corning Incorporated
    Inventors: Michele M. L. Meyer-Fredholm, Michael A. Pell
  • Preparation of crystals
    Publication number: 20040089223
    Abstract: The object of the present invention is a process of preparing a crystal, which comprises:
    Type: Application
    Filed: October 31, 2003
    Publication date: May 13, 2004
    Inventor: Michele M. L. Meyer-Fredholm
  • Preparation of crystals
    Patent number: 6669778
    Abstract: The object of the present invention is a process of preparing a crystal, which comprises: loading a crucible with a mixture of the appropriate starting material which contains at least one oxide as impurity, and an effective and non-excess amount of at least one fluorinating agent which is solid at ambient temperature, melting said mixture within said crucible, growing the crystal, by controlled cooling of the molten mixture, controlled cooling of said crystal to ambient temperature, recovering said crystal; and which is characterized in that the oxide(s) resulting from the reaction between said fluorinating agent(s) and said oxide(s), the impurity or impurities, can be discharged from said crucible, in view of the dimensions of said crucible and of the intrinsic permeability of the material constituting it. Said process is particularly adapted for preparing (mono)crystals of CaF2 in graphite crucibles.
    Type: Grant
    Filed: March 26, 2002
    Date of Patent: December 30, 2003
    Assignee: Corning Incorporated
    Inventor: Michele M. L. Meyer-Fredholm
  • Preparation of 157nm transmitting barium fluoride crystals with permeable graphite
    Publication number: 20030066477
    Abstract: The object of the present invention is a process of preparing an optical fluoride crystal containing barium fluoride , which comprises:
    Type: Application
    Filed: March 28, 2002
    Publication date: April 10, 2003
    Inventors: Michele M. L. Meyer-Fredholm, Michael A. Pell
  • Preparation of crystals
    Publication number: 20020189527
    Abstract: The object of the present invention is a process of preparing a crystal, which comprises:
    Type: Application
    Filed: March 26, 2002
    Publication date: December 19, 2002
    Inventor: Michele M. L. Meyer-Fredholm