Patents by Inventor Michelle M. L. Fredholm

Michelle M. L. Fredholm has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Furnace purification and metal fluoride crystal grown in a purified furnace
    Patent number: 7306673
    Abstract: The invention is directed to a method for growing metal fluoride crystals suitable for use in below 200 nm optical lithography systems, the method comprising including at least the step of heating a crystal growth furnace to a temperature in the range of 1400-2000° C. to purify the furnace by removal of sulfur and chlorine prior to using the furnace for growing metal fluoride single crystals.
    Type: Grant
    Filed: October 22, 2004
    Date of Patent: December 11, 2007
    Assignee: Corning Incorporated
    Inventors: Michelle M. L. Fredholm, Jeffrey T. Kohli, Nicholas LeBlond, Alexandre M. Mayolet, Viktoria Pshenitsyna, Pawan Saxena, Paul M. Schermerhorn