Patents by Inventor Michelle Windsor

Michelle Windsor has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Bottom anti-reflective coatings derived from small core molecules with multiple epoxy moieties
    Patent number: 7323289
    Abstract: Novel anti-reflective coatings comprising small molecules (e.g., less than about 5,000 g/mole) in lieu of high molecular weight polymers and methods of using those coatings are provided. In one embodiment, aromatic carboxylic acids are used as the chromophores, and the resulting compounds are blended with a crosslinking agent and an acid. Anti-reflective coating films prepared according to the invention exhibit improved properties compared to high molecular weight polymeric anti-reflective coating films. The small molecule anti-reflective coatings have high etch rates and good via fill properties. Photolithographic processes carried out with the inventive material result in freestanding, 110-nm profiles.
    Type: Grant
    Filed: October 6, 2003
    Date of Patent: January 29, 2008
    Assignee: Brewer Science Inc.
    Inventors: Charles J. Neef, Mandar Bhave, Michelle Fowler, Michelle Windsor
  • Bottom anti-reflective coatings derived from small core molecules with multiple epoxy moieties
    Publication number: 20040110089
    Abstract: Novel anti-reflective coatings comprising small molecules (e.g., less than about 5,000 g/mole) in lieu of high molecular weight polymers and methods of using those coatings are provided. In one embodiment, aromatic carboxylic acids are used as the chromophores, and the resulting compounds are blended with a crosslinking agent and an acid. Anti-reflective coating films prepared according to the invention exhibit improved properties compared to high molecular weight polymeric anti-reflective coating films. The small molecule anti-reflective coatings have high etch rates and good via fill properties. Photolithographic processes carried out with the inventive material result in freestanding, 110-nm profiles.
    Type: Application
    Filed: October 6, 2003
    Publication date: June 10, 2004
    Applicant: Brewer Science Inc.
    Inventors: Charles J. Neef, Mandar Bhave, Michelle Fowler, Michelle Windsor