Patents by Inventor Michio Hatano

Michio Hatano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam device
    Publication number: 20060255269
    Abstract: A scanning charged particle microscope which facilitates adjustment, has a deep focal depth, and is provided with an aberration correction means. The state of aberration correction is judged from a SEM image by using a stop having plural openings and the judgment result is fed back to the adjustment of the aberration correction means. A stop of a nearly orbicular zone shape is used in combination with the aberration correction means.
    Type: Application
    Filed: January 30, 2006
    Publication date: November 16, 2006
    Inventors: Takeshi Kawasaki, Tomonori Nakano, Michio Hatano, Momoyo Enyama
  • Scanning electron microscope
    Publication number: 20060186337
    Abstract: A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.
    Type: Application
    Filed: September 21, 2005
    Publication date: August 24, 2006
    Inventors: Michio Hatano, Sukehiro Ito, Shinichi Tomita, Junichi Katane