Patents by Inventor Michio Nagasaka

Michio Nagasaka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20050244579
    Abstract: In a substrate treatment apparatus, a substrate to be treated (11) held on a substrate chuck section (13) is spun, and a plurality of treatment solutions are supplied onto the substrate to be treated (11). The apparatus has a plurality of collection tanks (16 to 19) provided to collect by kind the treatment solutions, scattered by a spin unit (15) from the substrate to be treated (11). To collect the treatment solution by one of the collection tanks, a lifting mechanism (28) is driven so that the treatment solution is collected with an inlet of only the collection tank opened, thereby preventing the treatment solution to be collected from mixing into the other collection tanks.
    Type: Application
    Filed: June 20, 2003
    Publication date: November 3, 2005
    Inventors: Minoru Matsuzawa, Michio Nagasaka