Abstract: A light exposure illuminating apparatus is provided which, employing harmonics of a continuously outputted laser beam, is small-sized, inexpensive and free from speckles and which achieves a high light source utilization efficiency. Specifically, a harmonics generating 1 generates light with fourth harmonics which are scanned by a scanning lens 2 and reflected and swept by a polygonal mirror 3. A cylindrical reflecting mirror radiates the sweeping fourth harmonics reflected by the polygonal mirror 3 onto an arcuate aperture formed in a light exposure mask. The light of fourth harmonics transmitted through the arcuate aperture reaches a reticle 7 set on a semiconductor pattern. The illuminating light passed through the reticle 7 is projected onto a wafer 9 via a concave mirror 5 and a convex mirror 76. The area of light exposure may be increased since the reticle 7 and the wafer 9 are moved in synchronism with the scanning of the scanning optical system.

Abstract: A lens evaluating device for measuring the optical transfer function of the lens under evaluation for evaluating the lens. The lens evaluating device includes an exposure light source, a converging lens for converging a light beam radiated from the exposure light source at a point, a characteristics evaluating pattern onto which the light beam outputted from the converging lens is converged by the lens under evaluation to form an image on it, a detection unit for receiving a return light beam having scanned the characteristics evaluating pattern via the lens under evaluation for detecting changes in reflection intensity of the return light beam, and an analysis unit for executing frequency analysis of the detected results from the detection unit for measuring the optical transfer function. The results of detection by the detection unit are subjected to a frequency analysis using a spectrum analyzer for measuring the optical transfer function of the lens under evaluation for evaluating the lens.

Abstract: A continuous-wave ultraviolet laser light generating apparatus includes a laser light source unit (1) for generating laser light from visible light to near-infrared light, a wavelength converting means (4) which includes an optical resonator (2) and a wavelength convertor (3) disposed in the optical resonator (2) for converting a wavelength of incident laser light and which converts the laser light from the laser light source unit (1) into continuous-wave ultraviolet laser light L.sub.UL to emit the latter, a locking means (5) for adjusting the optical resonator (2) so as to have a predetermined cavity length, and an electrooptic phase modulator (6) for modulating a phase of the laser light from the laser light source unit in response to a resonance frequency of the optical resonator. The electrooptic phase modulator (6) is made of an electrooptic crystal (11) having a composition of ATiOXO.sub.4 where A depicts any one of K, Cs and Rb and X depicts any one of P and As.

Abstract: A laser light generating apparatus has a first light source generating a light beam of a fundamental wavelength, a resonator made up of a plurality of reflection devices having high reflectance with respect to the fundamental wavelength of the light beam and a non-linear optical crystal element located within the resonator and generating a light beam of harmonic when the light beam of the fundamental wavelength is input thereto. Further, the laser light generating apparatus an amplifier element located within the resonator and amplifying the light beam of the fundamental wavelength therein and an energy source for exciting the amplifier element.

Abstract: An exposure device in which a reticle having a circuit pattern of a semiconductor device formed on it is irradiated with light beam emanated from a light source, such as a laser light source, for exposing the circuit pattern formed on the reticle on a semiconductor wafer. The exposure device includes a light beam generator for illuminating the reticle having a semiconductor circuit pattern formed on it, an image-forming optical system for forming an image on a wafer of a light image produced on radiating a light beam on the reticle from the light beam generator. The exposure device also includes a movement unit for moving the wafer relative to the image-forming optical system, and an alignment unit for detecting the position on the wafer of the image formed on the wafer by the image-forming optical system for position matching the image by the image-forming optical system relative to the wafer. The light beam generator includes a light source for excitation, a first resonator and a second resonator.

Abstract: A laser light beam generating apparatus includes at least one light beam source, first and second reflectors, a non-linear optical crystal element and an actuator. The light beam source emits a light beam. The non-linear optical crystal element is provided between the first reflector and the second reflector. A light beam emitted from the light beam source is incident on the non-linear optical crystal element through the first reflector. The actuator actuates at least one of the first and second reflectors along an optical axis of the light beam emitted from the light beam source.

Abstract: An optical pickup apparatus of the present invention for reading out information signals recorded on an optical recording medium such as magneto-optical disc is adapted to split by means of a light splitting element a light beam emitted from a light source into two light beam travelling in different directions, which are linearly polarized in normally intersecting directions and to convert the phases of the vibrational components along normally intersecting two axes on a plane normally intersecting the traveling directions of the two light beams and to irradiate the recording medium with two light beams which are differently polarized so that two beam spots are partially superimposed with each other on the recording medium. The superimposed beam spot area which is a read out area is made smaller than one of the beam spots in size so that a high resolution read-out is performed.

Abstract: A sum frequency conversion efficiency can be improved and operation can be stabilized. A laser generating apparatus comprises a nonlinear optical element (3) for generating a sum frequency light having wavelengths of first and second fundamental wave laser lights having first and second wavelengths (.lambda.1) and (.lambda.2) by introducing the above first and second fundamental wave laser lights thereto, and a resonator (7) having a first fundamental wave light source (1) and the nonlinear optical element (3) incorporated therein. The resonator (7) includes at least first and second reflection mirrors (M1) and (M2) disposed on opposing entrance and exit end faces of the nonlinear optical element (3) in an opposing relation. These first and second reflection mirrors (M1) and (M2) having transmissivities as high as possible relative to the second fundamental wave laser light and a sum frequency light.

Abstract: A system for correcting for positional deviations in a hand-held video camera caused by small movements or shaping of the user's hands includes an afocal optical system constituted by a positive meniscus lens and a negative meniscus lens. The positional deviations of the camera caused by minute tremors or shaking of the user's hands are detected by a pitch sensor and a roll sensor and a micro-computer is responsive to the detected amount of the positional deviations to drive the positive meniscus lens and the negative meniscus lens in vertical and horizontal directions with respect to the optical axis, thereby controlling the position of the image pickup light being radiated onto a CCD image sensor of the video camera.

Abstract: A laser light beam generating apparatus includes at least one light beam source, first and second reflectors, a non-linear optical crystal element and an actuator. The light beam source emits a light beam. The non-linear optical crystal element is provided between the first reflector and the second reflector. A light beam emitted from the light beam source is incident on the non-linear optical crystal element through the first reflector. The actuator actuates at least one of the first and second reflectors along an optical axis of the light beam emitted from the light beam source.

Abstract: A solid-state laser resonator includes a pair of reflectors 4, 5, a bar-like laser medium 6, a plurality of point laser sources 1, 2 and resonator including a plurality of resonator portions. At least one of the paired reflectors 4, 5 has a curved-surface mirror. The laser medium 6 is interposed between the paired reflectors 4, 5. Laser beams 8 emitted from the point laser sources 1, 2 are passed through one of the paired reflectors 4, 5 and irradiated as pumping lights on one end face of the laser medium 6. The resonators include the pair of reflectors, the laser sources 1, 2 and a plurality of thermal lenses. The thermal lenses are formed within the laser medium 6. The resonators produce output laser beam to produce from the other end face of the laser medium 6 through other one of the reflector 5.

Abstract: A laser beam generator for making wavelength conversion automatically controls the length of an external resonator of a laser source to perform wavelength conversion at a high efficiency by pulling-in a servo using a resonator length error signal and a reflected light signal. A sample-and-hold circuit is used to detect the error signal from the detected light signal which is reflected from the external resonator.

Abstract: A laser light beam generating apparatus includes at least one light beam source, resonator and an optical system. The resonator generates a type II second harmonic laser light beam. The resonator has a first reflector, a second reflector, a laser medium provided between the first and second reflectors and irradiated a light beam emitted from the light beam source through the first reflector and a non-linear optical crystal element provided between the laser medium and the second reflector. The optical system radiates the type II second harmonic laser light beam emitted from a virtual luminance point of the resonator to a conjugate point. In this laser light beam generating apparatus, with an effective length of the resonator L, an effective distance Le from the resonator to the conjugate point is set to thatLe=(m+1/2)Lwhere m is an integer.

Abstract: A laser light source in which a couple of light beams whose shapes are re-formed and whose polarizing planes are made perpendicular to each other are synthesized by a beam splitter and then the synthesized light is incident on an optical guide through a predetermined optical system, thereby generating the synthesized light having a short spot diameter and an improved power density.

Abstract: A solid state laser apparatus in which a fundamental laser beam generated in a laser medium is resonated so as to pass a nonlinear optical crystal element provided within a resonator to thereby generate a secondary harmonic laser light and a first optical element for suppressing a coupling caused by a sum-frequency generation between two polarization modes of the fundamental wave laser beam is provided within the resonator includes of a control device for controlling an effective resonator length of the resonator such that the two polarization modes of the fundamental wave laser beam become the same in oscillation intensity. Therefore, a mode hopping noise caused by the mode coupling of the fundamental laser beam within the same polarization mode can be avoided and the oscillation can be stabilized.

Abstract: A second harmonic generator having a non-linear optical crystal element for generating a second harmonic laser light. In this second harmonic generator, a birefringent element is inserted into a resonant optical path of a fundamental wave laser light, whereby the second harmonic laser light emitted as an output laser light is stabilized.

Abstract: The present invention is, in an optical head tracking error detecting apparatus in which a laser beam from a semiconductor laser element (1) is introduced into a diffraction grating (3), a 0-order beam and .+-.1st-order beams emitted from the diffraction grating (3) are introduced through a beam splitter (4) to an objective lens (5), a 0-order beam and .+-.1st-order beams of converged beams which are introduced into an optical recording medium (6) and reflected on the optical recording medium (6) are passed through the objective lens (5), reflected on the reflection surface of the beam splitter (4), and then introduced into a photodetector (7), a pair of photo-detection outputs corresponding to said .+-.