Abstract: Techniques for suppressing an increase in reflected wave power (reflection coefficient) due to IMD are proposed. A high-frequency power supply system for providing a high-frequency power to a connected load includes: a bias power supply which outputs a bias power at a first frequency; a source power supply which outputs a source power at a second frequency higher than the first frequency; and a matching unit including an impedance matching circuit which acquires the bias power and the source power and matches an impedance of the source power supply side with an impedance of the load side. The source power supply determines a delay setting value indicating the timing of starting a frequency variation process with respect to the source power, performs the frequency variation process using the delay setting value and the value of the first frequency, and outputs a frequency-varied source power to the matching unit.

Abstract: Techniques for suppressing an increase in reflected wave power (reflection coefficient) due to IMD are proposed. A high-frequency power supply system for providing a high-frequency power to a connected load includes: a bias power supply which outputs a bias power at a first frequency; a source power supply which outputs a source power at a second frequency higher than the first frequency; and a matching unit including an impedance matching circuit which acquires the bias power and the source power and matches an impedance of the source power supply side with an impedance of the load side. The source power supply determines a delay setting value indicating the timing of starting a frequency variation process with respect to the source power, performs the frequency variation process using the delay setting value and the value of the first frequency, and outputs a frequency-varied source power to the matching unit.

Abstract: A plasma generation apparatus includes a chamber, a high-frequency power source, a magnetic field generator and a parallel capacitor. The chamber has an inner, toroidal-shaped electric discharge space. The high-frequency power source outputs a high-frequency current to the magnetic field generator, which generates a high-frequency magnetic field upon flowing of the high-frequency current therethrough. The parallel capacitor is connected in parallel to the magnetic field generator.

Abstract: An inductive-coupling plasma generation apparatus in which coupling can be made stronger and power can be used more effectively than in a conventional technique. The inductive-coupling plasma generation apparatus includes an electroconductive chamber with a toroidal-shaped electrical discharge space formed inside. The plasma generation apparatus also includes a high-frequency power source connected to the chamber. The power source is configured to cause a high-frequency current to flow through electroconductive material forming the chamber along a toroidal direction.

Abstract: A plasma generation apparatus includes a chamber, a high-frequency power source, a magnetic field generator and a parallel capacitor. The chamber has an inner, toroidal-shaped electric discharge space. The high-frequency power source outputs a high-frequency current to the magnetic field generator, which generates a high-frequency magnetic field upon flowing of the high-frequency current therethrough. The parallel capacitor is connected in parallel to the magnetic field generator.

Abstract: An inductive-coupling plasma generator includes an electroconductive chamber with a toroidal-shaped electrical discharge space formed inside. The plasma generator also includes a high-frequency power source connected to the chamber. The power source is configured to cause a high-frequency current to flow through the chamber along a toroidal direction.

Abstract: There is provided a high frequency power supply device. The power control unit comprises an impedance adjuster that includes a variable reactance element and adjusts a load side impedance by changing a reactance value of the variable reactance element, and an impedance control unit that controls the variable reactance element of the impedance adjuster in response to a power value detected by a power detection unit so as to perform control of approximating the power value of the high frequency power, which is fed from the high frequency power generation unit to the load, to the setting value or control of maintaining the power value within the set allowable range by changing a resistance of the load side impedance in response to the power value detected by the power detection unit.

Abstract: There is provided a high frequency power supply device. The power control unit comprises an impedance adjuster that includes a variable reactance element and adjusts a load side impedance by changing a reactance value of the variable reactance element, and an impedance control unit that controls the variable reactance element of the impedance adjuster in response to a power value detected by a power detection unit so as to perform control of approximating the power value of the high frequency power, which is fed from the high frequency power generation unit to the load, to the setting value or control of maintaining the power value within the set allowable range by changing a resistance of the load side impedance in response to the power value detected by the power detection unit.

Abstract: A high frequency power supply includes a DC source unit (19) that outputs a DC voltage Vdc having an output level corresponding to a target voltage, an oscillation unit (13) that outputs a high frequency voltage signal having an output level corresponding to a target power, an amplification unit (14) that includes a plurality of amplifying elements, and amplifies and outputs the high frequency voltage signal output by the oscillation unit (13) utilizing the DC voltage output by the DC source unit (19), an output voltage detection unit (21) that detects an amplitude of the voltage between the amplified-side terminals of the amplifying elements in the amplification unit (14), or an amplitude of a voltage that is proportional to the amplitude of the voltage between the amplified-side terminals, and a target voltage decision unit (22) that decides a target value of the DC source voltage Vdc to be outputted by the DC source unit (19) based on the detection result from the output voltage detection unit (21).

Abstract: A high frequency power supply includes a DC source unit (19) that outputs a DC voltage Vdc having an output level corresponding to a target voltage, an oscillation unit (13) that outputs a high frequency voltage signal having an output level corresponding to a target power, an amplification unit (14) that includes a plurality of amplifying elements, and amplifies and outputs the high frequency voltage signal output by the oscillation unit (13) utilizing the DC voltage output by the DC source unit (19), an output voltage detection unit (21) that detects an amplitude of the voltage between the amplified-side terminals of the amplifying elements in the amplification unit (14), or an amplitude of a voltage that is proportional to the amplitude of the voltage between the amplified-side terminals, and a target voltage decision unit (22) that decides a target value of the DC source voltage Vdc to be outputted by the DC source unit (19) based on the detection result from the output voltage detection unit (21).

Abstract: A conveying device in which a conveying arm assembly can be quickly set in a conveying position and can be rapidly stabilized in the conveying position includes a conveying arm assembly, a fixed shaft, at least one set of hollow operating shafts which are necessary for controlling an operation of the conveying arm assembly, and a motor provided between the fixed shaft and each of the operating shafts. The one set of operating shafts are attached to the fixed shaft such that they can be rotated coaxially with respect to the fixed shaft outside fixed shaft and are arranged in an axial direction of the fixed shaft. The conveying arm assembly is attached to an end portion of the operating shaft close to the ended of the fixed shaft. The motor comprises a stator provided on the fixed shaft and a rotor provided on each of the operating shafts such that it is opposed to the stator on an outer peripheral side of the stator.

Abstract: A discharge tube is assembled from three sections formed of metal. A first discharge tube element and a second discharge tube element are connected with an insulator for forming a discharging gap and vacuum-sealing interposed between connecting flanges of both discharge tube elements along with an O-ring. The first discharge tube element and a third discharge tube element and a third discharge tube element are connected in a similar manner, and a discharge gap is formed between adjacent discharge tube elements. A high-frequency power supply is connected to each discharge tube element. Respective discharge tube elements are provided with cooling medium flow paths separately each other.

Abstract: A conveying device in which a conveying arm assembly can be quickly set in a conveying position and can be rapidly stabilized in the conveying position is disclosed. The conveying device comprises a conveying arm assembly, a fixed shaft, at least one set of hollow operating shafts which are necessary for controlling an operation of the conveying arm assembly, and a motor provided between the fixed shaft and each of the operating shafts. The one set of operating shafts are attached to the fixed shaft such that they can be rotated coaxially with respect to the fixed shaft outside fixed shaft and are arranged in an axial direction of the fixed shaft. The conveying arm assembly is attached to an end portion of the operating shaft close to the end of the fixed shaft. The motor comprises a stator provided on the fixed shaft and a rotor provided on each of the operating shafts such that it is opposed to the stator on an outer peripheral side of the stator.

Abstract: A conveying device in which a conveying arm assembly can be quickly set in a conveying position and can be rapidly stabilized in the conveying position includes a conveying arm assembly, a fixed shaft, at least one set of hollow operating shafts which are necessary for controlling an operation of the conveying arm assembly, and a motor provided between the fixed shaft and each of the operating shafts. The one set of operating shafts are attached to the fixed shaft such that they can be rotated coaxially with respect to the fixed shaft outside fixed shaft and are arranged in an axial direction of the fixed shaft. The conveying arm assembly is attached to an end portion of the operating shaft close to the ended of the fixed shaft. The motor comprises a stator provided on the fixed shaft and a rotor provided on each of the operating shafts such that it is opposed to the stator on an outer peripheral side of the stator.

Abstract: A plasma generator according to the invention includes a rectangular waveguide into which a microwave is introduced, a coaxial tube connected in a T shape to the rectangular waveguide through their respective openings, a vacuum sealing window for blocking the openings with an insulator to thereby vacuum seal the interior of the coaxial tube against the rectangular waveguide, and an insulator arranged in the coaxial tube as linked to the vacuum sealing window, thus facilitating microwave matching.

Abstract: A plasma generator according to the invention includes a rectangular waveguide into which a microwave is introduced, a coaxial tube connected in a T shape to the rectangular waveguide through their respective openings, a vacuum sealing window for blocking the openings with an insulator to thereby vacuum seal the interior of the coaxial tube against the rectangular waveguide, and an insulator arranged in the coaxial tube as linked to the vacuum sealing window, thus facilitating microwave matching.

Abstract: A conveying device in which a conveying arm assembly can be quickly set in a conveying position and can be rapidly stabilized in the conveying position is disclosed. The conveying device comprises a conveying arm assembly, a fixed shaft, at least one set of hollow operating shafts which are necessary for controlling an operation of the conveying arm assembly, and a motor provided between the fixed shaft and each of the operating shafts. The one set of operating shafts are attached to the fixed shaft such that they can be rotated coaxially with respect to the fixed shaft outside fixed shaft and are arranged in an axial direction of the fixed shaft. The motor comprises a stator provided on the fixed shaft and a rotor provided on each of the operating shafts such that it is opposed to the stator on an outer peripheral side of the stator.

Abstract: One discharge tube assembled from divided three sections is constructed by connecting between a first discharge tube element of metal material and a second discharge tube element of metal material with an insulator for forming a discharging gap and vacuum-sealing interposed between connecting flanges of both discharge tube elements in a state of sealing hermetically with an O-ring and also by connecting between a first discharge tube element of metal material and a third discharge tube element of metal material in a similar manner, and a discharge gap is formed between adjacent discharge tube elements. A high-frequency power supply is connected to each discharge tube element. Respective discharge tube elements are provided with cooling medium flow paths separately each other.

Abstract: A plasma monitoring apparatus for monitoring a condition of plasma of a plasma load to which power is supplied from a high frequency power source through an impedance matcher provides with a first input impedance calculator for calculating an impedance as a first input impedance from a supply-side terminal of the matcher to the plasma load-side based on voltage, current and phase difference detected at the supply-side terminal of the matcher, a second input impedance calculator for calculating an impedance as a second input impedance from a load-side terminal of the matcher to the plasma load based on a impedance of a element of the matcher and the first input impedance and a plasma impedance calculator for calculating an impedance of the plasma load from the second input impedance and an impedance of a supply-side connecting the matcher and the plasma load.

Abstract: The microwave generator with use of a magnetron comprises a microwave detector for detecting microwave output from the magnetron and a filament life diagnostic circuit for judging the life of filament of the magnetron by decreasing an input power to a filament of the magnetron from a normal state of the magnetron while monitoring the microwave output from the magnetron by the microwave detector, comparing the input power in the normal state of the magnetron with that just before the magnetron becomes unstable and judging the filament life based on the difference between the input power of the normal state and that just before the unstable state.