Patents by Inventor Michiro Isobe

Michiro Isobe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for measuring ion beam collimation, shaping the ion beam and controlling scanning thereof
    Patent number: 5180918
    Abstract: A method of measuring collimation of an ion beam used for electrostatically-controlled collimated scanning includes the steps of electrically detecting the ion beam to determine the time-dependent change in the scanning position of the ion beam both at an upstream location and at a downstream location of the ion beam, determining upstream and downstream positions of the ion beam at mutually corresponding times based on the time-dependent change determination, and determining the degree of collimation of the ion beam based on the relationship between the upstream and downstream positions.
    Type: Grant
    Filed: May 15, 1991
    Date of Patent: January 19, 1993
    Assignee: Nissin Electric Company, Limited
    Inventor: Michiro Isobe