Patents by Inventor Michiteru Ayukawa

Michiteru Ayukawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thin film semiconductor device including a semiconductor film with high field-effect mobility
    Patent number: 6271062
    Abstract: A thin film transistor includes: a substrate; a gate electrode, a source electrode and a drain electrode formed above the substrate; and an insulating film and a semiconductor film formed between the gate electrode, and the source electrode and the drain electrode, wherein the semiconductor film includes an i-type silicon film, and a portion of the semiconductor film within 50 nm from the insulating film has a microcrystalline structure having a conductivity of 5×10−10 S/cm or more.
    Type: Grant
    Filed: June 5, 1998
    Date of Patent: August 7, 2001
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Yukihiko Nakata, Masaki Fujihara, Masahiro Date, Takuya Matsuo, Michiteru Ayukawa, Takashi Itoga
  • Thin-film semiconductor device including a semiconductor film with high field-effect mobility
    Patent number: 5796116
    Abstract: A thin film transistor includes: a substrate; a gate electrode, a source electrode and a drain electrode formed above the substrate; and an insulating film and a semiconductor film formed between the gate electrode, and the source electrode and the drain electrode, wherein the semiconductor film includes an i-type silicon film, and a portion or the semiconductor film within 50 nm from the insulating film has a microcrystalline structure having a conductivity of 5.times.10.sup.-10 S/cm or more.
    Type: Grant
    Filed: July 25, 1995
    Date of Patent: August 18, 1998
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Yukihiko Nakata, Masaki Fujihara, Masahiro Date, Takuya Matsuo, Michiteru Ayukawa, Takashi Itoga