Abstract: A gas analysis system includes a fluidic channel for flow of a gas to be analyzed, a detector in the channel and adapted for measuring interactions of the gas with the detector, the detector including a resonator of the electromechanical nanosystem (NEMS) type and a heating system for heating a part of the detector, an actuation device for vibrationally actuating the resonator according to an excitation signal applied to an input of the detector, a detection device adapted for providing an output electric signal representative of the vibrations of the resonator, a read-out device connected to an input of the detector and configured for simultaneously measuring, from the output signal of the detector, the change in resonance frequency and the change in amplitude of the vibrations at the resonance frequency of the resonator, and a processing device configured for determining from the changes a fluidic characteristic of the gas.

Abstract: An optomechanical device with mechanical elements and optical filters for actuating and/or detecting movement of the elements, including a support, and on the support: an array of mechanical elements anchored to the support and configured to move with respect thereto, and an actuating and/or detection device actuating the elements and/or detecting movement of the elements or frequency variations of the movement. The actuating and/or detection device includes an array of optical filters. Each filter resonates at a particular wavelength and is coupled to one of the elements. The actuating and/or detecting device is positioned in vicinity of all or some of the elements, between the elements and the support. The optical filters are fixed with respect to the support and the mechanical elements and the optical filters are superimposed.

Abstract: An optomechanical device with mechanical elements and optical filters for actuating and/or detecting movement of the elements, including a support, and on the support: an array of mechanical elements anchored to the support and configured to move with respect thereto, and an actuating and/or detection device actuating the elements and/or detecting movement of the elements or frequency variations of the movement. The actuating and/or detection device includes an array of optical filters. Each filter resonates at a particular wavelength and is coupled to one of the elements. The actuating and/or detecting device is positioned in vicinity of all or some of the elements, between the elements and the support. The optical filters are fixed with respect to the support and the mechanical elements and the optical filters are superimposed.

Abstract: A gas analysis system includes a fluidic channel for flow of a gas to be analyzed, a detector in the channel and adapted for measuring interactions of the gas with the detector, the detector including a resonator of the electromechanical nanosystem (NEMS) type and a heating system for heating a part of the detector, an actuation device for vibrationally actuating the resonator according to an excitation signal applied to an input of the detector, a detection device adapted for providing an output electric signal representative of the vibrations of the resonator, a read-out device connected to an input of the detector and configured for simultaneously measuring, from the output signal of the detector, the change in resonance frequency and the change in amplitude of the vibrations at the resonance frequency of the resonator, and a processing device configured for determining from the changes a fluidic characteristic of the gas.