Patents by Inventor Miho Shimotori

Miho Shimotori has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing device having connection plates, substrate processing method
    Patent number: 11339476
    Abstract: Examples of a substrate processing device include an annular distribution ring, a plurality of connection plates continued to the distribution ring and having non-uniform impedances, a shower plate electrically connected to the plurality of connection plates, and a stage provided below the shower plate so as to face the shower plate.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: May 24, 2022
    Assignee: ASM IP Holding B.V.
    Inventors: Naoto Tsuji, Ippei Yanagisawa, Miho Shimotori, Makoto Igarashi
  • SUBSTRATE PROCESSING DEVICE HAVING CONNECTION PLATES, SUBSTRATE PROCESSING METHOD
    Publication number: 20210102289
    Abstract: Examples of a substrate processing device include an annular distribution ring, a plurality of connection plates continued to the distribution ring and having non-uniform impedances, a shower plate electrically connected to the plurality of connection plates, and a stage provided below the shower plate so as to face the shower plate.
    Type: Application
    Filed: September 30, 2020
    Publication date: April 8, 2021
    Inventors: Naoto Tsuji, Ippei Yanagisawa, Miho Shimotori, Makoto Igarashi