Abstract: An optoelectronic device including at least one electromechanical transducer located vertically in line with at least one light-emitting diode, said at least one electromechanical transducer and said at least one light-emitting diode being connected to conductive tracks of a same transfer substrate.

Abstract: Process for producing semiconductor devices in a substrate, comprising: photolithography of a pattern of a reticle onto a portion of the substrate, defining first elements of the semiconductor devices, an exposure of the pattern being repeated a plurality of times in order to define all of the devices, photolithography of a pattern of an etch mask over all of the substrate, etching photolithography patterns into one portion of the thickness of the substrate, wherein first dicing lanes encircling the devices are included in the pattern of the etch mask and/or of the reticle, and the photolithography of the etch mask defines second dicing lanes defined by predetermined fracture lines of the edges of the substrate, and furthermore comprising the implementation of a step of irradiating the substrate with a laser beam through the first and second dicing lanes.

Abstract: A microdevice (100) comprising a movable element (111) capable of moving relative to a fixed part (115), produced in first and second layers of material (104, 106) arranged one above the other such that the movable element comprises a portion (112) of the first layer and a portion (118) of the second layer secured to each other, and wherein the movable element is suspended from the fixed part by a suspension structure (121) formed in the first and/or second layer of material.

Abstract: A microdevice (100) comprising a movable element (111) capable of moving relative to a fixed part (115), produced in first and second layers of material (104, 106) arranged one above the other such that the movable element comprises a portion (112) of the first layer and a portion (118) of the second layer secured to each other, and wherein the movable element is suspended from the fixed part by a suspension structure (121) formed in the first and/or second layer of material.

Abstract: A system is disclosed for suspension of a mobile mass, such as an inertial angular sensor, including a connection device including first and second connection elements connected to each other through a connection block and deformable in bending in a mobility plane so as to enable displacements relative to the connection block, of the mobile mass connected to the first connection element, and of another element of the system connected to the second connection element such as a support or another mobile mass respectively, along two distinct directions respectively. At least one of the connection elements is formed from two springs, connecting the connection block to the mobile mass or the other element of the system respectively. The connection element thus has improved linearity properties.

Abstract: Process for producing semiconductor devices in a substrate, comprising: photolithography of a pattern of a reticle onto a portion of the substrate, defining first elements of the semiconductor devices, an exposure of the pattern being repeated a plurality of times in order to define all of the devices, photolithography of a pattern of an etch mask over all of the substrate, etching photolithography patterns into one portion of the thickness of the substrate, wherein first dicing lanes encircling the devices are included in the pattern of the etch mask and/or of the reticle, and the photolithography of the etch mask defines second dicing lanes defined by predetermined fracture lines of the edges of the substrate, and furthermore comprising the implementation of a step of irradiating the substrate with a laser beam through the first and second dicing lanes.

Abstract: The invention relates to a sensor-type or actuator-type MEMS or NEMS device provided with a stacked stop element comprising —a first flat layer having a first flat electrode intended to be at a first electric potential and a second flat electrode intended to be at a second electric potential different from the first potential, said first flat electrode being movable relative to the second flat electrode in a first direction parallel to the first flat layer, —a second flat layer placed on top of the first flat layer and electrically insulated from the first flat layer by at least one intermediate layer made of an insulating material, the second flat layer comprising a first flat element that is mechanically secured to the first flat electrode, and a second flat element that is mechanically secured to the second flat electrode, characterized in that it further comprises at least one stop element extending from the first flat element or the second flat element in the first direction and projecting from said flat

Abstract: The invention relates to a sensor-type or actuator-type MEMS or NEMS device provided with a stacked stop element comprising —a first flat layer having a first flat electrode intended to be at a first electric potential and a second flat electrode intended to be at a second electric potential different from the first potential, said first flat electrode being movable relative to the second flat electrode in a first direction parallel to the first flat layer, —a second flat layer placed on top of the first flat layer and electrically insulated from the first flat layer by at least one intermediate layer made of an insulating material, the second flat layer comprising a first flat element that is mechanically secured to the first flat electrode, and a second flat element that is mechanically secured to the second flat electrode, characterized in that it further comprises at least one stop element extending from the first flat element or the second flat element in the first direction and projecting from said flat

Abstract: A micro-device comprising: a substrate, a stationary element rigidly connected to the substrate, a first mobile element suspended from the stationary element by first retention elements and configured to move with respect to the stationary element, a second mobile element suspended from the first mobile element by second retention elements and configured to move with respect to the first mobile element and the stationary element, a first cavity, at least some of the walls of which are formed by the stationary element and in which the first mobile element is encapsulated, a second cavity positioned in the first cavity, at least some of the walls of which are formed by the first mobile element, in which the second mobile element is encapsulated and which is insulated from the first cavity.

Abstract: A system is disclosed for suspension of a mobile mass, such as an inertial angular sensor, including a connection device including first and second connection elements connected to each other through a connection block and deformable in bending in a mobility plane so as to enable displacements relative to the connection block, of the mobile mass connected to the first connection element, and of another element of the system connected to the second connection element such as a support or another mobile mass respectively, along two distinct directions respectively. At least one of the connection elements is formed from two springs, connecting the connection block to the mobile mass or the other element of the system respectively. The connection element thus has improved linearity properties.

Abstract: A micro-device comprising: a substrate, a stationary element rigidly connected to the substrate, a first mobile element suspended from the stationary element by first retention elements and configured to move with respect to the stationary element, a second mobile element suspended from the first mobile element by second retention elements and configured to move with respect to the first mobile element and the stationary element, a first cavity, at least some of the walls of which are formed by the stationary element and in which the first mobile element is encapsulated, a second cavity positioned in the first cavity, at least some of the walls of which are formed by the first mobile element, in which the second mobile element is encapsulated and which is insulated from the first cavity.