Patents by Inventor Mike Daniel KOLLMANN

Mike Daniel KOLLMANN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for processing wafer-shaped articles
    Patent number: 9616451
    Abstract: The harmful effects of accumulating droplets of process liquid on the outer surface of a dispense nozzle are prevented by equipping an apparatus for process wafer-shaped articles with a blow-off block that blows the droplets off the nozzle outer surface before they can coalesce and drop in an uncontrolled manner onto the work piece. The nozzle preferably has a polished and tapered outer surface to aid in blowing off any accumulated droplets of process liquid from the outer surface.
    Type: Grant
    Filed: November 19, 2012
    Date of Patent: April 11, 2017
    Assignee: LAM RESEARCH AG
    Inventors: Mike Daniel Kollmann, Christian Thomas Fischer, Francisco Camargo
  • APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
    Publication number: 20140137908
    Abstract: The harmful effects of accumulating droplets of process liquid on the outer surface of a dispense nozzle are prevented by equipping an apparatus for process wafer-shaped articles with a blow-off block that blows the droplets off the nozzle outer surface before they can coalesce and drop in an uncontrolled manner onto the work piece. The nozzle preferably has a polished and tapered outer surface to aid in blowing off any accumulated droplets of process liquid from the outer surface.
    Type: Application
    Filed: November 19, 2012
    Publication date: May 22, 2014
    Applicant: LAM RESEARCH AG
    Inventors: Mike Daniel KOLLMANN, Christian Thomas FISCHER, Francisco CAMARGO