Patents by Inventor Mike L. Kempel

Mike L. Kempel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for doping semiconductor materials
    Patent number: 6015459
    Abstract: Method is provided for controlling the concentration of a dopant introduced into an epitaxial film during CVD or sublimation growth by controlling the energy of dopant atoms impinging on the film in a supersonic beam. Precursor materials may also be introduced by supersonic beam. Energy of the dopant atoms may be changed by changing flow conditions in the supersonic beam or changing carrier gases. Flow may be continuous or pulsed. Examples of silicon carbide doping are provided.
    Type: Grant
    Filed: June 26, 1998
    Date of Patent: January 18, 2000
    Assignee: Extreme Devices, Inc.
    Inventors: Keith D. Jamison, Mike L. Kempel