Patents by Inventor Mikhail M. Sushchik

Mikhail M. Sushchik has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10605722
    Abstract: Methods and systems for matching measurement spectra across one or more optical metrology systems are presented. The values of one or more system parameters used to determine the spectral response of a specimen to a measurement performed by a target metrology system are optimized. The system parameter values are optimized such that differences between measurement spectra generated by a reference system and the target system are minimized for measurements of the same metrology targets. Methods and systems for matching spectral errors across one or more optical metrology systems are also presented. A trusted metrology system measures the value of at least one specimen parameter to minimize model errors introduced by differing measurement conditions present at the time of measurement by the reference and target metrology systems. Methods and systems for parameter optimization based on low-order response surfaces are presented to reduce the compute time required to refine system calibration parameters.
    Type: Grant
    Filed: December 8, 2017
    Date of Patent: March 31, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Hidong Kwak, John Lesoine, Malik Sadiq, Lanhua Wei, Shankar Krishnan, Leonid Poslavsky, Mikhail M. Sushchik
  • Publication number: 20180100796
    Abstract: Methods and systems for matching measurement spectra across one or more optical metrology systems are presented. The values of one or more system parameters used to determine the spectral response of a specimen to a measurement performed by a target metrology system are optimized. The system parameter values are optimized such that differences between measurement spectra generated by a reference system and the target system are minimized for measurements of the same metrology targets. Methods and systems for matching spectral errors across one or more optical metrology systems are also presented. A trusted metrology system measures the value of at least one specimen parameter to minimize model errors introduced by differing measurement conditions present at the time of measurement by the reference and target metrology systems. Methods and systems for parameter optimization based on low-order response surfaces are presented to reduce the compute time required to refine system calibration parameters.
    Type: Application
    Filed: December 8, 2017
    Publication date: April 12, 2018
    Inventors: Hidong Kwak, John Lesoine, Malik Sadiq, Lanhua Wei, Shankar Krishnan, Leonid Poslavsky, Mikhail M. Sushchik
  • Patent number: 9857291
    Abstract: Methods and systems for matching measurement spectra across one or more optical metrology systems are presented. The values of one or more system parameters used to determine the spectral response of a specimen to a measurement performed by a target metrology system are optimized. The system parameter values are optimized such that differences between measurement spectra generated by a reference system and the target system are minimized for measurements of the same metrology targets. Methods and systems for matching spectral errors across one or more optical metrology systems are also presented. A trusted metrology system measures the value of at least one specimen parameter to minimize model errors introduced by differing measurement conditions present at the time of measurement by the reference and target metrology systems. Methods and systems for parameter optimization based on low-order response surfaces are presented to reduce the compute time required to refine system calibration parameters.
    Type: Grant
    Filed: May 15, 2014
    Date of Patent: January 2, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Hidong Kwak, John Lesoine, Malik Sadiq, Lanhua Wei, Shankar Krishnan, Leonid Poslavsky, Mikhail M. Sushchik
  • Publication number: 20140340682
    Abstract: Methods and systems for matching measurement spectra across one or more optical metrology systems are presented. The values of one or more system parameters used to determine the spectral response of a specimen to a measurement performed by a target metrology system are optimized. The system parameter values are optimized such that differences between measurement spectra generated by a reference system and the target system are minimized for measurements of the same metrology targets. Methods and systems for matching spectral errors across one or more optical metrology systems are also presented. A trusted metrology system measures the value of at least one specimen parameter to minimize model errors introduced by differing measurement conditions present at the time of measurement by the reference and target metrology systems. Methods and systems for parameter optimization based on low-order response surfaces are presented to reduce the compute time required to refine system calibration parameters.
    Type: Application
    Filed: May 15, 2014
    Publication date: November 20, 2014
    Inventors: Hidong Kwak, John Lesoine, Malik Sadiq, Lanhua Wei, Shankar Krishnan, Leonid Poslavsky, Mikhail M. Sushchik
  • Patent number: 6381083
    Abstract: In a recording/playback system, increased information is achieved by 4 level biased magnetic recording where the maximum amplitude 4 level recording signal drives the medium's magnetization into a nonlinear region of its transfer function. The bias does not eliminate distortion at the maximum signal input level, however the system's signal to noise ratio is improved due to an increase in the amplitude of the playback signal resulting from the increased recording level. The nonlinear mapping capability of a neural network provides equalization of playback signals distorted due to the record/playback nonlinearity. The 4 level recorded signals provide a factor of 2 in information storage compared to binary recording, and quadrature amplitude modulation (QAM) combined with the 4 level recording technique provides an additional factor of 2, for a factor of 4 in the information content stored.
    Type: Grant
    Filed: July 30, 1999
    Date of Patent: April 30, 2002
    Assignee: Applied Nonlinear Sciences, LLC
    Inventors: Henry D. I. Abarbanel, James U. Lemke, Lev S. Tsimring, Lev N. Korzinov, Paul H. Bryant, Mikhail M. Sushchik, Nikolai F. Rulkov
  • Patent number: 6310906
    Abstract: A chaotic carrier pulse position modulation communication system and method is disclosed. The system includes a transmitter and receiver having matched chaotic pulse regenerators. The chaotic pulse regenerator in the receiver produces a synchronized replica of a chaotic pulse train generated by the regenerator in the transmitter. The pulse train from the transmitter can therefore act as a carrier signal. Data is encoded by the transmitter through selectively altering the interpulse timing between pulses in the chaotic pulse train. The altered pulse train is transmitted as a pulse signal. The receiver can detect whether a particular interpulse interval in the pulse signal has been altered by reference to the synchronized replica it generates, and can therefore detect the data transmitted by the receiver. Preferably, the receiver predicts the earliest moment in time it can expect a next pulse after observation of at least two consecutive pulses.
    Type: Grant
    Filed: August 18, 1999
    Date of Patent: October 30, 2001
    Assignee: The Regents of the University of California
    Inventors: Henry D. I. Abarbanel, Lawrence E. Larson, Nikolai F. Rulkov, Mikhail M. Sushchik, Lev S. Tsimring, Alexander R. Volkovskii