Patents by Inventor Miki Tomotani

Miki Tomotani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Capacitor with noble metal electrode containing oxygen
    Patent number: 6333529
    Abstract: The present invention relates to a method of manufacturing a semiconductor device including steps of fabricating a capacitor. In a semiconductor device having a capacitor, the capacitor includes a lower electrode, a dielectric oxide film formed on the lower electrode, and an upper electrode formed the dielectric oxide film and formed of at least platinum in which oxygen is contained at a concentration of more than 1×1020 atoms/cm3. Accordingly, peeling of the upper electrode can be prevented and electric characteristics of the capacitor can be improved.
    Type: Grant
    Filed: February 26, 1999
    Date of Patent: December 25, 2001
    Assignee: Fujitsu Limited
    Inventors: Hiroshi Ashida, Miki Tomotani