Patents by Inventor Mikiharu Hibi
Mikiharu Hibi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7829267Abstract: A stamper is formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in a predetermined area of the stamper. The predetermined area corresponds to an area where pressure is likely to be concentrated when the concave/convex pattern of the stamper is used to form a concave/convex pattern on a substrate. A method of forming a concave/convex pattern uses such stamper, and a method of manufacturing an information recording medium uses a concave/convex pattern formed by such method.Type: GrantFiled: January 17, 2007Date of Patent: November 9, 2010Assignee: TDK CorporationInventors: Minoru Fujita, Mikiharu Hibi
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Patent number: 7488429Abstract: The recording layer (to-be-etched layer), a main mask layer, and a sub mask layer are formed in this order over a substrate, and the sub mask layer is processed into a predetermined concavo-convex pattern. Next, parts of the main mask layer under the concave portions are removed by reactive ion etching using oxygen or ozone as the reactive gas. Parts of the recording layer under the concave portions are also removed by dry etching, whereby the recording layer is shaped into the concavo-convex pattern. The main mask layer is chiefly made of carbon. The sub mask layer is made of a material having an etching rate lower than that of carbon with respect to the reactive ion etching in the step of processing the main mask layer.Type: GrantFiled: June 21, 2005Date of Patent: February 10, 2009Assignee: TDK CorporationInventors: Shuichi Okawa, Kazuhiro Hattori, Mikiharu Hibi, Mitsuru Takai
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Patent number: 7438982Abstract: A magnetic recording medium includes at least a disk substrate, a magnetic recording layer formed with a predetermined concavo-convex pattern on the disk substrate, and a non-magnetic layer formed in concave portions of the concavo-convex pattern. Convex shapes made of a non-magnetic material are formed on the magnetic recording layer or the non-magnetic layer. Each convex shape is formed, for example, into a mountain-like shape whose upper surface width is made smaller than a width of each convex portion of the magnetic recording layer or a width of each concave portion where the non-magnetic layer 6 is formed.Type: GrantFiled: February 24, 2005Date of Patent: October 21, 2008Assignee: TDK CorporationInventors: Takahiro Suwa, Mitsuru Takai, Kazuhiro Hattori, Shuichi Okawa, Mikiharu Hibi
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Patent number: 7378029Abstract: A method for manufacturing a magnetic recording medium is provided, by which a magnetic recording medium having a recording layer formed in a concavo-convex pattern, a sufficiently flat surface, and high recording and reproducing precision is efficiently manufactured. In a non-magnetic material filling step, a non-magnetic material is deposited over a recording layer formed in a predetermined concavo-convex pattern over a substrate to fill concave portions of the concavo-convex pattern with the non-magnetic material. In a flattening step, an excess part of the non-magnetic material above the recording layer is removed by dry etching, to flatten surfaces of the recording layer and the non-magnetic material. Processing conditions are set so as to substantially equalize an etching rate of the non-magnetic material with an etching rate of the recording layer with respect to the dry etching in the flattening step.Type: GrantFiled: February 17, 2005Date of Patent: May 27, 2008Assignee: TDK CorporationInventors: Kazuhiro Hattori, Shuichi Okawa, Takahiro Suwa, Mikiharu Hibi
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Publication number: 20080078739Abstract: A method for manufacturing a magnetic recording medium with excellent production efficiency is provided in which the recording layer can be processed into a desired concavo-convex pattern with high precision and the resin layer can reliably and thoroughly be removed. A sub-mask layer having corrosion resistance against an oxygen-containing gas is provided over a main mask layer composed mainly of carbon. Furthermore, an intermediate mask layer is provided between the main mask layer and the sub-mask layer. The intermediate mask layer has corrosion resistance against the oxygen-containing gas, and its etching rate is higher for a halogen-containing gas than for the oxygen-containing gas. The resin layer removing step is conducted between the sub-mask layer processing step and the intermediate mask layer processing step (the main mask layer processing step). The resin layer removing step uses the oxygen-containing gas, and the intermediate mask layer processing step uses the halogen-containing gas.Type: ApplicationFiled: September 14, 2007Publication date: April 3, 2008Applicant: TDK CORPORATIONInventors: Mikiharu Hibi, Minoru Fujita, Kazuhiro Hattori
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Patent number: 7352529Abstract: A magnetic recording medium including at least a disk substrate 1A, a magnetic recording layer 5 formed with a predetermined concavo-convex pattern on the disk substrate 1A, and a non-magnetic layer 6 filled into concave portions of the concavo-convex pattern, so as to have data track regions 20 and servo pattern regions 21. Due to the existence of concaves and convexes in the surface of each servo pattern region 21, the foregoing problem is solved. On this occasion, arithmetical mean deviation of the assessed profile Ra of the surface of each servo pattern region 21 is preferably not lower than 0.3 nm. The difference in surface level between each concave and each convex existing in the surface of the servo pattern region 21 is preferably not larger than 6 nm.Type: GrantFiled: February 22, 2005Date of Patent: April 1, 2008Assignee: TDK CorporationInventors: Mikiharu Hibi, Kazuhiro Hattori, Kazuya Shimakawa
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Patent number: 7300595Abstract: A method for filling concave portions of a concavo-convex pattern by which the concave portions of the concavo-convex pattern can be filled to flatten the surface with reliability, and a method for manufacturing a magnetic recording medium by which a magnetic recording medium having a magnetic recording layer of concavo-convex pattern with a sufficiently flat surface can be manufactured efficiently. A filler for filling the concave portions is deposited over the surface of an object to be processed, the object being provided with a concavo-convex pattern. A cladding is further deposited over the filler. Then, an excess part of the filler and the cladding above the surface of the object are removed for flattening, by using a dry etching method having a lower etching rate to the cladding than to the filler.Type: GrantFiled: December 20, 2004Date of Patent: November 27, 2007Assignee: TDK CorporationInventors: Takahiro Suwa, Kazuhiro Hattori, Shuichi Okawa, Mikiharu Hibi
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Patent number: 7273563Abstract: A method for manufacturing a magnetic recording medium is provided, which can efficiently manufacture a magnetic recording medium that includes a recording layer formed in a concavo-convex pattern and has good recording and reproduction characteristics. The method includes: a non-magnetic material filling step of depositing a non-magnetic material over a recording layer formed in a predetermined concavo-convex pattern over a substrate so as to fill a concave portion of the concavo-convex pattern with the non-magnetic material; and a flattening step of removing the excess part of the non-magnetic material above the recording layer by dry etching so as to flatten the surfaces of the non-magnetic material and the recording layer. The flattening step includes a former flattening step and a latter flattening step for finishing.Type: GrantFiled: February 3, 2005Date of Patent: September 25, 2007Assignee: TDK CorporationInventors: Kazuhiro Hattori, Shuichi Okawa, Takahiro Suwa, Mikiharu Hibi
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Patent number: 7247251Abstract: A method for manufacturing a magnetic recording medium is provided, which can efficiently manufacture a magnetic recording medium that includes a recording layer formed in a concavo-convex pattern, has a sufficiently flat surface, and provides good recording and reproduction precision. The method includes: a non-magnetic material filling step of depositing a non-magnetic material over a recording layer formed in a predetermined concavo-convex pattern over a substrate, thereby filling a concave portion of the concavo-convex pattern with the non-magnetic material; and a flattening step of removing the excess part of the non-magnetic material above the recording layer by ion beam etching to flatten the surfaces of the non-magnetic layer and the recording layer.Type: GrantFiled: February 7, 2005Date of Patent: July 24, 2007Assignee: TDK CorporationInventors: Kazuhiro Hattori, Shuichi Okawa, Takahiro Suwa, Mikiharu Hibi
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Publication number: 20070166651Abstract: A stamper is formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in a predetermined area of the stamper. The predetermined area corresponds to an area where pressure is likely to be concentrated when the concave/convex pattern of the stamper is used to form a concave/convex pattern on a substrate. A method of forming a concave/convex pattern uses such stamper, and a method of manufacturing an information recording medium uses a concave/convex pattern formed by such method.Type: ApplicationFiled: January 17, 2007Publication date: July 19, 2007Applicant: TDK CorporationInventors: Minoru Fujita, Mikiharu Hibi
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Publication number: 20070145613Abstract: A concave/convex pattern forming method which is capable of forming a concave/convex pattern on a substrate with high accuracy without causing deformation or faulty transfer of the concave/convex pattern. A concave/convex pattern is formed on an preform by pressing a stamper having a stamper-side concave/convex pattern formed thereon against a resin layer on the preform, thereby transferring the stamper-side concave/convex pattern to the resin layer. The resin layer is formed by coating the preform with a mixed resin material which is prepared by mixing a first resin material having a glass transition is temperature lower than a temperature of the resin layer during pressing of the stamper against the resin layer, and a second resin material having a glass transition temperature higher than the temperature of the resin layer during the pressing of the stamper against the resin layer.Type: ApplicationFiled: December 14, 2006Publication date: June 28, 2007Applicant: TDK CORPORATIONInventors: Mikiharu HIBI, Minoru FUJITA
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Publication number: 20050284842Abstract: The recording layer (to-be-etched layer), a main mask layer, and a sub mask layer are formed in this order over a substrate, and the sub mask layer is processed into a predetermined concavo-convex pattern. Next, parts of the main mask layer under the concave portions are removed by reactive ion etching using oxygen or ozone as the reactive gas. Parts of the recording layer under the concave portions are also removed by dry etching, whereby the recording layer is shaped into the concavo-convex pattern. The main mask layer is chiefly made of carbon. The sub mask layer is made of a material having an etching rate lower than that of carbon with respect to the reactive ion etching in the step of processing the main mask layer.Type: ApplicationFiled: June 21, 2005Publication date: December 29, 2005Applicant: TDK CorporationInventors: Shuichi Okawa, Kazuhiro Hattori, Mikiharu Hibi, Mitsuru Takai
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Publication number: 20050213239Abstract: A magnetic recording medium including at least a disk substrate 1A, a magnetic recording layer 5 formed with a predetermined concavo-convex pattern on the disk substrate 1A, and a non-magnetic layer 6 filled into concave portions of the concavo-convex pattern, so as to have data track regions 20 and servo pattern regions 21. Due to the existence of concaves and convexes in the surface of each servo pattern region 21, the foregoing problem is solved. On this occasion, arithmetical mean deviation of the assessed profile Ra of the surface of each servo pattern region 21 is preferably not lower than 0.3 nm. The difference in surface level between each concave and each convex existing in the surface of the servo pattern region 21 is preferably not larger than 6 nm.Type: ApplicationFiled: February 22, 2005Publication date: September 29, 2005Applicant: TDK CorporationInventors: Mikiharu Hibi, Mitsuru Takai, Kazuya Shimakawa
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Publication number: 20050199581Abstract: A method for filling concave portions of a concavo-convex pattern by which the concave portions of the concavo-convex pattern can be filled to flatten the surface with reliability, and a method for manufacturing a magnetic recording medium by which a magnetic recording medium having a magnetic recording layer of concavo-convex pattern with a sufficiently flat surface can be manufactured efficiently. A filler for filling the concave portions is deposited over the surface of an object to be processed, the object being provided with a concavo-convex pattern. A cladding is further deposited over the filler. Then, an excess part of the filler and the cladding above the surface of the object are removed for flattening, by using a dry etching method having a lower etching rate to the cladding than to the filler.Type: ApplicationFiled: December 20, 2004Publication date: September 15, 2005Applicant: TDK CorporationInventors: Takahiro Suwa, Kazuhiro Hattori, Shuichi Okawa, Mikiharu Hibi
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Publication number: 20050196650Abstract: A magnetic recording medium includes at least a disk substrate 1, a magnetic recording layer 5 formed with a predetermined concavo-convex pattern on the disk substrate 1, and a non-magnetic layer 6 formed in concave portions of the concavo-convex pattern. Convex shapes made of a non-magnetic material are formed on the magnetic recording layer 5 or the non-magnetic layer 6. Each convex shape is formed, for example, into a mountain-like shape whose upper surface width (W1 or W2) is made smaller than width W5 of each convex portion of the magnetic recording layer 5 or width W6 of each concave portion where the non-magnetic layer 6 is formed.Type: ApplicationFiled: February 24, 2005Publication date: September 8, 2005Applicant: TDK CorporationInventors: Takahiro Suwa, Mitsuru Takai, Kazuhiro Hattori, Shuichi Okawa, Mikiharu Hibi
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Publication number: 20050186357Abstract: A method for manufacturing a magnetic recording medium is provided, by which a magnetic recording medium having a recording layer formed in a concavo-convex pattern, a sufficiently flat surface, and high recording and reproducing precision is efficiently manufactured. In a non-magnetic material filling step, a non-magnetic material is deposited over a recording layer formed in a predetermined concavo-convex pattern over a substrate to fill concave portions of the concavo-convex pattern with the non-magnetic material. In a flattening step, an excess part of the non-magnetic material above the recording layer is removed by dry etching, to flatten surfaces of the recording layer and the non-magnetic material. Processing conditions are set so as to substantially equalize an etching rate of the non-magnetic material with an etching rate of the recording layer with respect to the dry etching in the flattening step.Type: ApplicationFiled: February 17, 2005Publication date: August 25, 2005Applicant: TDK CORPORATIONInventors: Kazuhiro Hattori, Shuichi Okawa, Takahiro Suwa, Mikiharu Hibi
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Publication number: 20050186356Abstract: A method for manufacturing a magnetic recording medium is provided, which can efficiently manufacture a magnetic recording medium that includes a recording layer formed in a concavo-convex pattern, has a sufficiently flat surface, and provides good recording and reproduction precision. The method includes: a non-magnetic material filling step of depositing a non-magnetic material over a recording layer formed in a predetermined concavo-convex pattern over a substrate, thereby filling a concave portion of the concavo-convex pattern with the non-magnetic material; and a flattening step of removing the excess part of the non-magnetic material above the recording layer by ion beam etching to flatten the surfaces of the non-magnetic layer and the recording layer.Type: ApplicationFiled: February 7, 2005Publication date: August 25, 2005Applicant: TDK CORPORATIONInventors: Kazuhiro Hattori, Shuichi Okawa, Takahiro Suwa, Mikiharu Hibi
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Publication number: 20050175791Abstract: A method for manufacturing a magnetic recording medium is provided, which can efficiently manufacture a magnetic recording medium that includes a recording layer formed in a concavo-convex pattern and has good recording and reproduction characteristics. The method includes: a non-magnetic material filling step of depositing a non-magnetic material over a recording layer formed in a predetermined concavo-convex pattern over a substrate so as to fill a concave portion of the concavo-convex pattern with the non-magnetic material; and a flattening step of removing the excess part of the non-magnetic material above the recording layer by dry etching so as to flatten the surfaces of the non-magnetic material and the recording layer. The flattening step includes a former flattening step and a latter flattening step for finishing.Type: ApplicationFiled: February 3, 2005Publication date: August 11, 2005Applicant: TDK CORPORATIONInventors: Kazuhiro Hattori, Shuichi Okawa, Takahiro Suwa, Mikiharu Hibi
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Publication number: 20050060874Abstract: A method for processing a work piece including a magnetic material and a method for manufacturing a magnetic recording medium. With the use of these methods, the magnetic recording medium with fine magnetic properties, magnetic recording and reproducing equipment, and the like are efficiently manufactured by processing the work piece including the magnetic material by use of an oxidizing reactive gas and then certainly removing the oxidizing reactive gas. An NH3 gas (a non-oxidized gas including hydrogen elements) is used as a cleaning gas. The cleaning gas is turned into plasma, and then a work piece is dry cleaned by use of the cleaning gas.Type: ApplicationFiled: July 16, 2004Publication date: March 24, 2005Applicant: TDK CORPORATIONInventors: Mikiharu Hibi, Kazuhiro Hattori, Shuichi Okawa, Takahiro Suwa