Patents by Inventor Mikko Nisula

Mikko Nisula has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for producing lithium phosphorus oxynitride layer
    Patent number: 9920426
    Abstract: A method for producing a lithium phosphorus oxynitride layer having high ionic conductivity is provided. The method for producing a lithium phosphorus oxynitride layer on a substrate by atomic layer deposition comprises an atmosphere interchanging step, wherein the atmosphere surrounding the substrate is alternately switched between a first atmosphere, containing a first precursor such as a dialkyl phosphoramidate and/or alkyl phosphorodiamidate, and a second atmosphere, containing a second precursor such as a lithium hexaalkyl disilazide.
    Type: Grant
    Filed: September 2, 2016
    Date of Patent: March 20, 2018
    Assignee: Toyota Jidosha Kabushiki Kaisha
    Inventors: Yohei Shindo, Taishi Shiotsuki, Hideyuki Koga, Maarit Karppinen, Mikko Nisula
  • METHOD FOR PRODUCING LITHIUM PHOSPHORUS OXYNITRIDE LAYER
    Publication number: 20170067161
    Abstract: A method for producing a lithium phosphorus oxynitride layer having high ionic conductivity is provided. The method for producing a lithium phosphorus oxynitride layer on a substrate by atomic layer deposition comprises an atmosphere interchanging step, wherein the atmosphere surrounding the substrate is alternately switched between a first atmosphere, containing a first precursor such as a dialkyl phosphoramidate and/or alkyl phosphorodiamidate, and a second atmosphere, containing a second precursor such as a lithium hexaalkyl disilazide.
    Type: Application
    Filed: September 2, 2016
    Publication date: March 9, 2017
    Inventors: Yohei Shindo, Taishi Shiotsuki, Hideyuki Koga, Maarit Karppinen, Mikko Nisula