Abstract: A method is provided for bonding microelectromechanical components with at least two different pressure element cavities. The method includes forming on the cap wafer or/and on the structure wafer a metal layer that allows the hermetically sealing of one cavity at a first pressure, then hermetically scaling the other cavity at a second pressure.

Abstract: This disclosure describes a micromechanical device comprising a first device part and a second device part. One of the first and second device parts is a mobile rotor and the other of the first and second device parts is a fixed stator. The micromechanical device further comprises a motion limiter which extends from the first device part to the second device part. The motion limiter comprises an elongated lever, and the motion limiter is configured to bring a stopper into contact with a counter-structure by rotating the elongated lever.

Abstract: A circuit assembly for cooling a quantum electrical device, use of said circuit assembly, a system and a method for cooling a quantum electric device are provided. The circuit assembly comprises a quantum electric device to be cooled, at least one normal-metal-insulator-superconductor (NIS) tunnel junction electrically connected to the quantum electric device and at least one superconductive lead for supplying a drive voltage VQCR for said at least one NIS tunnel junction. The quantum electric device is cooled when the voltage VQCR is supplied to at least one NIS tunnel junction, said voltage VQCR being equal to or below the voltage N?/e, where N=1 or N=2, N is the number of NIS tunnel junctions electrically coupled in series with the means for generating the voltage, ? is the energy gap in the superconductor density of states, and e is the elementary charge.

Abstract: A microelectromechanical device is provided that includes a mobile rotor and a fixed stator in a device plane. Moreover, a fixed wall defines a wall plane that is adjacent to the device plane and a motion limiter is provided to prevent the rotor from coming into direct physical contact with the fixed wall. The motion limiter includes a shock absorber that extends from the rotor to the stator and a fixed stopper structure that protrudes from the fixed wall toward the shock absorber.

Abstract: A microelectromechanical device having a mobile rotor and a fixed stator in a device plane, and a motion limiter that prevents the mobile rotor from contacting a fixed wall in a vertical direction that is perpendicular to the device plane. Moreover, the motion limiter extends between the rotor and the stator and includes a stopper lever that is configured to rotate out of the device plane.

Abstract: A gyroscope with a first Coriolis mass quartet and a second Coriolis mass quartet arranged around two quartet center points, and two elongated mass elements or synchronization bars aligned with each other outside of each Coriolis mass. One end of each elongated mass element and synchronization bar is attached to the corresponding Coriolis mass. Each elongated mass element is suspended from a peripheral anchor point by a mass element suspension arrangement which allows said elongated mass element to undergo rotational motion both in the device plane and out of the device plane. Each elongated synchronization bar is suspended from a peripheral anchor point by a synchronization bar suspension arrangement which allows said elongated synchronization bar to undergo rotational motion both in the device plane and out of the device plane substantially around its midpoint.

Abstract: A micromechanical device further comprises a motion limiter configured to prevent a rotor from coming into direct physical contact with a stator. The motion limiter comprises a spring which extends across the rotor-stator gap. The motion limiter further comprises a stopper which is attached to the spring. When the rotor moves toward the stator, the motion limiter is configured to bring the stopper into contact with a counter-structure.

Abstract: This disclosure describes a micromechanical device comprising a first device part and a second device part. One of the first and second device parts is a mobile rotor and the other of the first and second device parts is a fixed stator. The micromechanical device further comprises a motion limiter which extends from the first device part to the second device part. The motion limiter comprises an elongated lever, and the motion limiter is configured to bring a stopper into contact with a counter-structure by rotating the elongated lever.

Abstract: A gyroscope with a first Coriolis mass quartet and a second Coriolis mass quartet arranged around two quartet center points, and two elongated mass elements or synchronization bars aligned with each other outside of each Coriolis mass. One end of each elongated mass element and synchronization bar is attached to the corresponding Coriolis mass. Each elongated mass element is suspended from a peripheral anchor point by a mass element suspension arrangement which allows said elongated mass element to undergo rotational motion both in the device plane and out of the device plane. Each elongated synchronization bar is suspended from a peripheral anchor point by a synchronization bar suspension arrangement which allows said elongated synchronization bar to undergo rotational motion both in the device plane and out of the device plane substantially around its midpoint.