Abstract: A method for determining spectral calibration data (?cal(Sd), Sd,cal(?)) of a Fabry-Perot interferometer (100) comprises: forming a plurality of filtered spectral peaks (P?1, P?2) by filtering input light (LB1) with a Fabry-Perot etalon (50) such that a first filtered peak (P?1) corresponds to a first transmittance peak (P1) of the etalon (50), and such that a second filtered peak (P?2) corresponds to a second transmittance peak (P1) of the etalon (50), using the Fabry-Perot interferometer (100) for measuring a spectral intensity distribution (M(Sd)) of the filtered spectral peaks (P?1, P?2), wherein the spectral intensity distribution (M(Sd)) is measured by varying the mirror gap (dFP) of the Fabry-Perot interferometer (100), and by providing a control signal (Sd) indicative of the mirror gap (dFP), and determining the spectral calibration data (?cal(Sd), Sd,cal(?)) by matching the measured spectral intensity distribution (M(Sd)) with the spectral transmittance (TE(?)) of the etalon (50).

Abstract: Electrically tunable Fabry-Perot interferometers produced with micro-optical electromechanical (MOEMS) technology. Micromechanical interferometers of the prior art require high control voltage, their production includes complicated production phases, and the forms of the movable mirrors are restricted to circular geometries. In the inventive solution, there is a gap in the movable mirror, whereby mirror layers opposite to the gap are connected with anchoring. The anchoring is such that the stiffness of the mirror is higher at the optical area than at the surrounding area. This way it is possible keep the optical area of the mirror flat even if the control electrodes extend to the optical area. Due to large electrodes, lower control voltages are required.

Abstract: Electrically tunable Fabry-Perot interferometers produced with micro-optical electromechanical (MOEMS) technology. Micromechanical interferometers of the prior art require high control voltage, their production includes complicated production phases, and the forms of the movable mirrors are restricted to circular geometries. In the inventive solution, there is a gap in the movable mirror, whereby mirror layers opposite to the gap are connected with anchoring. The anchoring is such that the stiffness of the mirror is higher at the optical area than at the surrounding area. This way it is possible keep the optical area of the mirror flat even if the control electrodes extend to the optical area. Due to large electrodes, lower control voltages are required.