Abstract: A method to form on a substrate a first target comprising a first feature and a second target comprising a second feature, wherein the forming of the targets comprises applying the first feature and the second feature to the substrate by projection of a radiation beam through a production patterning device installed in a lithographic apparatus, the features corresponding to one or more features of the patterning device, and controlling a configuration of the lithographic apparatus to induce an aberration component, such that the first feature is applied to the substrate using a first value of an induced aberration component and the second feature is applied to the substrate using a second, different value of the induced aberration component; measuring a property of the targets; and using the measurements to determine a sensitivity of the property of the targets to changes in value of the induced aberration component.

Abstract: A method to form on a substrate a first target comprising a first feature and a second target comprising a second feature, wherein the forming of the targets comprises applying the first feature and the second feature to the substrate by projection of a radiation beam through a production patterning device installed in a lithographic apparatus, the features corresponding to one or more features of the patterning device, and controlling a configuration of the lithographic apparatus to induce an aberration component, such that the first feature is applied to the substrate using a first value of an induced aberration component and the second feature is applied to the substrate using a second, different value of the induced aberration component; measuring a property of the targets; and using the measurements to determine a sensitivity of the property of the targets to changes in value of the induced aberration component.

Abstract: A resistance welding apparatus in which an actuatable swivel arm carries a welding electrode approximately perpendicular thereto which operates preferably against a fixed counter electrode. In order to significantly reduce bending stresses and wear at the electrode tip, a welding electrode 1 is pivotal within limits with respect to the swivel arm against the action of a spring element by way of a hinge joint arranged approximately in the electrode axis.

Abstract: An installation for resistance-welding of structural parts, especially in the automotive industry, with a half-tong that is pivotal about an axis and longitudinally displaceable; the half-tong supporting thereon the welding electrode is pivotal about all three coordinate axes.