Patents by Inventor Miles MARNELL

Miles MARNELL has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Molecular organometallic resists for EUV
    Patent number: 9372402
    Abstract: Described herein are organometallic or inorganic complexes with high extreme ultraviolet (EUV) optical density (OD) and high mass density for use in thin films. These thin films are used as high resolution, low line edge roughness (LER) EUV photoresists. The complexes may also be included in nanoparticle form for use in photoresists.
    Type: Grant
    Filed: September 13, 2013
    Date of Patent: June 21, 2016
    Assignee: The Research Foundation for the State University of New York
    Inventors: Daniel Freedman, Miles Marnell, Robert Brainard, Brian Cardineau
  • Molecular Organometallic Resists for EUV
    Publication number: 20150079393
    Abstract: Described herein are organometallic or inorganic complexes with high extreme ultraviolet (EUV) optical density (OD) and high mass density for use in thin films. These thin films are used as high resolution, low line edge roughness (LER) EUV photoresists. The complexes may also be included in nanoparticle form for use in photoresists.
    Type: Application
    Filed: September 13, 2013
    Publication date: March 19, 2015
    Applicant: The Research Foundation for the State University of New York
    Inventors: Daniel FREEDMAN, Miles MARNELL, Robert BRAINARD, Brian CARDINEAU