Patents by Inventor Minato Inukai

Minato Inukai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR SUBSTRATE CLEANING METHOD
    Publication number: 20110230054
    Abstract: In one embodiment, a semiconductor substrate cleaning method is disclosed. The method can clean a semiconductor substrate by using a chemical of 80° C. or above. The method can rinse the semiconductor substrate by using pure water of 40° C. or above after the cleaning of the semiconductor substrate. The method can then rinse the semiconductor substrate by using pure water of 30° C. or below. In addition, the method can dry the semiconductor substrate.
    Type: Application
    Filed: July 22, 2010
    Publication date: September 22, 2011
    Inventors: Hiroshi TOMITA, Hisashi Okuchi, Minato Inukai, Hidekazu Hayashi, Yasuhito Yoshimizu