Abstract: A flow stabilizer includes a base, a noise reduction structure, and a plurality of protrusion structures. The noise reduction structure is disposed on the base. The protrusion structures are disposed between the base and the noise reduction structure. The protrusion structures define a plurality of intervals, and at least two intervals are not equal.

Abstract: A flow stabilizer includes a base and a noise reduction structure. The noise reduction structure is disposed on the base, and it includes a first surface and a second surface. The edges of first surface and the second surface are curved.

Abstract: The present disclosure relates to semiconductor tool monitoring system having multiple sensors configured to concurrently and independently monitor processing conditions of a semiconductor manufacturing tool. In some embodiments, the disclosed tool monitoring system comprises a first sensor system configured to monitor one or more processing conditions of a semiconductor manufacturing tool and to generate a first monitoring response based thereupon. A redundant, second sensor system is configured to concurrently monitor the one or more processing conditions of the manufacturing tool and to generate a second monitoring response based thereupon. A comparison element is configured to compare the first and second monitoring responses, and if the responses deviate from one another (e.g., have a deviation greater than a threshold value) to generate a warning signal. By comparing the first and second monitoring responses, errors in the sensor systems can be detected in real time, thereby preventing yield loss.

Abstract: In some embodiments, the present disclosure relates to a plasma processing system comprising a magnetron configured to provide a symmetric magnetic track through a combination of vibrational and rotational motion. The disclosed magnetron comprises a magnetic element configured to generate a magnetic field. The magnetic element is attached to an elastic element connected between the magnetic element and a rotational shaft configured to rotate magnetic element about a center of the sputtering target. The elastic element is configured to vary its length during rotation of the magnetic element to change the radial distance between the rotational shaft and the magnetic element. The resulting magnetic track enables concurrent motion of the magnetic element in both an angular direction and a radial direction. Such motion enables a symmetric magnetic track that provides good wafer uniformity and a short deposition time.

Abstract: In some embodiments, the present disclosure relates to a plasma processing system configured to form a symmetric plasma distribution around a workpiece. In some embodiments, the plasma processing system comprises a plurality of coils symmetrically positioned around a processing chamber. When a current is provided to the coils, separate magnetic fields, which operate to ionize the target atoms, emanate from the separate coils. The separate magnetic fields operate upon ions within the coils to form a plasma on the interior of the coils. Furthermore, the separate magnetic fields are superimposed upon one another between coils to form a plasma on the exterior of the coils. Therefore, the disclosed plasma processing system can form a plasma that continuously extends along a perimeter of the workpiece with a high degree of uniformity (i.e., without dead spaces).

Abstract: In some embodiments, the present disclosure relates to a plasma processing system that generates a magnetic field having a maximum strength that is independent of workpiece size. The plasma processing system has a plurality of side electromagnets that have a size which is independent of the workpiece size. The side electromagnets are located around a perimeter of a processing chamber configured to house a semiconductor workpiece. When a current is provided to the side electromagnets, separate magnetic fields emanate from separate positions around the workpiece. The separate magnetic fields contribute to the formation of an overall magnetic field that controls the distribution of plasma within the processing chamber. Because the size of the plurality of separate side magnets is independent of the workpiece size, the plurality of side magnets can generate a magnetic field having a maximum field strength that is independent of workpiece size.

Abstract: A speed change mechanism in which the gear ratio is selected by changing the direction of rotation of the power input includes first and second planetary gear sets enclosed within a hub shell. A DC electric motor is coupled to the sun gears of both gear sets and drives them simultaneously in the same rotary direction. In one of the gear sets the carrier arm is fixed and the ring gear is the output and in the other gear set the ring gear is fixed and the carrier arm is the output. A first one-way clutch transmits drive from an output of the first gear set to the hub shell and second one-way clutch transmits drive from an output of the second gear set to the hub shell, both clutches operating in the same direction. The outputs of the gear sets are driven in opposite rotary directions so that drive is transmitted to the hub shell either through the first gear set or the second gear set depending on the direction of rotation of the power input to provide two different gear ratios.

Abstract: A sliding valve device includes a fixing portion, a sliding component and a driving member. The fixing portion has an inlet port and an outlet port. The sliding component is connected with the fixing portion, and includes a fluid channel. The driving member is used for driving movement of the sliding component, wherein the driving member is not in contact with the fluid channel, the inlet port and the outlet port.

Abstract: A solenoid valve includes a bobbin, a coil, a rod, and at least one ball. The bobbin has a through hole and a multiple-turning-point groove in the inner wall of the bobbin. The coil winds around the bobbin. The rod is disposed in the through hole and is capable of moving inward or outward along the through hole, and has a recess in the outer wall of the rod. Each ball is received in the groove and the recess at the same time.

Abstract: A speed changing apparatus includes a planet gear set having a sun gear, planet pinions, a planet pinion carrier and a ring gear mounted inside a rotary sleeve. The sun gear is driven by a D.C. motor to rotate in either of two opposed rotary directions. Clutch arrangements are operative to lock one of either the carrier arm or the ring gear to a rotationally fixed component and to drivingly couple the other of the carrier arm and the ring gear to the sleeve ring depending on the direction of rotation of the motor. Different gear ratios are selected by reversing the direction of rotation of the motor whilst the sleeve ring is always driven in same direction. The speed change apparatus may be part of a hub of an electric vehicle in which the sleeve ring is a hub shell and the apparatus is mounted about an axle.

Abstract: A speed change mechanism in which the gear ratio is selected by changing the direction of rotation of the power input includes first and second planetary gear sets enclosed within a hub shell. A DC electric motor is coupled to the sun gears of both gear sets and drives them simultaneously in the same rotary direction. In one of the gear sets the carrier arm is fixed and the ring gear is the output and in the other gear set the ring gear is fixed and the carrier arm is the output. A first one-way clutch transmits drive from an output of the first gear set to the hub shell and second one-way clutch transmits drive from an output of the second gear set to the hub shell, both clutches operating in the same direction. The outputs of the gear sets are driven in opposite rotary directions so that drive is transmitted to the hub shell either through the first gear set or the second gear set depending on the direction of rotation of the power input to provide two different gear ratios.

Abstract: A solenoid valve comprises a bobbin, a coil, a valve rod, a slidable ring, and a rotatable ring. The bobbin has a through hole. The coil is wound around the bobbin. The valve rod is disposed in the through hole and is inwardly or outwardly movable along the through hole. The slidable ring is telescoped onto the valve rod and inwardly or outwardly movable with the valve rod. The rotatable ring is disposed inside the through hole and inside the slidable ring.

Abstract: A solenoid valve includes a bobbin, a coil, a rod, and at least one ball. The bobbin has a through hole and a multiple-turning-point groove in the inner wall of the bobbin. The coil winds around the bobbin. The rod is disposed in the through hole and is capable of moving inward or outward along the through hole, and has a recess in the outer wall of the rod. Each ball is received in the groove and the recess at the same time.

Abstract: A capacitor and methods for forming the same are provided. The method includes forming a bottom electrode; treating the bottom electrode in an oxygen-containing environment to convert a top layer of the bottom electrode into a buffer layer; forming an insulating layer on the buffer layer; and forming a top electrode over the insulating layer.

Abstract: This invention discloses a magnetically latching solenoid valve and a solenoid thereof. The solenoid includes a coil disposed around a bobbin and divided into two sections by a tap for adjustable pull and release forces to a plunger disposed therein. A first section of the coil, through magnetic induction, pulls the plunger toward a fixed stopper disposed at the lower end of the bobbin and coupled to a cylindrical yoke. A permanent magnet is disposed between the stopper and the yoke. On contact with the stopper, the plunger is held in place by the permanent magnet even after the current flow is removed from the first section of the coil. A second section of the coil, with a differing magnetic induction, returns the plunger.

Abstract: The present invention provides a bicycle front derailleur mountable to a seat tube of a bicycle frame for fitting a chain around a selected sprocket of a multiple chainwheel by pushing the chain laterally at a portion thereof advancing into engagement with the chainwheel, the front derailleur comprising: a fixed section fixed to a bicycle frame, a chain guide for contacting a chain to shift the chain, and an actuating arm and a linkage rod disposed between and pivotally connected to the fixed section and the chain guide. In the above construction, the present invention has achieved the intended object of providing an improved bicycle front derailleur capable of reliably effecting a change speed operation with the aid of a sufficient restoring force of the return spring and achieving minimized in operation forces required for various change speeds.

Abstract: A universal serial bus (USB) device having integrated chip (IC) card reader/writer and flash memory disk functions is disclosed, in which an IC card reader/writer module and a flash memory disk module are integrated. The USB device comprises an IC card reader/writer module, a flash memory disk module and a USB interface. Through the USB interface, data in the USB device may be transmitted to an external electronic device such as a computer connected thereto so that an IC card may be subject to an authentication process and a data read/write process. Also, the flash memory disk module may serve as a portable hard disk of the external electronic device since data in the flash memory disk module and the electronic device may be transferred between each other.

Abstract: A composite electronic card device is disclosed, comprising an erasable nonvolatile memory, a random access memory (RAM) . . . , CPU, cryptographic module and other electronic components. Through different cryptographic algorithms, different security application systems may arrange and configure different application program or data block required and application software, keys, password, key authentication an personal data may be written into the arranged application program or data blocks. As such, the different security applications systems may be accessed by the single composite electronic card device.

Abstract: A fixing structure for the insertion module is disclosed. The fixing structure for the insertion module comprises at least a hook piece disposed on one side of the insertion module, and at least a support portion disposed on the hook piece. Thereby, the insertion module is fixed in an opening of a computer casing firmly via the hook piece and the support portion.

Abstract: A communication system includes a wireless network terminal (30), a wired network terminal (10), and a communication device (20). The communication device includes a Local Area Network (LAN) controller module (22), a process unit (24) and a transcoder (26). When the wired network terminal transmits a first kind of signal input to the communication device, the first kind of input signal is processed by the process unit and transformed into a first kind of output signal by the transcoder. Then the first kind of output is transmitted to the wireless network terminal. When the wireless network terminal transmits a second kind of signal input to the communication device. The second kind of input signal is transformed into the second kind of output signal by the transcoder. The second kind of output signal is processed by the process unit, and is then transmitted to the wired network terminal.