Abstract: A method for providing a cooling system is described. The method includes providing a plurality of sheets. Each sheet includes at least one structure for a level in each cooling cell of a plurality of cooling cells. A particular level of each cooling cell includes a cooling element having a first side and a second side. The cooling element is configured to undergo vibrational motion to drive fluid from the first side to the second side. The method also includes aligning the sheets, attaching the sheets to form a laminate that includes the cooling cells, and separating the laminate into sections. Each section includes at least one cooling cell.

Abstract: This disclosure provides systems, methods and apparatus for provided masked structures on an embossed substrate. In one aspect, these masked structures may be reflected facets for use as part of a frontlight film. In another aspect, these masked structures may be masked wiring for use as part of a capacitive touchscreen array. In one aspect, the structures may have a discrete mask formed thereon, while in other aspects, these structures may have self-masking attributes, and may include an interferometric black mask.

Abstract: A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure.

Abstract: Display elements of a display array include at least one fixed layer and a movable layer. The movable layer is positioned with respect to the at least one fixed layer by placing a charge on the movable layer and applying a voltage to the at least one fixed layer. The at least one fixed layer may be two layers positioned on either side of the movable layer. The movable layer may be positioned in a desired position when driving an array of display elements by executing a reset stage, a charging stage, and a bias stage.

Abstract: This disclosure provides systems, methods and apparatus for an arrangement of pixels and interconnects in a display. In one aspect, polarities of pixels may be in a dot inversion configuration, or checkerboard pattern, to reduce the visibility of flicker. Various interconnect alternatively couple between modules in different columns or rows to provide dot inversion.

Abstract: This disclosure provides apparatus and methods for mitigating electrostatic discharge (ESD) in display devices. In one aspect, a display device includes an encapsulation substrates having an anti-static coating on one or more of surfaces of the encapsulation substrate. The display devices can include transparent substrates having display elements thereon such that the encapsulation substrate that covers the display elements. The anti-static coating on one or more surfaces of the encapsulation substrate can dissipate charge that may build up during fabrication or operation of the display device. The anti-static coating can be conductive and transparent, with examples of such coatings including transparent conducting oxides (TCOs), thin metal films, thin carbon films, and networks of conductive nanostructures.

Abstract: This disclosure provides systems, methods and apparatus for masked reflective structures which can be integrated into display devices. In one aspect, masks and etch leading layers can be used to control the etching of a stack of layers to form masked reflective structures having a desired profile. In particular, tapered edges at a particular angle can be formed, and the resulting structures used in a roll-to-roll process to fabricate a device component.

Abstract: A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure.

Abstract: This disclosure provides systems, methods and apparatus for an arrangement of pixels and interconnects in a display. In one aspect, polarities of pixels may be in a dot inversion configuration, or checkerboard pattern, to reduce the visibility of flicker. Various interconnect alternatively couple between modules in different columns or rows to provide dot inversion.

Abstract: A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.

Abstract: Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.

Abstract: Display elements of a display array include at least one fixed layer and a movable layer. The movable layer is positioned with respect to the at least one fixed layer by placing a charge on the movable layer and applying a voltage to the at least one fixed layer. The at least one fixed layer may be two layers positioned on either side of the movable layer. The movable layer may be positioned in a desired position when driving an array of display elements by executing a reset stage, a charging stage, and a bias stage.

Abstract: This disclosure provides systems, methods and apparatus for providing an in-plane electromechanical systems (EMS) varactor. In one aspect, the in-plane EMS varactor may include in-plane relative translation between a second portion and a first portion. Such translation may cause a change in a gap or overlap between first electrodes that remain fixed with respect to the first portion and second electrodes that remain fixed with respect to the second portion that may cause a change in capacitance between the first and second electrodes. In some implementations, the configuration of the second portion and the first portion may be either of two mechanically bi-stable states.

Abstract: This disclosure provides systems, methods and apparatus for provided masked structures on an embossed substrate. In one aspect, these masked structures may be reflected facets for use as part of a frontlight film. In another aspect, these masked structures may be masked wiring for use as part of a capacitive touchscreen array. In one aspect, the structures may have a discrete mask formed thereon, while in other aspects, these structures may have self-masking attributes, and may include an interferometric black mask.

Abstract: This disclosure provides systems, methods and apparatus for masked reflective structures which can be integrated into display devices. In one aspect, masks and etch leading layers can be used to control the etching of a stack of layers to form masked reflective structures having a desired profile. In particular, tapered edges at a particular angle can be formed, and the resulting structures used in a roll-to-roll process to fabricate a device component.

Abstract: This disclosure provides systems, methods and apparatus for encapsulating electromechanical systems devices. In one aspect, large arrays of electromechanical systems devices can be encapsulated. In one aspect the encapsulation includes an encapsulation layer supported over the electromechanical systems devices by encapsulation layer supports. The encapsulation layer can also include a plurality of orifices. The orifices can be sealed such that the electromechanical systems devices below are not damaged.

Abstract: This disclosure provides systems, methods and apparatus for storage capacitors. In one aspect, an electromechanical systems (EMS) device includes a substrate, an optical stack disposed over the substrate, a mechanical layer positioned over the optical stack, and a storage capacitor. The optical stack includes a stationary electrode and at least one dielectric layer disposed over the stationary electrode, and the storage capacitor includes a first plate, a second plate and a dielectric structure disposed between the first and second plates. The first plate includes a portion of the mechanical layer positioned over an optically non-active region of the device, and the dielectric structure of the storage capacitor includes a portion of the at least one dielectric layer of the optical stack.

Abstract: This disclosure provides systems, methods and apparatus for storage capacitors. In one aspect, a device includes an array having at least a first display element and a second display element, at least one switch configured to control a flow of charge between a source and the first display element, and at least one interferometric optical mask structure disposed in a non-active area of the array between the first display element and the second display element. The optical mask structure includes a storage capacitor formed by a first conductive layer and a second conductive layer. The storage capacitor is electrically coupled to the at least one switch and the first display element.

Abstract: This disclosure provides systems, methods and apparatus for an electromechanical systems device. In one aspect, an electromechanical systems device may include a substrate and a movable layer positioned apart from the substrate. The movable layer and the substrate may define a cavity. The movable layer may be movable to increase the size of the cavity or to decrease the size of the cavity. The movable layer also may include a first anchor point attaching the movable layer to the substrate and a first feature associated with the first anchor point. The first feature may include a protrusion of the movable layer into or out from the cavity.

Abstract: Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, both rivets and posts may be used. In certain embodiments, these support structures are formed from rigid inorganic materials, such as metals or oxides. In certain embodiments, etch barriers may also be deposited to facilitate the use of materials in the formation of support structures which are not selectively etchable with respect to other components within the MEMS device.