Patents by Inventor Ming-Hsiung Fu

Ming-Hsiung Fu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer process chamber leak detector
    Patent number: 8530242
    Abstract: The present disclosure includes a method for monitoring leaks in a wafer process chamber. The method includes providing a wafer process chamber coupled to a gas supply by a gas supply line, wherein an indicator member is coupled to the gas supply line between the gas supply and the wafer process chamber, and a final valve is located on the gas supply line between the gas supply and the indicator member. A gas is supplied from the gas supply to the wafer process chamber through the gas supply line. A light is emitted and directed through the indicator member. The light that was directed through the indicator member is then reflected using a reflecting member. The reflected light is then received and compared to the light emitted in order to determine that the color of the indicator member has changed and a leak has been detected in the gas supply line.
    Type: Grant
    Filed: March 30, 2009
    Date of Patent: September 10, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: George Lin, Ming-Hsiung Fu
  • WAFER PROCESS CHAMBER LEAK DETECTOR
    Publication number: 20100248382
    Abstract: The present disclosure includes a method for monitoring leaks in a wafer process chamber. The method includes providing a wafer process chamber coupled to a gas supply by a gas supply line, wherein an indicator member is coupled to the gas supply line between the gas supply and the wafer process chamber, and a final valve is located on the gas supply line between the gas supply and the indicator member. A gas is supplied from the gas supply to the wafer process chamber through the gas supply line. A light is emitted and directed through the indicator member. The light that was directed through the indicator member is then reflected using a reflecting member. The reflected light is then received and compared to the light emitted in order to determine that the color of the indicator member has changed and a leak has been detected in the gas supply line.
    Type: Application
    Filed: March 30, 2009
    Publication date: September 30, 2010
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: George Lin, Ming-Hsiung Fu