Patents by Inventor Ming Hui Chu

Ming Hui Chu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170271205
    Abstract: A method of forming a semiconductor device is provided. Metallic interconnects are formed in a dielectric layer of the semiconductor device. A hard mask is used to avoid usual problems faced by manufacturers, such as possibility of bridging different conductive elements and via patterning problems when there are overlays between vias and trenches. The hard mask is etched multiple times to extend via landing windows, while keeping distance between the conductive elements to avoid the bridging problem.
    Type: Application
    Filed: March 20, 2017
    Publication date: September 21, 2017
    Inventors: Ming-Hui Chu, Chih-Yuan Ting, Jyu-Horng Shieh
  • Patent number: 9601348
    Abstract: A method of forming a semiconductor device is provided. Metallic interconnects are formed in a dielectric layer of the semiconductor device. A hard mask is used to avoid usual problems faced by manufacturers, such as possibility of bridging different conductive elements and via patterning problems when there are overlays between vias and trenches. The hard mask is etched multiple times to extend via landing windows, while keeping distance between the conductive elements to avoid the bridging problem.
    Type: Grant
    Filed: March 13, 2014
    Date of Patent: March 21, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Hui Chu, Chih-Yuan Ting, Jyu-Horng Shieh
  • Publication number: 20150262873
    Abstract: A method of forming a semiconductor device is provided. Metallic interconnects are formed in a dielectric layer of the semiconductor device. A hard mask is used to avoid usual problems faced by manufacturers, such as possibility of bridging different conductive elements and via patterning problems when there are overlays between vias and trenches. The hard mask is etched multiple times to extend via landing windows, while keeping distance between the conductive elements to avoid the bridging problem.
    Type: Application
    Filed: March 13, 2014
    Publication date: September 17, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ming-Hui Chu, Chih-Yuan Ting, Jyu-Horng Shieh
  • Publication number: 20090184441
    Abstract: A microstructure roller formed of a cylinder and a resin pattern layer is disclosed. The microstructure roller is made by: providing a cylinder having a groove extending around the periphery, and then adhering a flexible mold plate to the periphery of the cylinder to have a cavity be defined in between the groove of the cylinder and a patterned face of microstructure patterns of the flexible mold plate, and then filling a resin in the cavity, and the curing the resin, and then removing the flexible mold plate from the cylinder.
    Type: Application
    Filed: January 14, 2009
    Publication date: July 23, 2009
    Inventors: Sen-Yeu Yang, Chih-Yuan Chang, Ming-Hui Chu
  • Patent number: 6313262
    Abstract: The present invention is related to a method for preparing polyether polyol or copolymerized polyether polyol, which uses an acid catalyst consisting of heteropoly acidic salts and oxides and/or binders. It allows tetrahydrofuran and/or cyclic ether compounds to carry out the ring-opening polymerization or ring-opening copolymerization with/without telogen, and obtains polyether polyol or copolymerized polyether polyol. An acid catalyst is used in the present invention because of its low solubility in organic solvent, so its process is simpler and the catalyst is easy to recycle for repeated use. As well, its preparation process is highly advantageous.
    Type: Grant
    Filed: November 23, 1999
    Date of Patent: November 6, 2001
    Assignee: Dairen Chemical Corporation
    Inventors: Shien Chang Chen, Fu Shen Lin, June Yen Chou, Liang An Hsu, Ming Hui Chu, Chine Chung Huang, Ming Hsiung Shao
  • Patent number: 5917061
    Abstract: This invention is directed to a process for producing cyclic ethers by liquid phase reaction, which comprises using a crystalline aluminosilicate zeolite as the catalyst, and subjecting an alkanediol to cyclodehydration at a temperature less than the boiling point of the alkanediol to obtain the corresponding cyclic ether.
    Type: Grant
    Filed: April 28, 1998
    Date of Patent: June 29, 1999
    Assignee: Dairen Chemical Corporation
    Inventors: Shien Chang Chen, Cheng Chang Chu, Fu Shen Lin, June Yen Chou, Ming Hui Chu