Patents by Inventor Ming L. Yu

Ming L. Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Temperature-adjusted spectrometer
    Patent number: 9177877
    Abstract: A temperature-adjusted spectrometer can include a light source and a temperature sensor.
    Type: Grant
    Filed: April 23, 2014
    Date of Patent: November 3, 2015
    Assignee: First Solar, Inc.
    Inventors: Markus E. Beck, Ming L. Yu
  • TEMPERATURE-ADJUSTED SPECTROMETER
    Publication number: 20140231945
    Abstract: A temperature-adjusted spectrometer can include a light source and a temperature sensor.
    Type: Application
    Filed: April 23, 2014
    Publication date: August 21, 2014
    Applicant: First Solar, Inc.
    Inventors: Markus E. Beck, Ming L. Yu
  • SURFACE MEASUREMENT
    Publication number: 20130115720
    Abstract: A method and apparatus for determining grain size of a surface. A light source is directed at the surface. Reflected light from the surface is detected. A peak surface grain wavelength is determined from the reflected light. The peak surface grain wavelength is converted to a grain size. Grain size of a semiconductor surface is used as a feedback input to control a manufacturing process.
    Type: Application
    Filed: November 7, 2011
    Publication date: May 9, 2013
    Inventors: Arnold Allenic, Oleh Petro Karpenko, Erel Milshtein, Ming L. Yu
  • DEPOSITION RATE CONTROL
    Publication number: 20110212256
    Abstract: An vapor deposition control system includes a multi-level control scheme.
    Type: Application
    Filed: February 11, 2011
    Publication date: September 1, 2011
    Applicant: First Solar, Inc.
    Inventors: Markus E. Beck, Ming L. Yu, Erel Milshtein, Ashish Bodke, Ulrich A. Bonne, Raffi Garabedian
  • Tandem microchannel plate and solid state electron detector
    Patent number: 6717146
    Abstract: A compact detector for secondary and backscattered electrons in a scanning electron beam system includes a microchannel plate detector and a solid state detector connected in a tandem manner. The detector offers large bandwidth and high dynamic range. The detector can be used for article inspection, lithography, metrology, and other related applications. The compactness of the detector makes it ideally suited for utilization in a miniature electron beam column, such as a microcolumn.
    Type: Grant
    Filed: May 24, 2001
    Date of Patent: April 6, 2004
    Assignee: Applied Materials, Inc.
    Inventors: Tai-Hon Philip Chang, Stuart L. Friedman, Ming L. Yu
  • Tandem microchannel plate and solid state electron detector
    Publication number: 20020175283
    Abstract: A compact detector for secondary and backscattered electrons in a scanning electron beam system includes a microchannel plate detector and a solid state detector connected in a tandem manner. The detector offers large bandwidth and high dynamic range. The detector can be used for article inspection, lithography, metrology, and other related applications. The compactness of the detector makes it ideally suited for utilization in a miniature electron beam column, such as a microcolumn.
    Type: Application
    Filed: May 24, 2001
    Publication date: November 28, 2002
    Applicant: ETEC SYSTEMS, INC.
    Inventors: Tai-Hon Philip Chang, Stuart L. Friedman, Ming L. Yu