Patents by Inventor Minoru ADEGAWA

Minoru ADEGAWA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11977330
    Abstract: A resist composition which generates an acid by exposure and whose solubility in a developing solution changes by the action of an acid. The resist composition contains a high-molecular-weight compound having a constitutional unit represented by General Formula (a0-1), and a high-molecular-weight compound having a constitutional unit represented by General Formula (f01-1) and a constitutional unit including an acid-dissociable group represented by General Formula (f02-r-1).
    Type: Grant
    Filed: December 2, 2020
    Date of Patent: May 7, 2024
    Assignee: TOKYO OHKA KOGYO CO., LTD.
    Inventors: Takaaki Kaiho, Yasuo Someya, Minoru Adegawa
  • Publication number: 20230107966
    Abstract: A resist composition that generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid. The resist composition contains a polymeric compound having a constitutional unit (a0) represented by General Formula (a0-1), a compound (B1) represented by General Formula (b1), and a compound (D1) represented by General Formula (d1).
    Type: Application
    Filed: November 27, 2020
    Publication date: April 6, 2023
    Inventors: Yasuo SOMEYA, Takaaki KAIHO, Minoru ADEGAWA
  • Publication number: 20220214615
    Abstract: A resist composition containing a resin component, an acid generator component that generates acid upon exposure, and an organic solvent component, the resin component containing a polymeric compound that exhibits changed solubility in a developing solution under action of acid, the acid generator component containing a compound represented by General Formula (b0-1), and a proportion of a mass of the resin component with respect to a total mass of the resin component and the organic solvent component is in a range of 15% to 30% by mass. In the formula (b0-1), Rb01 represents an alkyl group; Lb01 represents a single bond or an alkylene group; Lb02 represents an alkylene group; and Rf01 and Rf01 represent a fluorine atom or a fluorinated alkyl group.
    Type: Application
    Filed: December 3, 2021
    Publication date: July 7, 2022
    Inventors: Takaaki KAIHO, Yasuo SOMEYA, Minoru ADEGAWA
  • Publication number: 20220179315
    Abstract: A resist composition containing a compound represented by General Formula (d1-1) or a compound represented by General Formula (d1-2) and containing a polymeric compound (A01) having a constitutional unit (a01) represented by General Formula (a0-1), a constitutional unit (a02) represented by General Formula (a0-2), and a constitutional unit (a03) represented by General Formula (a0-3) wherein, Ra01 represents a lactone-containing cyclic group having a cyano group or the like.
    Type: Application
    Filed: November 19, 2021
    Publication date: June 9, 2022
    Inventors: Yasuo SOMEYA, Takaaki KAIHO, Minoru ADEGAWA
  • Publication number: 20210181632
    Abstract: A resist composition which generates an acid by exposure and whose solubility in a developing solution changes by the action of an acid. The resist composition contains a high-molecular-weight compound having a constitutional unit represented by General Formula (a0-1), and a high-molecular-weight compound having a constitutional unit represented by General Formula (f01-1) and a constitutional unit including an acid-dissociable group represented by General Formula (f02-r-1).
    Type: Application
    Filed: December 2, 2020
    Publication date: June 17, 2021
    Inventors: Takaaki KAIHO, Yasuo SOMEYA, Minoru ADEGAWA