Abstract: An apparatus, for sequentially delivering articles to a specified article-receiving position from each of a plurality of cassettes each containing a plurality of the articles slidably one above another, includes endless chains with cassette-carrying bars attached thereto for longitudinally transporting an array of such cassettes along and above an elongated top plate, an elevator for lifting one cassette at a time, and a pusher assembly for pushing one article at a time from the cassette lifted to a target height by the elevator. The chains are disposed near one side edge of the top plate and the top plate is provided with a transversely extending cut through which the elevator can pass vertically without being interfered with the cables. Guide rails and a roller guide are provided to keep the cassettes horizontally as they are transported longitudinally.

Abstract: An apparatus for transferring disks with central holes such as wafers includes two transversely notched horizontal rods which are supported parallel to each other and one above the other. The lower rod is adapted to be passed through the center holes of the disks and to support them in its notches by their inner peripheries. The upper rod serves to securely hold these disks from above by their outer rims. A driving unit is provided to individually move the two rods longitudinally and also to vary the separation between them. The apparatus, as a whole, can be moved robotically in all directions. With the apparatus thus structured, the disks can be transferred sequentially between a cassette of an ordinary type for holding them vertically and parallel to one another at a uniform pitch with their central holes aligned and a pallet having a vertical surface with openings each capable of supporting a disk with its both surfaces exposed for processing.

Abstract: Clean benches each providing a sealed work space can be connected together in a row to form a modular system such that objects on pallets can be transported concurrently back and forth from one to another of connected benches through sealed doorways. The pallets have a translucent bottom and lamps are provided below their paths such that the objects thereon can be clearly silhouetted. Each bench is provided with a driving mechanism for a robotic gripper arm such that various tools can be used to automatically perform different tasks in the work space. The main frame of each bench forms a closed air circulating system for providing an air flow through the work space, and fans of different power are arranged in its path such that the air pressure tends to be higher in the work space than elsewhere.

Abstract: A pick-up head module has two vertical tubes for picking up small objects such as ICs by suction. A mechanism is provided for rotating these two tubes around their own axes. The tubes are individually supported by two separate tables, one (first) rack gear being attached to one of these tables and two (second and third) rack gears being attached to the other. These three rack gears are all vertically oriented, the first and second rack gears being in a side-by-side relationship and the third rack gear being opposite therefrom. A pinion is provided so as to be controllably slidable in the direction of its axis, thereby selectably engaging either with the first and second rack gears or with the first and third gear.

Abstract: A manually operable apparatus is provided for transferring disks with center holes such as semiconductor wafers from one cassette of an ordinary kind to another having a different pitch. The apparatus has an elongated rod on which an array of disk-shaped pieces each capable of supporting a wafer from its center hole is slidably mounted. These pieces are so connected that the separation between each of mutually adjacent pairs can vary but not to exceed a predetermined maximum distance. The piece at one end of the array is affixed to the rod and the one at the other end is attached to a tubular member which can be moved manually in the direction of the rod.

Abstract: A socket-like structure with contact terminals for testing IC pieces is set at a specified position and a vertically movable block is set above this socket-like structure. A frame surrounding this block is provided with a lock screw by which a pin press can be pressed between the block and the frame either tightly or loosely. The pin press has downwardly protruding edges which are patterned according to the pins of the IC pieces to be tested. The pin press is lowered while it is only loosely pressed between the block and the frame and thereby adjusts its position according to the socket-like structure placed below. The lock screw is tightened thereupon to fasten the pin pressed at this adjusted position. With the pin press thus fastened at the adjusted position, IC pieces to be tested are delivered onto the socket-like structure one at a time and the pin press is lowered to thereby correctly press the pins of the IC piece to be tested against the terminals for the testing device.

Abstract: A disk polisher has a horizontal turntable for moving workpieces around thereon and an assembly for holding flat grinding surfaces of grinding stone against these moving workpieces. The grinding stone pieces are provided with throughholes and are attached to a supporting body having internal passageways. Orifices are provided to connect these internal passageways with the throughholes such that a high-pressure fluid such as air can be directed through the passageways and the throughholes to apply external force on processed workpieces which tend to stick to the grinding surfaces due to the surface tension of water used for grinding. The diametrical shapes of the orifices and throughholes are carefully determined such that the processed workpieces can be reliably separated while the pressure drop inside the passageway due to escaping air will be minimized.

Abstract: A system can be formed for automatically loading and unloading items such as ICs into and from containers of different types having various configurations by providing a plurality of base units each of the same structure but having different item-handling modules attached thereto. The base units have a unistructurally cast planar top plate with a horizontal top surface, an arm which is horizontally supported above the top plate and a driving assembly which serves to move the arm in a horizontal first direction while the arm remains extended in a horizontal second direction perpendicular to the first direction. A holder member is mounted to the arm and slidable therealong in the second direction. A spline shaft is rotatably supported by the top plate that extends in the first direction. A belt is attached to the holder member on the arm and engages with the spline shaft in a power-communication relationship.

Abstract: A disk gripper has a rotary actuator with a horizontally supported shaft, a swing arm which is attached to and can rotate with this shaft and a finger arm which is connected to the swing arm such that the connected arms together extend radially from the shaft. Gripper fingers on the finger arm have mutually coplanar flat outer surfaces which point downward when the arms are in the horizontally extended position. The gripper fingers are provided with grooves and are movable toward or away from one another while their flat outer surfaces slidingly move over a horizontal support surface such that a disk lying on this surface can be engaged in these grooves or disengaged therefrom. The swing arm and the finger arm are slidable within a limited distance with respect to each other in a direction perpendicular to their extension.

Abstract: A multi-disk clamp end effector carries around a tubular member a plurality of disks with a center hole like wafers and releases them sequentially one at a time. Each disk is attached to the tubular member by means of a holder which not only supports the disk but also is pressed to the tubular member by an elastic ring. As the tubular member is gradually retracted and its front end passes the position of each holder, the contracting force of the spring disengages the holder from the disk to which it is attached and the corresponding disk is released.

Abstract: An apparatus is provided for transferring disks with center holes such as semiconductor wafers from one cassette of an ordinary kind to another having a different pitch. The apparatus has an elongated rod on which an array of disk-shaped pieces each capable of supporting a wafer from its center hole is slidably mounted. These pieces are so connected that the separation between each of mutually adjacent pairs can vary but not to exceed a predetermined maximum distance. The piece at one end of the array is affixed to the rod and the one at the other end is attached to a power source and is moved along the rod.

Abstract: An actuator swing arm mechanism includes extension shafts which are rigidly and coaxially attached to the drive shaft of an actuator at one end and rigidly attached to a swing arm at the other end. These extension shafts, rather than the drive shaft of the actuator itself, are rotatably supported by supporting members such that the weight of a heavy load on the swing arm is communicated through these extension shafts to and carried by these supporting members and the drive shaft of the actuator is relatively unaffected by the load.

Abstract: A gripper assembly contains within its cylindrical tubular housing a piston and a rotatably supported finger assembly having a push rod and gripper fingers. The push rod is pressed rotatably against the piston through a thrust bearing by a spring. As the piston pushes the push rod against the biasing force of the spring, the motion of the push rod causes the gripper fingers to close. Position of the object to be gripped can be detected through a fiber optic light guide passing through the piston and the push rod.

Abstract: A disk guide is comprised of a pair of mutually parallel vertical grooves, a disk holder and a mechanism for moving the disk holder vertically. The grooves are formed on mutually opposite sidewalls such that a disk supported by the disk holder can be lifted vertically, supported and guided by the vertical grooves. The disk holder has a disk-supporting top surface which is sloped such that the disk supported thereon leans against a selected one of the vertical sidewalls and hence can be positioned accurately.

Abstract: A lubricant applicator has a horizontally oriented spindle on which a disk to be processed is detachably attached and rotated with the spindle. After a lubricant is sprayed on both its surfaces from nozzles disposed adjacent thereto, the disk is brought between a pair of vertically stretched tapes while rotating with the spindle. A pair of grippers sandwiching the disk applies pressure on its surfaces through the tapes to uniformly control the lubricant film thickness on the disk surfaces.

Abstract: An end effector for automatically removing an IC chip from its holder has locating pins to be inserted into holes formed in the holder to properly position itself with respect to the IC chip and shoving pins attached to horizontally movable grippers so as to be able to shove and bend parts of the holder holding the chip to thereby release the chip from the holder. A vertically movable tube connected to a vacuum pump above contacts the chip at the bottom and pulls it out of the holder by suction.

Abstract: A disk carrier is comprised of a carrier plate having one or more throughholes at which disks are carried with both surfaces exposed to be processed. Abutting and partially around each of these throughholes is a recess such that not only can a disk be easily positioned at the throughhole without having its surface scratched but also a corner is formed in this recessed region which can serve as an indexing depression. For this purpose, the recess may be fomed with a bottom surface parallel to the surface of the carrier plate and boundary wall in the form of a part of a polygon such that two mutually adjacent straight parts thereof, together with the bottom surface, form a corner which can serve as a reference position easily accessible by a touch sensor.

Abstract: A position detecting device for detecting the position of an object from any angle comprising a contacting member having a ball center portion held within a spherical bearing to enable multiple angle movement and an inner end contacting a switch, whereby any movement of the contacting member at any angle operates the switch. In a second embodiment, the ball and bearing arrangement is replaced with an arc portion and inner surface of the support body with the length dimension in the width diameter being maintained the same for any movement of the contacting member. The device is advantageous in enabling detection at any angle with a small, light-weight device.

Abstract: A handling device including a head and a linear transfer arm mounted on the head and slideable along a major length dimension of the arm, and a piston and cylinder for driving the linear transfer arm. The cylinder is fixedly mounted on the head and includes a housing having a mjaor length dimension parallel to the transfer arm length dimension and extending from the head approximately a same length which the linear transfer arm extends from the head. The piston includes a piston rod connected to the linear transfer arm for driving the same when the piston is displaced within the cylinder. A bracket is fixedly secured to an end portion of the linear transfer arm and carries a pair of rollers disposed opposite each other above and below the cylinder and contacting the cylinder. The pair of rollers are mounted for rotation and rotate as the linear transfer arm is displaced along the major length dimension thereof and as the rollers travel along the length of the cylinder in contact therewith.