Patents by Inventor Minoru Ohsaki

Minoru Ohsaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate supporting apparatus for a CVD apparatus
    Patent number: 5192371
    Abstract: A substrate supporting apparatus having a plurality of support plates positioned in parallel for supporting a plurality of substrates to be treated. The plates (13), (23) and (33) have respectively central openings (14), (24) and (34) which differ in size, and have respectively a plurality of clips (15), (25) and (35) along the periphery of the opening to support a substrate above the opening. The sizes of said openings (14, 24, 34) are determined depending upon reactive gas condition (e.g., temperature, pressure, flow characteristics of reactive gas) so that a uniform thin film can be formed on each substrate and an impurity introduced into the thin film can have a suitable concentration.
    Type: Grant
    Filed: May 21, 1991
    Date of Patent: March 9, 1993
    Assignee: ASM Japan K.K.
    Inventors: Mitsutoshi Shuto, Yasushi Fukazawa, Minoru Ohsaki