Patents by Inventor Minoru Soraoka
Minoru Soraoka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9620399Abstract: A load port is provided with a table and a plate. The table is arranged on a side of a front wall of an atmospheric transfer unit for transferring a piece of material under processing and is adapted to mount on it a container with the piece of material received in the same. The plate serves to isolate an interior of the atmospheric transfer unit from an exterior of the atmospheric transfer unit. The load port includes an exhaust duct arranged on a rear side of the plate and a fan arranged in a lower extremity of the exhaust duct. By the exhaust duct and the fan, an internal atmosphere of the atmospheric transfer unit can be exhausted into the atmosphere.Type: GrantFiled: February 16, 2015Date of Patent: April 11, 2017Assignee: HIRATA CORPORATIONInventors: Hidenobu Tanimura, Minoru Soraoka, Shinji Yokoyama, Noriyoshi Toyoda
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Publication number: 20150162229Abstract: A load port is provided with a table and a plate. The table is arranged on a side of a front wall of an atmospheric transfer unit for transferring a piece of material under processing and is adapted to mount on it a container with the piece of material received in the same. The plate serves to isolate an interior of the atmospheric transfer unit from an exterior of the atmospheric transfer unit. The load port includes an exhaust duct arranged on a rear side of the plate and a fan arranged in a lower extremity of the exhaust duct. By the exhaust duct and the fan, an internal atmosphere of the atmospheric transfer unit can be exhausted into the atmosphere.Type: ApplicationFiled: February 16, 2015Publication date: June 11, 2015Applicant: Hirata CorporationInventors: Hidenobu TANIMURA, Minoru SORAOKA, Shinji YOKOYAMA, Noriyoshi TOYODA
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Patent number: 8460467Abstract: A vacuum processing apparatus includes a transfer unit disposed at a center thereof, plural processing chambers, each processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas, and a mass flow controller unit interposed between two of the processing chambers for supplying gas to the chambers.Type: GrantFiled: July 6, 2011Date of Patent: June 11, 2013Assignee: Hitachi High-Technologies CorporationInventors: Akitaka Makino, Youji Takahashi, Minoru Soraoka, Hideki Kihara, Susumu Tauchi
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Publication number: 20110259522Abstract: A vacuum processing apparatus includes a transfer unit disposed at a center thereof, plural processing chambers, each processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas, and a mass flow controller unit interposed between two of the processing chambers for supplying gas to the chambers.Type: ApplicationFiled: July 6, 2011Publication date: October 27, 2011Inventors: Akitaka MAKINO, Youji TAKAHASHI, Minoru SORAOKA, Hideki KIHARA, Susumu TAUCHI
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Patent number: 7976632Abstract: A vacuum processing apparatus includes a transfer unit disposed at a center thereof, plural processing chambers, each processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas, and a mass flow controller unit interposed between two of the processing chambers for supplying gas to the chambers.Type: GrantFiled: February 21, 2008Date of Patent: July 12, 2011Assignee: Hitachi High-Technologies CorporationInventors: Akitaka Makino, Youji Takahashi, Minoru Soraoka, Hideki Kihara, Susumu Tauchi
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Patent number: 7833382Abstract: A vacuum processing apparatus comprising a transfer unit disposed at a center thereof, plural processing chambers, each processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas; and amass flow controller unit interposed between two processing chambers for supplying gas to the chambers.Type: GrantFiled: August 29, 2008Date of Patent: November 16, 2010Assignee: Hitachi High-Technologies CorporationInventors: Akitaka Makino, Youji Takahashi, Minoru Soraoka, Hideki Kihara, Susumu Tauchi
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Patent number: 7828928Abstract: A vacuum processing apparatus includes an outer chamber comprising a vacuum container, an inner chamber in which a plasma used for processing a wafer is generated, the inner chamber being detachably disposed inside of the outer chamber, a wafer holder on which the wafer is located is disposed inside of the inner chamber, and an exhausting device disposed below the wafer holder which exhausts the inside of the inner chamber. The inner chamber is sealed in air-tight manner with respect to a space between the inner chamber and the outer chamber while the space is maintained at a vacuum pressure.Type: GrantFiled: August 28, 2008Date of Patent: November 9, 2010Assignee: Hitachi High-Technologies CorporationInventors: Akitaka Makino, Youji Takahashi, Minoru Soraoka, Hideki Kihara, Susumu Tauchi
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Publication number: 20090220322Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.Type: ApplicationFiled: May 6, 2009Publication date: September 3, 2009Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
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Publication number: 20090000739Abstract: A vacuum processing apparatus comprising a transfer unit disposed at a center thereof, plural processing chambers, each processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas; and amass flow controller unit interposed between two processing chambers for supplying gas to the chambers.Type: ApplicationFiled: August 29, 2008Publication date: January 1, 2009Inventors: Akitaka Makino, Youji Takahashi, Minoru Soraoka, Hideki Kihara, Susumu Tauchi
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Publication number: 20080317581Abstract: A vacuum processing apparatus includes an outer chamber comprising a vacuum container, an inner chamber in which a plasma used for processing a wafer is generated, the inner chamber being detachably disposed inside of the outer chamber, a wafer holder on which the wafer is located is disposed inside of the inner chamber, and an exhausting device disposed below the wafer holder which exhausts the inside of the inner chamber. The inner chamber is sealed in air-tight manner with respect to a space between the inner chamber and the outer chamber while the space is maintained at a vacuum pressure.Type: ApplicationFiled: August 28, 2008Publication date: December 25, 2008Inventors: Akitaka MAKINO, Youji Takahashi, Minoru Soraoka, Hideki Kihara, Susumu Tauchi
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Publication number: 20080145193Abstract: A vacuum processing apparatus includes a transfer unit disposed at a center thereof, plural processing chambers, each processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas, and a mass flow controller unit interposed between two of the processing chambers for supplying gas to the chambers.Type: ApplicationFiled: February 21, 2008Publication date: June 19, 2008Inventors: Akitaka Makino, Youji Takahashi, Minoru Soraoka, Hideki Kihara, Susumu Tauchi
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Publication number: 20080138180Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.Type: ApplicationFiled: February 11, 2008Publication date: June 12, 2008Inventors: Minoru Soraoka, Ken Yoshioka, Yashinao Kawasaki
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Patent number: 7347656Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.Type: GrantFiled: March 9, 2005Date of Patent: March 25, 2008Assignee: Hitachi, Ltd.Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
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Patent number: 7335277Abstract: A vacuum processing apparatus comprising a transfer unit disposed at a center thereof, plural processing chambers, each processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas; and a mass flow controller unit interposed between two processing chambers for supplying gas to the chambers.Type: GrantFiled: September 8, 2003Date of Patent: February 26, 2008Assignee: Hitachi High-Technologies CorporationInventors: Akitaka Makino, Youji Takahashi, Minoru Soraoka, Hideki Kihara, Susumu Tauchi
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Patent number: 7247207Abstract: A vacuum processing apparatus includes a vacuum processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas. The vacuum processing chamber has an axisymmetric structure, including a double wall structure, and a gate valve for sealing an opening through which the object enters the processing chamber.Type: GrantFiled: March 30, 2004Date of Patent: July 24, 2007Assignee: Hitachi High-Technologies CorporationInventors: Akitaka Makino, Youji Takahashi, Minoru Soraoka, Hideki Kihara, Susumu Tauchi
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Patent number: 7201551Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.Type: GrantFiled: September 20, 2001Date of Patent: April 10, 2007Assignee: Hitachi, Ltd.Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
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Publication number: 20070066204Abstract: A load port is provided with a table and a plate. The table is arranged on a side of a front wall of an atmospheric transfer unit for transferring a piece of material under processing and is adapted to mount on it a container with the piece of material received in the same. The plate serves to isolate an interior of the atmospheric transfer unit from an exterior of the atmospheric transfer unit. The load port includes an exhaust duct arranged on a rear side of the plate and a fan arranged in a lower extremity of the exhaust duct. By the exhaust duct and the fan, an internal atmosphere of the atmospheric transfer unit can be exhausted into the atmosphere.Type: ApplicationFiled: April 18, 2006Publication date: March 22, 2007Applicant: Hirata CorporationInventors: Hidenobu Tanimura, Minoru Soraoka, Shinji Yokoyama, Noriyoshi Toyoda
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Patent number: 6962472Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.Type: GrantFiled: September 20, 2001Date of Patent: November 8, 2005Assignee: Hitachi, Ltd.Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
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Publication number: 20050175435Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.Type: ApplicationFiled: March 9, 2005Publication date: August 11, 2005Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
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Patent number: D546354Type: GrantFiled: August 26, 2005Date of Patent: July 10, 2007Assignee: Hitachi High-Technologies CorporationInventors: Hideki Kihara, Minoru Soraoka, Yuzo Ohirabaru, Nobuo Nagayasu