Patents by Inventor Mirco Cantoro

Mirco Cantoro has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11955516
    Abstract: A semiconductor device includes first and second active patterns, a field insulating film between the first and second active patterns, a first gate structure intersecting the first active pattern and including a first gate electrode and a first gate spacer, a second gate structure intersecting the second active pattern and including a second gate electrode and a second gate spacer, a gate separation structure on the field insulating film between the first and second gate structures, the gate separation structure including a gate separation filling film on a gate separation liner, and a connecting spacer between the gate separation structure and the field insulating film, the connecting spacer protruding from a top surface of the field insulating film, and the gate separation liner contacting the connecting spacer and extending along a top surface and sidewalls of the connecting spacer and along the top surface of the field insulating film.
    Type: Grant
    Filed: January 27, 2023
    Date of Patent: April 9, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ho-Jun Kim, Woong Sik Nam, Mirco Cantoro
  • Patent number: 11843051
    Abstract: The present disclosure relates to a field-effect transistor and a method of fabricating the same. A field-effect transistor includes a semiconductor substrate including a first semiconductor material having a first lattice constant, and a fin structure on the semiconductor substrate. The fin structure includes a second semiconductor material having a second lattice constant that is different from the first lattice constant. The fin structure further includes a lower portion that is elongated in a first direction, a plurality of upper portions protruding from the lower portion and elongated in a second direction that is different from the first direction, and a gate structure crossing the plurality of upper portions.
    Type: Grant
    Filed: July 8, 2022
    Date of Patent: December 12, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Mirco Cantoro, Yeoncheol Heo
  • Patent number: 11569349
    Abstract: A semiconductor device includes first and second active patterns, a field insulating film between the first and second active patterns, a first gate structure intersecting the first active pattern and including a first gate electrode and a first gate spacer, a second gate structure intersecting the second active pattern and including a second gate electrode and a second gate spacer, a gate separation structure on the field insulating film between the first and second gate structures, the gate separation structure including a gate separation filling film on a gate separation liner, and a connecting spacer between the gate separation structure and the field insulating film, the connecting spacer protruding from a top surface of the field insulating film, and the gate separation liner contacting the connecting spacer and extending along a top surface and sidewalls of the connecting spacer and along the top surface of the field insulating film.
    Type: Grant
    Filed: May 28, 2021
    Date of Patent: January 31, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Ho-Jun Kim, Woong Sik Nam, Mirco Cantoro
  • Publication number: 20220352375
    Abstract: The present disclosure relates to a field-effect transistor and a method of fabricating the same. A field-effect transistor includes a semiconductor substrate including a first semiconductor material having a first lattice constant, and a fin structure on the semiconductor substrate. The fin structure includes a second semiconductor material having a second lattice constant that is different from the first lattice constant. The fin structure further includes a lower portion that is elongated in a first direction, a plurality of upper portions protruding from the lower portion and elongated in a second direction that is different from the first direction, and a gate structure crossing the plurality of upper portions.
    Type: Application
    Filed: July 8, 2022
    Publication date: November 3, 2022
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Mirco CANTORO, Yeoncheol HEO
  • Patent number: 11488956
    Abstract: A semiconductor device includes a substrate, a peripheral circuit layer, a first active pattern, a gate electrode, a first insulating layer, a conductive contact, and a second active pattern. The peripheral circuit layer is disposed on the substrate, and the peripheral circuit layer includes logic transistors and an interconnection layer that is disposed on the logic transistors. The first active pattern is disposed on the peripheral circuit layer. The gate electrode is disposed on a channel region of the first active pattern. The first insulating layer is disposed on the first active pattern and the gate electrode. The conductive contact is disposed in the first insulating layer and is electrically connected to a first source/drain region of the first active pattern, and the second active pattern is disposed on the first insulating layer. The channel region of the second active pattern vertically overlaps with the conductive contact.
    Type: Grant
    Filed: May 6, 2021
    Date of Patent: November 1, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Beomyong Hwang, Min Hee Cho, Hei Seung Kim, Mirco Cantoro, Hyunmog Park, Woo Bin Song, Sang Woo Lee
  • Publication number: 20220262790
    Abstract: Disclosed are semiconductor devices and methods of fabricating the same. The semiconductor device includes a plurality of gate structures that are spaced apart from each other in a first direction on a substrate and extend in a second direction intersecting the first direction, and a plurality of separation patterns penetrating immediately neighboring ones of the plurality of gate structures, respectively. Each of the plurality of separation patterns separates a corresponding one of the neighboring gate structures into a pair of gate structures that are spaced apart from each other in the second direction. The plurality of separation patterns are spaced apart from and aligned with each other along the first direction.
    Type: Application
    Filed: September 3, 2021
    Publication date: August 18, 2022
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Ho-Jun KIM, Beomjin PARK, Dong Il BAE, Mirco CANTORO
  • Patent number: 11411111
    Abstract: The present disclosure relates to a field-effect transistor and a method of fabricating the same. A field-effect transistor includes a semiconductor substrate including a first semiconductor material having a first lattice constant, and a fin structure on the semiconductor substrate. The fin structure includes a second semiconductor material having a second lattice constant that is different from the first lattice constant. The fin structure further includes a lower portion that is elongated in a first direction, a plurality of upper portions protruding from the lower portion and elongated in a second direction that is different from the first direction, and a gate structure crossing the plurality of upper portions.
    Type: Grant
    Filed: July 8, 2020
    Date of Patent: August 9, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Mirco Cantoro, Yeoncheol Heo
  • Patent number: 11342456
    Abstract: A ferroelectric semiconductor device includes an active region extending in one direction, a gate insulating layer crossing the active region, a ferroelectric layer disposed on the gate insulating layer and including a hafnium oxide, a gate electrode layer disposed on the ferroelectric layer, and source/drain regions disposed on the active region to be adjacent to both sides of the gate insulating layer, wherein the ferroelectric layer includes 20% or more of orthorhombic crystals, and an upper surface of the source/drain region is located at a level equal to or higher than an upper surface of the ferroelectric layer.
    Type: Grant
    Filed: January 8, 2021
    Date of Patent: May 24, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Woobin Song, Heiseung Kim, Mirco Cantoro, Sangwoo Lee, Minhee Cho, Beomyong Hwang
  • Publication number: 20220130957
    Abstract: A semiconductor device includes first and second active patterns, a field insulating film between the first and second active patterns, a first gate structure intersecting the first active pattern and including a first gate electrode and a first gate spacer, a second gate structure intersecting the second active pattern and including a second gate electrode and a second gate spacer, a gate separation structure on the field insulating film between the first and second gate structures, the gate separation structure including a gate separation filling film on a gate separation liner, and a connecting spacer between the gate separation structure and the field insulating film, the connecting spacer protruding from a top surface of the field insulating film, and the gate separation liner contacting the connecting spacer and extending along a top surface and sidewalls of the connecting spacer and along the top surface of the field insulating film.
    Type: Application
    Filed: May 28, 2021
    Publication date: April 28, 2022
    Inventors: Ho-Jun KIM, Woong Sik NAM, Mirco CANTORO
  • Publication number: 20210257369
    Abstract: A semiconductor device includes a substrate, a peripheral circuit layer, a first active pattern, a gate electrode, a first insulating layer, a conductive contact, and a second active pattern. The peripheral circuit layer is disposed on the substrate, and the peripheral circuit layer includes logic transistors and an interconnection layer that is disposed on the logic transistors. The first active pattern is disposed on the peripheral circuit layer. The gate electrode is disposed on a channel region of the first active pattern. The first insulating layer is disposed on the first active pattern and the gate electrode. The conductive contact is disposed in the first insulating layer and is electrically connected to a first source/drain region of the first active pattern, and the second active pattern is disposed on the first insulating layer. The channel region of the second active pattern vertically overlaps with the conductive contact.
    Type: Application
    Filed: May 6, 2021
    Publication date: August 19, 2021
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Beomyong Hwang, Min Hee Cho, Hei Seung Kim, Mirco Cantoro, Hyunmog Park, Woo Bin Song, Sang Woo Lee
  • Publication number: 20210159340
    Abstract: A ferroelectric semiconductor device includes an active region extending in one direction, a gate insulating layer crossing the active region, a ferroelectric layer disposed on the gate insulating layer and including a hafnium oxide, a gate electrode layer disposed on the ferroelectric layer, and source/drain regions disposed on the active region to be adjacent to both sides of the gate insulating layer, wherein the ferroelectric layer includes 20% or more of orthorhombic crystals, and an upper surface of the source/drain region is located at a level equal to or higher than an upper surface of the ferroelectric layer.
    Type: Application
    Filed: January 8, 2021
    Publication date: May 27, 2021
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Woobin SONG, Heiseung KIM, Mirco CANTORO, Sangwoo LEE, Minhee CHO, Beomyong HWANG
  • Patent number: 11018137
    Abstract: A semiconductor memory device includes a substrate, a first active pattern on the substrate, a gate electrode intersecting a channel region of the first active pattern, a first insulating layer covering the first active pattern and the gate electrode, a contact penetrating the first insulating layer so as to be electrically connected to a first source/drain region of the first active pattern, and a second active pattern on the first insulating layer. A channel region of the second active pattern vertically overlaps with the contact.
    Type: Grant
    Filed: June 17, 2019
    Date of Patent: May 25, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Beomyong Hwang, Min Hee Cho, Hei Seung Kim, Mirco Cantoro, Hyunmog Park, Woo Bin Song, Sang Woo Lee
  • Patent number: 10937700
    Abstract: A semiconductor device includes a first semiconductor pattern doped with first impurities on a substrate, a first channel pattern on the first semiconductor pattern, second semiconductor patterns doped with second impurities contacting upper edge surfaces, respectively, of the first channel pattern, and a first gate structure surrounding at least a portion of a sidewall of the first channel pattern.
    Type: Grant
    Filed: May 1, 2017
    Date of Patent: March 2, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Mirco Cantoro, Yun-Il Lee, Hyung-Suk Lee, Yeon-Cheol Heo, Byoung-Gi Kim, Chang-Min Yoe, Seung-Chan Yun, Dong-Hun Lee
  • Patent number: 10916655
    Abstract: A ferroelectric semiconductor device includes an active region extending in one direction, a gate insulating layer crossing the active region, a ferroelectric layer disposed on the gate insulating layer and including a hafnium oxide, a gate electrode layer disposed on the ferroelectric layer, and source/drain regions disposed on the active region to be adjacent to both sides of the gate insulating layer, wherein the ferroelectric layer includes 20% or more of orthorhombic crystals, and an upper surface of the source/drain region is located at a level equal to or higher than an upper surface of the ferroelectric layer.
    Type: Grant
    Filed: October 3, 2019
    Date of Patent: February 9, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Woobin Song, Heiseung Kim, Mirco Cantoro, Sangwoo Lee, Minhee Cho, Beomyong Hwang
  • Patent number: 10896951
    Abstract: A semiconductor device includes a channel layer located on a substrate, the channel layer including a conductive oxide, a gate structure located on the channel layer, the gate structure including a gate electrode and gate spacers located on both sidewalls of the gate electrode, and source and drain regions located on both sides of the gate structure in recess regions having a first height from a top surface of the channel layer. The source and drain regions are configured to apply tensile stress to a portion of the channel layer located under the gate structure.
    Type: Grant
    Filed: August 20, 2019
    Date of Patent: January 19, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Woo-bin Song, Hei-seung Kim, Mirco Cantoro, Sang-woo Lee, Min-hee Cho, Beom-yong Hwang
  • Patent number: 10868125
    Abstract: A semiconductor device includes an active pattern provided on a substrate and a gate electrode crossing over the active pattern. The active pattern includes a first buffer pattern on the substrate, a channel pattern on the first buffer pattern, a doped pattern between the first buffer pattern and the channel pattern, and a second buffer pattern between the doped pattern and the channel pattern. The doped pattern includes graphene injected with an impurity.
    Type: Grant
    Filed: August 6, 2019
    Date of Patent: December 15, 2020
    Inventors: Mirco Cantoro, Zhenhua Wu, Krishna Bhuwalka, Sangsu Kim, Shigenobu Maeda
  • Publication number: 20200365733
    Abstract: A ferroelectric semiconductor device includes an active region extending in one direction, a gate insulating layer crossing the active region, a ferroelectric layer disposed on the gate insulating layer and including a hafnium oxide, a gate electrode layer disposed on the ferroelectric layer, and source/drain regions disposed on the active region to be adjacent to both sides of the gate insulating layer, wherein the ferroelectric layer includes 20% or more of orthorhombic crystals, and an upper surface of the source/drain region is located at a level equal to or higher than an upper surface of the ferroelectric layer.
    Type: Application
    Filed: October 3, 2019
    Publication date: November 19, 2020
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Woobin SONG, Heiseung KIM, Mirco CANTORO, Sangwoo LEE, Minhee CHO, Beomyong HWANG
  • Publication number: 20200343382
    Abstract: The present disclosure relates to a field-effect transistor and a method of fabricating the same. A field-effect transistor includes a semiconductor substrate including a first semiconductor material having a first lattice constant, and a fin structure on the semiconductor substrate. The fin structure includes a second semiconductor material having a second lattice constant that is different from the first lattice constant. The fin structure further includes a lower portion that is elongated in a first direction, a plurality of upper portions protruding from the lower portion and elongated in a second direction that is different from the first direction, and a gate structure crossing the plurality of upper portions.
    Type: Application
    Filed: July 8, 2020
    Publication date: October 29, 2020
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Mirco CANTORO, Yeoncheol HEO
  • Patent number: 10734521
    Abstract: The present disclosure relates to a field-effect transistor and a method of fabricating the same. A field-effect transistor includes a semiconductor substrate including a first semiconductor material having a first lattice constant, and a fin structure on the semiconductor substrate. The fin structure includes a second semiconductor material having a second lattice constant that is different from the first lattice constant. The fin structure further includes a lower portion that is elongated in a first direction, a plurality of upper portions protruding from the lower portion and elongated in a second direction that is different from the first direction, and a gate structure crossing the plurality of upper portions.
    Type: Grant
    Filed: December 6, 2018
    Date of Patent: August 4, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Mirco Cantoro, Yeoncheol Heo
  • Publication number: 20200227519
    Abstract: A semiconductor device includes a channel layer located on a substrate, the channel layer including a conductive oxide, a gate structure located on the channel layer, the gate structure including a gate electrode and gate spacers located on both sidewalls of the gate electrode, and source and drain regions located on both sides of the gate structure in recess regions having a first height from a top surface of the channel layer. The source and drain regions are configured to apply tensile stress to a portion of the channel layer located under the gate structure.
    Type: Application
    Filed: August 20, 2019
    Publication date: July 16, 2020
    Inventors: Woo-bin SONG, Hei-seung KIM, Mirco CANTORO, Sang-woo LEE, Min-hee CHO, Beom-yong HWANG