Abstract: Probe systems and methods including active environmental control are disclosed herein. The methods include placing a substrate, which includes a device under test (DUT), on a support surface of a chuck. The support surface extends within a measurement environment that is at least partially surrounded by a measurement chamber. The methods further include determining a variable associated with a moisture content of the measurement environment and receiving a temperature associated with the measurement environment. The methods also include supplying a purge gas stream to the measurement chamber at a purge gas flow rate and selectively varying the purge gas flow rate such that a dew point temperature of the measurement environment is within a target dew point temperature range. The methods further include providing a test signal to the DUT and receiving a resultant signal from the DUT. The systems include probe systems that perform the methods.

Abstract: A device for rapidly changing objectives with threaded fastening on an optical instrument comprises an instrument adaptor which has, at one end, an external thread corresponding to the external thread of the objective, and, at the other end, a bayonet mount for fixably holding a bayonet base, and an objective adaptor which has, at one end, a bayonet base which can be connected to the bayonet mount of the instrument adaptor, and, at the other end, an internal thread corresponding to the internal thread of the optical instrument.

Abstract: The invention relates to a device for rapidly changing objectives with threaded fastening on an optical instrument. The object of the present invention of specifying a device which in the case of a microscope with a threaded connection for the objective substantially simplifies the interchange of the objective and greatly shortens the time required for the interexchange, is achieved by a device for removably fitting an objective with an external thread on a corresponding internal thread of an optical instrument which comprises an instrument adaptor which has at one end an external thread corresponding to the external thread of the objective, and at the other end, a bayonet mount for fixably holding a bayonet base, and comprises an objective adaptor which has at one end a bayonet base which can be connected to the bayonet mount of the instrument adaptor, and at the other end an internal thread corresponding to the internal thread of the optical instrument.