Abstract: A method for fabricating a thermal management substrate comprises acts of ion-implanting a substrate material to form a substrate layer, a ion-implanted layer, and an overlay layer; bonding a handle wafer to the overlay layer with a SiO2 bonding layer; splitting the ion-implanted wafer at the ion-implanted layer, resulting in a handle wafer SiO2 bonded with the overlay layer; depositing an insulating layer onto the overlay layer; and removing the handle wafer, whereby the resulting thermal management substrate comprises an overlay layer epitaxially fused with the insulating layer.

Abstract: The present invention utilizes the strong piezoelectric effect, found in group-III nitride materials to circumvent the need to selectively remove Gallium Nitride (GaN) in the fabrication of GaN/AlGaN Heterostructure Field Effect Transistors. The transistor is comprised of a semi-insulating substrate 300, a buffer layer 302 which is in continual contact with the semi-insulating substrate 300. A GaN active channel 304 is atop the buffer layer 302. An AlGaN barrier 306 in laid on top of, and is in continual contact with, the GaN active channel 304. Thereafter, there is a source contact 308 and a drain contact 310 both in physical contact with the GaN active channel 308. There is a gate 312 upon the AlGaN barrier 306 and between the source contact 308 and a drain contact 310. At least one dielectric stressor 314 is placed upon the AlGaN barrier 306. The dielectric stressors 314 are between the gate 312 and the source 308 and drain 310 contacts.