Patents by Inventor Misako Saitou

Misako Saitou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Filter device
    Patent number: 5434644
    Abstract: A filter device for a resist-treatment system, comprising a frame having an aperture through which the outside air is introduced into the resist-treatment system, a fan unit for sucking the outside air into the aperture, and a filter element supported by means of the frame so as to be situated at least on one side the fan unit, the filter element including a porous body containing an acid component capable of adsorbing an alkali component by reaction.
    Type: Grant
    Filed: May 18, 1994
    Date of Patent: July 18, 1995
    Assignee: Tokyo Electron Limited
    Inventors: Junichi Kitano, Misako Saitou, Yuji Kakazu