Abstract: A color combining optical system is disclosed, with which light of a plurality of colors can be combined while reducing the loss of light due to fluctuations in the incidence angle on a polarization color combining film. The color combining optical system, which combines a first color light and a second color light, includes a polarization color combining film made of a multilayer film. The polarization color combining film combines a first polarization component of the first color light and a second polarization component of the second color light, which has a polarization direction substantially perpendicular to the first polarization component, with an efficiency of 90% or more in a predetermined incidence angle range.

Abstract: A color combining optical system is disclosed, with which light of a plurality of colors can be combined while reducing the loss of light due to fluctuations in the incidence angle on a polarization color combining film. The color combining optical system, which combines a first color light and a second color light, includes a polarization color combining film made of a multilayer film. The polarization color combining film combines a first polarization component of the first color light and a second polarization component of the second color light, which has a polarization direction substantially perpendicular to the first polarization component, with an efficiency of 90% or more in a predetermined incidence angle range.

Abstract: A reflection mirror includes an underlaying layer, a reflection layer, and a protective layer on a resin substrate in the order from the resin substrate, in which the reflection layer is composed of an Ag film, each of the underlaying layer and the protective layer includes at least one TiO2 film and at least one Al2O3 film, and a film of the underlaying layer contacting the resin substrate is a TiO2 film.

Abstract: Disclosed is a polarization beam splitter and a method of producing the same, in which the polarization beam splitter has superior polarization separation efficiency and has small angle dependence. A transparent base material having a polarization separation film, comprising a dielectric multilayered film, is cemented at the cemented surface of the beam splitter, to provide an array-like plane type polarization beam splitter, wherein an incidence angle ?g of light upon the polarization separation film is selected to satisfy a relation ?g>45 deg.

Abstract: A minute multilayer film with good characteristics is automatically and continuously formed on an in-line basis at a low production cost. In a sputtering chamber, there is provided a bonded target in which a first Ti member, a first Si member, a second Ti member, a Ta member, and a second Si member are bonded and which acts as a cathode electrode. A power is supplied between a substrate and the bonded target, and a substrate and a substrate holder are moved. With the movement, the substrate successively comes to face the first Ti member, first Si member, second Ti member, Ta member, and second Si member of the bonded target and sputtering is carried out on the substrate. A multilayer thin film of a structure consisting of a TiO2 film, an SiO2 film, a TiO2 film, a Ta2O5 film, and an SiO2 film is formed on a surface of the substrate. The thickness of each layer is adjusted by a film thickness correcting plate interposed between the substrate and the bonded target.

Abstract: A reflection mirror includes an underlaying layer, a reflection layer, and a protective layer on a resin substrate in the order from the resin substrate, in which the reflection layer is composed of an Ag film, each of the underlaying layer and the protective layer includes at least one TiO2 film and at least one Al2O3 film, and a film of the underlaying layer contacting the resin substrate is a TiO2 film.

Abstract: A color combining optical system is disclosed, with which light of a plurality of colors can be combined while reducing the loss of light due to fluctuations in the incidence angle on a polarization color combining film. The color combining optical system, which combines a first color light and a second color light, includes a polarization color combining film made of a multilayer film. The polarization color combining film combines a first polarization component of the first color light and a second polarization component of the second color light, which has a polarization direction substantially perpendicular to the first polarization component, with an efficiency of 90% or more in a predetermined incidence angle range.

Abstract: A minute multilayer film with good characteristics is automatically and continuously formed on an in-line basis at a low production cost. In a sputtering chamber, there is provided a bonded target in which a first Ti member, a first Si member, a second Ti member, a Ta member, and a second Si member are bonded and which acts as a cathode electrode. A power is supplied between a substrate and the bonded target, and a substrate and a substrate holder are moved. With the movement, the substrate successively comes to face the first Ti member, first Si member, second Ti member, Ta member, and second Si member of the bonded target and sputtering is carried out on the substrate. A multilayer thin film of a structure consisting of a TiO2 film, an SiO2 film, a TiO2 film, a Ta2O5 film, and an SiO2 film is formed on a surface of the substrate. The thickness of each layer is adjusted by a film thickness correcting plate interposed between the substrate and the bonded target.

Abstract: An optical element comprises a transparent substrate, typically a glass prism, and a dielectric multilayer film formed on the transparent substrate. The dielectric multilayer film is formed by alternately laying low refractive index layers showing a refractive index between 1.6 and 1.8 and high refractive index layers showing a refractive index not less than 2.2. The multilayer film satisfies the relation of 1≦(nH×dH)/(nL×dL)≦2, where nH and dH represent the refractive index and the film thickness, respectively, of each high refractive index layer, while nL and dL represent those of each low refractive index layer. The optical element is applicable to various optical instruments including liquid crystal projectors and cameras.

Abstract: A display apparatus is constituted by a planar optical modulation device comprising a transparent substrate and a plurality of pixels disposed thereon so as to be each capable of optical modulation thereat, and a masking member disposed on the transparent substrate and with spacings. The making member includes a layer of a metal compound containing C, O and a metal element. The masking member is effective in reducing a degree of reflection of external light (from a viewer side) while maintaining a sufficient light-interrupting property, thus resulting in a display apparatus exhibiting good display performances.

Abstract: A display apparatus includes a planar optical modulation device having a transparent substrate and a plurality of pixels disposed thereon so as to be each capable of optical modulation thereat, and a masking member disposed on the transparent substrate and including spacings. The making member includes a layer of a metal compound containing C, O and a metal element. The masking member is effective in reducing a degree of reflection of external light (from a viewer side) while maintaining a sufficient light-interrupting property, thus resulting in a display apparatus exhibiting good display performances.

Abstract: A display apparatus includes a planar optical modulation device having a transparent substrate and a plurality of pixels disposed thereon so as to be each capable of optical modulation thereat, and a masking member disposed on the transparent substrate and including spacings. The making member includes a layer of a metal compound containing C, O and a metal element. The masking member is effective in reducing a degree of reflection of external light (from a viewer side) while maintaining a sufficient light-interrupting property, thus resulting in a display apparatus exhibiting good display performances.

Abstract: In formation of thin films on both surfaces of a substrate such as a lens or the like, a pair of cluster beam evaporation sources are provided in mutually separate manner in a film forming chamber. The substrate is disposed between the pair of cluster beam evaporation sources. The cluster beam evaporation source includes a crucible which is arranged to be inclined toward the substrate, or which has a nozzle on a lateral face opposed to the substrate.

Abstract: A thin-film-type ND filter which attenuates the amount of light transmission is formed on a transparent substrate by using two or more types of metallic oxide having a refractive index n and an attenuation coefficient k which are in the range of 1.0 to 3.0 in the wavelength region of the visible region, making it possible to obtain flat transmittance characteristics.

Abstract: An Optical filter is provided on a light receiving surface of an image sensor. The filter has a plurality of thin layers alternately laminated. The thin layers alternately consist of a dielectric layer having a high refractive index and a metal layer and each thin layer has its stress .sigma. in a range -5 GPa.ltoreq..sigma.<-0.2 GPa.

Abstract: In a method of manufacturing a thin film, evaporated particles are generated by a vapor source and are clustered. The clustered evaporated particles are deposited onto a substrate in a vacuum atmosphere without ionizing the particles. A partial pressure of water in the vacuum atmoshpere is controlled to not more than 5.times.10.sup.-6 Torr. A temperature of the substrate is maintained to be 150.degree. C. or lower. A film according to this method has a high adhesion characteristics and a high mechanical strength without heating the substrate to a high temperature and without damaging the substrate by ions.

Abstract: An evaporation material is employed to form an optical thin film which is adapted to be formed on an optical element such as a lens or the like. The evaporation material is provided such that zirconium oxide (ZrO.sub.2) is mixed with a titanium oxide (TiO.sub.A) having a molar ratio A(O/Ti) of oxygen to titanium in a range of 1.0 to 1.75 so that the mixture assumes a molar ratio (Ti/Zr) of titanium to zirconium in a range of 1.0 to 4.0. The mixture is sintered or fused and solidified.

Abstract: An optical recording medium including an opto-magnetic recording medium is provided with a protective layer of an oxide-nitride mixture on either one side or both sides of the optical recording layer. Because of the provision of the mixture layer, the optical recording layer not only has an improved durability such as a corrosion resistance but also can have improved writing and reading efficiencies through adjustment of the refractive index of the mixture layer.

Abstract: In an optical recording medium having an optical recording layer provided on a substrate, a carbide film of a substance selected from among tungsten, boron, molybdenum, hafnium, niobium, titanium, chromium, vanadium, tantalum and silicon is formed on one or each side of the recording layer.

Abstract: A magnetic recording medium comprising a substrate, a magnetic recording layer made of an amorphous magnetic film on the substrate, and an anticorrosive layer prepared by oxidation treatment of the surface of the amorphous magnetic film.