Patents by Inventor Mitsuhiro Yoda
Mitsuhiro Yoda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9086428Abstract: A functional device according to an embodiment of the invention includes: an insulating substrate; a movable section; movable electrode fingers provided in the movable section; and fixed electrode fingers provided on the insulating substrate and arranged to be opposed to the movable electrode fingers. The fixed electrode fingers include: first fixed electrode fingers arranged on one side of the movable electrode fingers; and second fixed electrode fingers arranged on the other side of the movable electrode fingers. The first fixed electrode fingers and the second fixed electrode fingers are arranged to be spaced apart from each other.Type: GrantFiled: October 20, 2011Date of Patent: July 21, 2015Assignee: Seiko Epson CorporationInventors: Mitsuhiro Yoda, Shuichi Kawano, Shigekazu Takagi, Seiji Yamazaki
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Patent number: 9068835Abstract: A functional element including a substrate having a principal surface, a groove portion (a first groove portion, a second groove portion) disposed on the principal surface, and a fixed electrode section (a first fixed electrode finger, a second fixed electrode finger) laid across the groove portion on the substrate, wherein, in the groove portion, a raised portion formed by using at least one of the substrate and the fixed electrode section is provided in a position overlapping with the fixed electrode section in a plan view, the raised portion has a bonded surface (an end face), a wiring line (a first wiring line, a second wiring line) is disposed on the bonded surface, and the substrate and the fixed electrode section are connected with the wiring line sandwiched between the substrate and the fixed electrode section.Type: GrantFiled: April 18, 2012Date of Patent: June 30, 2015Assignee: Seiko Epson CorporationInventors: Mitsuhiro Yoda, Shuichi Kawano, Shigekazu Takagi, Seiji Yamazaki
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Patent number: 8537447Abstract: An actuator includes a mass section; a support section; a coupling section for coupling the mass section rotatably to the support section so as to support the mass section with cantilever structure; and a pair of driving sources including a piezoelectric element for rotating the mass section, wherein the pair of driving sources are provided separately from each other with respect to a central axis of rotation of the mass section, each of the driving sources is provided slidably with respect to the coupling section or the support section, and the actuator is structured such that it causes the pair of piezoelectric elements to expand and contract in phases opposite to each other, so as to rotate at least a part of the coupling section while torsionally deforming the mass section.Type: GrantFiled: December 12, 2012Date of Patent: September 17, 2013Assignee: Seiko Epson CorporationInventors: Yasushi Mizoguchi, Mitsuhiro Yoda, Makiko Nakamura
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Publication number: 20130042684Abstract: An acceleration sensor includes a base substrate provided with a first recess part, and a sensor part located on the first recess part and swingably supported in a depth direction of the first recess part by a support part, wherein the sensor part is sectioned into a first part and a second part by the support part, includes a movable electrode part in the first part and the second part, a through hole is provided at least at an end side in the second part larger in mass than the first part, and the base substrate includes a fixed electrode part in a position opposed to the movable electrode part in the first recessed part, and a second recess part deeper than the first recess part is provided in a position opposed to the end side of the sensor part.Type: ApplicationFiled: August 8, 2012Publication date: February 21, 2013Applicant: SEIKO EPSON CORPORATIONInventor: Mitsuhiro YODA
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Publication number: 20130042685Abstract: A physical quantity sensor includes a base substrate, a movable part located on the base substrate and provided on a principal surface of the base substrate, a movable electrode part provided in the movable part, and a fixed electrode part provided on the principal surface of the base substrate and located to be opposed to a movable electrode finger, and the fixed electrode part is connected to fixed electrode wiring provided at the principal surface side of the base substrate, the movable electrode part is connected to movable electrode wiring provided at the principal surface side of the base substrate, and a shield part is provided between the fixed electrode wiring and the movable electrode wiring.Type: ApplicationFiled: August 8, 2012Publication date: February 21, 2013Applicant: SEIKO EPSON CORPORATIONInventor: Mitsuhiro YODA
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Patent number: 8355191Abstract: An actuator includes a mass section; a support section; a coupling section for coupling the mass section rotatably to the support section so as to support the mass section with cantilever structure; and a pair of driving sources including a piezoelectric element for rotating the mass section, wherein the pair of driving sources are provided separately from each other with respect to a central axis of rotation of the mass section, each of the driving sources is provided slidably with respect to the coupling section or the support section, and the actuator is structured such that it causes the pair of piezoelectric elements to expand and contract in phases opposite to each other, so as to rotate at least a part of the coupling section while torsionally deforming the mass section.Type: GrantFiled: September 7, 2007Date of Patent: January 15, 2013Assignee: Seiko Epson CorporationInventors: Yasushi Mizoguchi, Mitsuhiro Yoda, Makiko Nakamura
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Publication number: 20120267150Abstract: A functional element including a substrate having a principal surface, a groove portion (a first groove portion, a second groove portion) disposed on the principal surface, and a fixed electrode section (a first fixed electrode finger, a second fixed electrode finger) laid across the groove portion on the substrate, wherein, in the groove portion, a raised portion formed by using at least one of the substrate and the fixed electrode section is provided in a position overlapping with the fixed electrode section in a plan view, the raised portion has a bonded surface (an end face), a wiring line (a first wiring line, a second wiring line) is disposed on the bonded surface, and the substrate and the fixed electrode section are connected with the wiring line sandwiched between the substrate and the fixed electrode section.Type: ApplicationFiled: April 18, 2012Publication date: October 25, 2012Applicant: SEIKO EPSON CORPORATIONInventors: Mitsuhiro YODA, Shuichi KAWANO, Shigekazu TAKAGI, Seiji YAMAZAKI
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Patent number: 8179583Abstract: An actuator includes a movable plate having a plate shape, a pair of axial parts that is elastically deformable and supporting the movable plate rotatable, and a tension adjuster adjusting tension on an axial direction of the pair of the axial parts and including a torsional axis that is formed jointly or integrally with one of the axial parts and disposed orthogonally to the axial direction of the axial parts, and a drive source that torsionally deforms the torsional axis, wherein the torsional axis is torsionally deformed through the action of the drive source and a spring constant of the pair of the axial parts is adjusted by adjusting the tension on the pair of the axial parts.Type: GrantFiled: February 25, 2010Date of Patent: May 15, 2012Assignee: Seiko Epson CorporationInventor: Mitsuhiro Yoda
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Publication number: 20120111615Abstract: A functional device according to an embodiment of the invention includes: an insulating substrate; a movable section; movable electrode fingers provided in the movable section; and fixed electrode fingers provided on the insulating substrate and arranged to be opposed to the movable electrode fingers. The fixed electrode fingers include: first fixed electrode fingers arranged on one side of the movable electrode fingers; and second fixed electrode fingers arranged on the other side of the movable electrode fingers. The first fixed electrode fingers and the second fixed electrode fingers are arranged to be spaced apart from each other.Type: ApplicationFiled: October 20, 2011Publication date: May 10, 2012Applicant: SEIKO EPSON CORPORATIONInventors: Mitsuhiro YODA, Shuichi KAWANO, Shigekazu TAKAGI, Seiji YAMAZAKI
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Publication number: 20110120221Abstract: A MEMS sensor includes: a fixed portion; an elastically deformable portion; a movable weight portion coupled to the fixed portion via the elastically deformable portion, the movable weight portion including a coupling portion; a plurality of fixed electrode portions arranged in a first direction and protruding in a second direction perpendicular to the first direction; and a plurality of movable electrode portions protruding from the coupling portion in the second direction, provided to respectively face the plurality of fixed electrode portions, and arranged in the first direction, wherein the movable weight portion has an additional weight portion connected to the coupling portion.Type: ApplicationFiled: November 17, 2010Publication date: May 26, 2011Applicant: Seiko Epson CorporationInventor: Mitsuhiro Yoda
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Patent number: 7926369Abstract: The actuator has a movable mass portion and a pair of drive mechanisms for driving the movable mass portion. Each of the pair of drive mechanisms includes a drive mass portion, a support portion for supporting the drive mass portion, a first elastic connecting portion interconnecting the drive mass portion and the support portion so as to allow the drive mass portion to be pivoted about a pivotal axis with respect to the support portion, and a second elastic connecting portion interconnecting the drive mass portion and the movable mass portion so as to allow the movable mass portion to be pivoted about a pivotal axis with respect to the drive mass portion. The first elastic connecting portion includes a pair of bending bars opposed to each other with interposing the pivotal axis of the drive mass portion therebetween.Type: GrantFiled: June 21, 2006Date of Patent: April 19, 2011Assignee: Seiko Epson CorporationInventor: Mitsuhiro Yoda
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Patent number: 7880365Abstract: An actuator 100 includes: a pair of driving portions 1, 11 spaced apart from each other; a movable portion 2 provided between the pair of driving portions 1, 11; a pair of supporting portions 3, 3 for supporting the pair of driving portions 1, 11 and the movable portion 2; a pair of first elastic connecting portions 4, 4 which respectively connect the pair of driving portions 1, 11 to the pair of supporting portions 3, 3 so that each of the driving portions 1, 11 can rotate with respect to the supporting portions 3, 3; and a pair of second elastic connecting portions 5, 5 which respectively connect the movable portion 2 to the pair of driving portions 1, 11 so that the movable portion 2 can rotate in accordance with the rotation of the pair of driving portions 1, 11.Type: GrantFiled: December 3, 2009Date of Patent: February 1, 2011Assignee: Seiko Epson CorporationInventors: Mitsuhiro Yoda, Hirokazu Ito
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Patent number: 7808150Abstract: An actuator that can be driven at a reduced voltage and manufactured with ease, and a method for manufacturing the same are provided. The actuator includes second supporting portions 31 and 32 secured to a supporting substrate 4 through a spacer, fixed portions 33 and 34 secured to the supporting substrate 4 with no intervention of the spacer, fixed comb electrodes 331 and 341 integrally formed the fixed portions 33 and 34 and meshing with movable comb electrodes 211 and 212 in a spaced-apart relationship, and bridge portions 35 and 36 for connecting the fixed portions 33 and 34 to the second supporting portions 31 and 32.Type: GrantFiled: October 28, 2009Date of Patent: October 5, 2010Assignees: Seiko Epson Corporation, The University of Tokyo, Santec CorporationInventors: Mitsuhiro Yoda, Keiji Isamoto, Hiroshi Toshiyoshi
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Publication number: 20100149613Abstract: An actuator includes a movable plate having a plate shape, a pair of axial parts that is elastically deformable and supporting the movable plate rotatable, and a tension adjuster adjusting tension on an axial direction of the pair of the axial parts and including a torsional axis that is formed jointly or integrally with one of the axial parts and disposed orthogonally to the axial direction of the axial parts, and a drive source that torsionally deforms the torsional axis, wherein the torsional axis is torsionally deformed through the action of the drive source and a spring constant of the pair of the axial parts is adjusted by adjusting the tension on the pair of the axial parts.Type: ApplicationFiled: February 25, 2010Publication date: June 17, 2010Applicant: SEIKO EPSON CORPORATIONInventor: Mitsuhiro YODA
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Patent number: 7719163Abstract: An actuator that can be driven at a reduced voltage and manufactured with ease, and a method for manufacturing the same are provided. The actuator includes second supporting portions 31 and 32 secured to a supporting substrate 4 through a spacer, fixed portions 33 and 34 secured to the supporting substrate 4 with no intervention of the spacer, fixed comb electrodes 331 and 341 integrally formed the fixed portions 33 and 34 and meshing with movable comb electrodes 211 and 212 in a spaced-apart relationship, and bridge portions 35 and 36 for connecting the fixed portions 33 and 34 to the second supporting portions 31 and 32.Type: GrantFiled: May 30, 2006Date of Patent: May 18, 2010Assignees: Seiko Epson Corporation, The University of Tokyo, Santec CorporationInventors: Mitsuhiro Yoda, Keiji Isamoto, Hiroshi Toshiyoshi
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Patent number: 7697185Abstract: An actuator includes a movable plate having a plate shape, a pair of axial parts that is elastically deformable and supporting the movable plate rotatable, and a tension adjuster adjusting tension on an axial direction of the pair of the axial parts and including a torsional axis that is formed jointly or integrally with one of the axial parts and disposed orthogonally to the axial direction of the axial parts, and a drive source that torsionally deforms the torsional axis, wherein the torsional axis is torsionally deformed through the action of the drive source and a spring constant of the pair of the axial parts is adjusted by adjusting the tension on the pair of the axial parts.Type: GrantFiled: April 28, 2008Date of Patent: April 13, 2010Assignee: Seiko Epson CorporationInventor: Mitsuhiro Yoda
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Publication number: 20100079835Abstract: An actuator 100 includes: a pair of driving portions 1, 11 spaced apart from each other; a movable portion 2 provided between the pair of driving portions 1, 11; a pair of supporting portions 3, 3 for supporting the pair of driving portions 1, 11 and the movable portion 2; a pair of first elastic connecting portions 4, 4 which respectively connect the pair of driving portions 1, 11 to the pair of supporting portions 3, 3 so that each of the driving portions 1, 11 can rotate with respect to the supporting portions 3, 3; and a pair of second elastic connecting portions 5, 5 which respectively connect the movable portion 2 to the pair of driving portions 1, 11 so that the movable portion 2 can rotate in accordance with the rotation of the pair of driving portions 1, 11.Type: ApplicationFiled: December 3, 2009Publication date: April 1, 2010Applicant: SEIKO EPSON CORPORATIONInventors: Mitsuhiro YODA, Hirokazu ITO
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Publication number: 20100045137Abstract: An actuator that can be driven at a reduced voltage and manufactured with ease, and a method for manufacturing the same are provided. The actuator includes second supporting portions 31 and 32 secured to a supporting substrate 4 through a spacer, fixed portions 33 and 34 secured to the supporting substrate 4 with no intervention of the spacer, fixed comb electrodes 331 and 341 integrally formed the fixed portions 33 and 34 and meshing with movable comb electrodes 211 and 212 in a spaced-apart relationship, and bridge portions 35 and 36 for connecting the fixed portions 33 and 34 to the second supporting portions 31 and 32.Type: ApplicationFiled: October 28, 2009Publication date: February 25, 2010Applicants: SEIKO EPSON CORPORATION, THE UNIVERSITY OF TOKYOInventors: Mitsuhiro YODA, Keiji ISAMOTO, Hiroshi TOSHIYOSHI
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Patent number: 7649301Abstract: An actuator 100 includes: a pair of driving portions 1, 11 spaced apart from each other; a movable portion 2 provided between the pair of driving portions 1, 11; a pair of supporting portions 3, 3 for supporting the pair of driving portions 1, 11 and the movable portion 2; a pair of first elastic connecting portions 4, 4 which respectively connect the pair of driving portions 1, 11 to the pair of supporting portions 3, 3 so that each of the driving portions 1, 11 can rotate with respect to the supporting portions 3, 3; and a pair of second elastic connecting portions 5, 5 which respectively connect the movable portion 2 to the pair of driving portions 1, 11 so that the movable portion 2 can rotate in accordance with the rotation of the pair of driving portions 1, 11.Type: GrantFiled: December 14, 2005Date of Patent: January 19, 2010Assignee: Seiko Epson CorporationInventors: Mitsuhiro Yoda, Hirokazu Ito
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Publication number: 20080304124Abstract: An actuator includes a movable plate having a plate shape, a pair of axial parts that is elastically deformable and supporting the movable plate rotatable, and a tension adjuster adjusting tension on an axial direction of the pair of the axial parts and including a torsional axis that is formed jointly or integrally with one of the axial parts and disposed orthogonally to the axial direction of the axial parts, and a drive source that torsionally deforms the torsional axis, wherein the torsional axis is torsionally deformed through the action of the drive source and a spring constant of the pair of the axial parts is adjusted by adjusting the tension on the pair of the axial parts.Type: ApplicationFiled: April 28, 2008Publication date: December 11, 2008Applicant: SEIKO EPSON CORPORATIONInventor: Mitsuhiro YODA