Abstract: It is possible to inspect scratches and staining on a wafer surface on the basis of an LPD map obtained from a particle counter 11, by providing a means 21 for detecting aggregation of clustered point defects (LPD) from two-dimensional distribution information 30 for such fine LPD on the surface of a silicon wafer, and an improvement in the inspection efficiency and the precision of judgements of “defective” status can be achieved. Furthermore, the system is devised so that the trend of generation of scratches and staining in a specified process can easily be detected by accumulating wafer surface information such as scratch information, staining information and the like for the wafer surface detected by a wafer surface inspection device 11 (especially as image information or numerical information), and superposing sets of information thus accumulated. Plans for improving processes can be made by both the wafer supplier and wafer consumer by sharing such information with both parties.

Abstract: It is possible to inspect scratches and staining on a wafer surface on the basis of an LPD map obtained from a particle counter 11, by providing a means 21 for detecting aggregation of clustered point defects (LPD) from two-dimensional distribution information 30 for such fine LPD on the surface of a silicon wafer, and an improvement in the inspection efficiency and the precision of judgements of “defective” status can be achieved. Furthermore, the system is devised so that the trend of generation of scratches and staining in a specified process can easily be detected by accumulating wafer surface information such as scratch information, staining information and the like for the wafer surface detected by a wafer surface inspection device 11 (especially as image information or numerical information), and superposing sets of information thus accumulated. Plans for improving processes can be made by both the wafer supplier and wafer consumer by sharing such information with both parties.

Abstract: A solid electrolytic capacitor includes an anode element made of a valve action metal, a dielectric oxide film formed on a surface of the anode element, a solid electrolytic layer formed on a surface of the dielectric oxide film, and a cathode layer formed on a surface of the solid electrolytic layer. The solid electrolytic layer has an iron concentration not greater than 100 ppm. Alternatively or in combination therewith, a weight fraction of residues in the solid electrolytic layer is smaller than 5 wt %. The polymerization residue is an oxidizing agent and a monomer that is produced when such solid electrolytic layer is formed.

Abstract: An apparatus for manufacturing a solid electrolytic capacitor includes an anodization part, a polymerization part, a cathode layer formation part, an assembly part, and a molding part. The polymerization part includes a plurality of polymerization baths of a substantially same structure and a conveyance mechanism. In addition the plurality of polymerization baths are placed around the conveyance mechanism within a conveyance range.

Abstract: An apparatus for manufacturing a solid electrolytic capacitor includes an anodization part, a polymerization part, a cathode layer formation part, an assembly part, and a molding part. The polymerization part includes a plurality of polymerization baths of a substantially same structure and a conveyance mechanism. In addition the plurality of polymerization baths are placed around the conveyance mechanism within a conveyance range.

Abstract: A solid electrolytic capacitor includes an anode element made of a valve action metal, a dielectric oxide film formed on a surface of the anode element, a solid electrolytic layer formed on a surface of the dielectric oxide film, and a cathode layer formed on a surface of the solid electrolytic layer. The solid electrolytic layer has an iron concentration not greater than 100 ppm. Alternatively or in combination therewith, a weight fraction of residues in the solid electrolytic layer is smaller than 5 wt %. The polymerization residue is an oxidizing agent and a monomer that is produced when such solid electrolytic layer is formed.

Abstract: The invention provides an ozone generator controlling apparatus capable of controlling an ozone generator so that when a discharge breakdown occurs in some discharge element, the operation of generating ozone can be continued without imposing a bad influence on the remaining normal discharge elements. When an anomaly occurs in one of or a plurality of discharge elements during the operation of generating ozone, the anomaly is detected by an anomaly detection means. In response to the detection of the anomaly, first output control means reduces the output of an AC power supply circuit to a sufficiently low level so that after the discharge element having the anomaly is isolated from the circuit the operation of generating ozone can be continued with the remaining normal discharge elements without interruption and without causing the normal discharge elements to encounter an overload current thus preventing them from being broken one after another.

Abstract: A container for packing semiconductor wafer is provided which has superior airtightness to prevent contamination of the wafers by air. A gasket groove is formed on the case of the container. A gasket is inserted within the gasket groove. The gasket contains protrusions that assist in providing an airtight seal. The case and a lid are securely fastened together by the engagement of four clips within respective clip recesses that are formed in the container and lid.

Abstract: An ozonizer in which a pair of plate-like electrode plates are arranged opposite to each other so as to form a discharge space therebetween, and ceramic dielectric layers are arranged on the surface on the side of the discharge space of said electrode plates, wherein a plate-like anode 4 is arranged between the dielectrics 31 and 32, extreme ends 41 and 42 having sharp extreme ends of a number of protrusions are formed on both surfaces of the anode 4, the anode 4 is arranged between the dielectrics 41 and 42 in a state where the extreme ends 41 and 42 are in contact with the surfaces of the dielectrics 31 and 32 on both sides, the anode 4 is formed with a number of through-holes extending through both surfaces, and the anode being formed of expanded metal.

Abstract: An ozone production apparatus for increasing ozone generation efficiency by improving ceramic plate cooling efficiency. An ozonizer of this invention has a steel plate shaped body for use as a discharge electrode through which gas is permeable from one surface to another. This discharge electrode is faced on both sides by two ceramic plates, with a material gas flow inlet provided on one side and an ozone flow outlet on the other side. The ozonizer unit is provided with an insulated waterproof cable for applying a high voltage to the discharge electrode. This ozonizer unit is submerged inside a cooling water tank, and a high voltage, high frequency power supply unit is connected between the discharge electrode and the cooling water, with the cooling water tank as the grounded side. In this manner, since the ozonizer unit is submerged inside the cooling water tank, the cooling efficiency is improved and the ozone generation increased.

Abstract: Disclosed is an apparatus for molding a fibrous material mainly containing waste paper, in which a fibrous material mainly containing waste paper is thrown into a cylindrical cylinder from a raw material throwing port, being fed to the leading edge of the cylindrical casing by the feeding action of a rotary screw provided in the cylindrical casing, and discharged from the leading edge, the apparatus comprising: a molding/discharging member provided at the leading edge of the cylindrical casing for compressing the fibrous material fed to the leading edge of the casing into a specified shape and discharging the compressed fibrous material.

Abstract: According to the present invention there are provided a method and an apparatus capable of disintegrating used paper into long pulp fibers without tearing it mechanically. In the apparatus, a wall surface having an undulating section is formed on an inner side of a gas flow path, with a current of air having a velocity component parallel to the wall surface and a velocity component perpendicular to and striking against the wall surface is allowed to pass through the gas flow path. Finely cut used paper pieces are allowed to pass through the gas flow path while being carried by the air current. The parallel velocity component of the air current is set at 40 m or more. An impeller is mounted within a circular casing body having an inlet port and an outlet port, and undulating teeth are formed on the inner peripheral surface of the circular casing body. The used paper, which is sucked in from the above inlet port together with the air current, is cut beforehand into pieces.

Abstract: A charged particle accelerator capable of accelerating arbitrarily charged particles to an arbitrary energy level and resonating at a low frequency suitable for accelerating heavy ions, including quadruple electrodes which are supplied with high frequency power and disposed in the direction of the center axis of a cylinder-shaped container and a resonant circuit having a capacitor and an inductor for supplying a voltage to the quadruple electrodes. The capacitor is composed of a plurality of metallic plates provided along the center axis at specified intervals in the vicinity of the quadruple electrodes, and a plurality of conductive supports supporting the metallic plates which are directly connected to the container together with the supports and the container form the inductor.

Abstract: Disclosed is an apparatus for molding a fibrous material .?.mainly containing waste paper.!., in which a fibrous material .?.mainly containing waste paper.!. is thrown into a cylindrical cylinder from a raw material throwing port, being fed to the leading edge of the cylindrical casing by the feeding action of a rotary screw provided in the cylindrical casing, and discharged from the leading edge, the apparatus comprising: a molding/discharging member provided at the leading edge of the cylindrical casing for compressing the fibrous material fed to the leading edge of the casing into a specified shape and discharging the compressed fibrous material.